A heat exchanging assembly, comprising a heat exchanger core body. The heat exchanger core body comprises first-type plates and second-type plates; each first-type plate has a first orifice, a second orifice, and a third orifice; each second-type plate has a first orifice and a second orifice; along the length or width direction of the heat exchange core body, the third orifice is located between the first orifice and the second orifice; a first flow channel has a first partial fluid path, a second partial fluid path, a third partial fluid path, and an inter-plate path; the first partial fluid path is formed at the first orifice; the second partial fluid path is formed at the second orifice; and the inter-plate path is communicated with the first partial fluid path, the second partial fluid path, and the third partial fluid path.

A liquid manifold can be assembled to an information technology (IT) rack to deliver and distribute fluid to IT equipment. The manifold can include a plurality of sections, each of the plurality of sections having one or more shut-off valves. One or more leak detection sensors can be arranged to detect leaks in any of the sections and in any of the IT equipment. A controller can control a shut-off valve to a closed position based on a detected leak. The design enables the manifold to better manage and control the fluid for mission critical IT equipment.

A liquid manifold can be assembled to an information technology (IT) rack to deliver and distribute fluid to IT equipment. The manifold can include a plurality of sections, each of the plurality of sections having one or more shut-off valves. One or more leak detection sensors can be arranged to detect leaks in any of the sections and in any of the IT equipment. A controller can control a shut-off valve to a closed position based on a detected leak. The design enables the manifold to better manage and control the fluid for mission critical IT equipment.

Methods and apparatus for processing a substrate are provided herein. For example, a cooling apparatus for use with a substrate support of a processing chamber comprises a heat exchanger, a manifold assembly comprising a first input configured to connect to an output of the heat exchanger, a second input configured to connect to a first coolant supply configured to supply a first coolant, a first output configured to connect to the substrate support of the processing chamber, and a second output configured to connect to an input of the heat exchanger, a gas input configured to connect to a second coolant supply that is configured to supply a second coolant that is different from the first coolant to the substrate support, a first three-way valve connected between the first output of the manifold assembly and the substrate support and connected between the gas input and the substrate support, and a controller configured to control supplying one of the first coolant or the second coolant during operation.

Methods and apparatus for processing a substrate are provided herein. For example, a cooling apparatus for use with a substrate support of a processing chamber comprises a heat exchanger, a manifold assembly comprising a first input configured to connect to an output of the heat exchanger, a second input configured to connect to a first coolant supply configured to supply a first coolant, a first output configured to connect to the substrate support of the processing chamber, and a second output configured to connect to an input of the heat exchanger, a gas input configured to connect to a second coolant supply that is configured to supply a second coolant that is different from the first coolant to the substrate support, a first three-way valve connected between the first output of the manifold assembly and the substrate support and connected between the gas input and the substrate support, and a controller configured to control supplying one of the first coolant or the second coolant during operation.

A heat exchanger may comprise a primary fluid path comprising an outer shell enclosing a primary cavity through which a primary fluid may flow; and a secondary fluid path coupled to the primary fluid path comprising a secondary fluid supply conduit, a secondary fluid exit conduit, and a first heat transfer element coupled fluidly between the secondary fluid supply conduit and the secondary fluid exit conduit, wherein the secondary fluid path is configured such that a secondary fluid may flow through the secondary fluid supply conduit, the first heat transfer element, and the secondary fluid exit conduit, which are in fluid communication with one another. The first heat transfer element, and additional heat transfer elements, may be disposed in the primary cavity such that the primary fluid contacts a secondary outer shell of the first heat transfer element.

A temperature sensor for a first fluid senses a temperature of the first fluid downstream of a heat exchanger. A supply for a second fluid changes a temperature of the first fluid. The supply for the second fluid passes through the heat exchanger. A valve is positioned upstream of the said heat exchanger on the supply for the second fluid, and controls a flow rate of the second fluid diverted into a bypass line compared to a flow rate of the second fluid directed through the heat exchanger, with the three-way valve controlled by a control in response to feedback from said temperature sensor. The valve changes the respective flow rates delivered into the bypass line and through the said heat exchanger in a non-linear manner with a change in valve position. A manned spaceship is also disclosed.

A temperature sensor for a first fluid senses a temperature of the first fluid downstream of a heat exchanger. A supply for a second fluid changes a temperature of the first fluid. The supply for the second fluid passes through the heat exchanger. A valve is positioned upstream of the said heat exchanger on the supply for the second fluid, and controls a flow rate of the second fluid diverted into a bypass line compared to a flow rate of the second fluid directed through the heat exchanger, with the three-way valve controlled by a control in response to feedback from said temperature sensor. The valve changes the respective flow rates delivered into the bypass line and through the said heat exchanger in a non-linear manner with a change in valve position. A manned spaceship is also disclosed.

An adaptive flow limit controller for controlling a flow rate of a fluid through a heat exchanger includes a processing circuit. The processing circuit is configured to use an adaptive model to determine a threshold flow rate of the fluid through the heat exchanger at which a gradient of a temperature difference of the fluid across the heat exchanger with respect to the flow rate of the fluid through the heat exchanger has a threshold gradient value. The processing circuit is configured to operate a flow control device to maintain the flow rate of the fluid of through the heat exchanger at less than or equal to the threshold flow rate.

An adaptive flow limit controller for controlling a flow rate of a fluid through a heat exchanger includes a processing circuit. The processing circuit is configured to use an adaptive model to determine a threshold flow rate of the fluid through the heat exchanger at which a gradient of a temperature difference of the fluid across the heat exchanger with respect to the flow rate of the fluid through the heat exchanger has a threshold gradient value. The processing circuit is configured to operate a flow control device to maintain the flow rate of the fluid of through the heat exchanger at less than or equal to the threshold flow rate.