A system and method is provided for efficiently managing the compression of gas depending on the operating conditions and operating mode of the compression system, wherein the system includes a booster compressor, a booster compressor bypass, a conduit connected to the booster compressor and the booster compressor bypass conduit, a means for selectively directing the flow of the gas based on current operating conditions, to the booster compressor bypass or the booster compressor and a baseline compressor connected to both the booster compressor and the booster compressor bypass conduit.

The piston ring unit includes a plurality of piston rings and an inner contact ring. A plurality of piston rings are disposed adjacent to each other in an axial direction of the piston such that joints of plurality of the piston rings do not overlap with each other in the axial direction. An inner contact ring is interposed between an outer circumferential surface of the piston and an inner circumferential surface of the piston ring in a state where the inner contact ring extends over all of the plurality of piston rings in the axial direction, and is disposed such that an opening of the inner contact ring does not overlap with the joint of the at least one piston ring as viewed in a radial direction of the piston.

The piston ring unit includes a plurality of piston rings and an inner contact ring. A plurality of piston rings are disposed adjacent to each other in an axial direction of the piston such that joints of plurality of the piston rings do not overlap with each other in the axial direction. An inner contact ring is interposed between an outer circumferential surface of the piston and an inner circumferential surface of the piston ring in a state where the inner contact ring extends over all of the plurality of piston rings in the axial direction, and is disposed such that an opening of the inner contact ring does not overlap with the joint of the at least one piston ring as viewed in a radial direction of the piston.

A reciprocating compressor 1A includes a compression part 2 compressing, by a piston 6, gas sucked into a cylinder 4 through a suction valve 36, and discharging the compressed gas through a discharge valve 51, a piston drive part 3 supplying a force to the piston 6 to reciprocate the piston 6 via a piston rod 9 coupled to the piston 6, and a housing 17 accommodating the compression part 2 and forming a vacuum region around the compression part 2.

A heat insulating vessel including an inner tank having a vertical axis to accommodate low temperature liquefied gas, an outer tank externally around the inner, and a low temperature liquefied gas pump disposed inside the inner tank. The outer tank having an upper part and an outer tank body. A lid structure having a heat-insulated structure detachably fitted into an upper part of the inner. The heat insulating vessel includes a first fastener to fasten with bolts, a first flange to upper ends of the inner and outer tanks upper part to a second flange to an outer circumferential part of the lid structure, and a second fastener to fasten with bolts, a third flange to an upper end of the outer tank body to a fourth flange to a lower end of the outer tank upper part. A vacuum insulating layer is formed between the inner and outer tanks.

A heat insulating vessel including an inner tank having a vertical axis to accommodate low temperature liquefied gas, an outer tank externally around the inner, and a low temperature liquefied gas pump disposed inside the inner tank. The outer tank having an upper part and an outer tank body. A lid structure having a heat-insulated structure detachably fitted into an upper part of the inner. The heat insulating vessel includes a first fastener to fasten with bolts, a first flange to upper ends of the inner and outer tanks upper part to a second flange to an outer circumferential part of the lid structure, and a second fastener to fasten with bolts, a third flange to an upper end of the outer tank body to a fourth flange to a lower end of the outer tank upper part. A vacuum insulating layer is formed between the inner and outer tanks.

A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate, comprising at least one housing comprising at least one internal wall, at least one optical component arranged within at least one chamber defined at least in part by the at least one internal wall and configured to receive a radiation beam and a cooling apparatus arranged to cool at least a portion of the at least one internal wall to a temperature below that of the at least one optical component.

A pump for pumping a cryogenic liquid includes a pump housing defining an elongated cylinder. An elongated piston slides within the cylinder so that an intermediate fluid chamber, that is configured to receive an intermediate fluid, is defined within the cylinder adjacent to a first end of the piston and a fluid pumping chamber is defined within the cylinder adjacent to a second end of the piston. The fluid pumping chamber includes an inlet and an outlet. The pump housing is positioned within a sump. The sump is configured to receive and submerge a portion of the pump housing within the cryogenic liquid and to provide cryogenic liquid to the inlet of the pumping chamber for pumping. A sump jacket surrounds the sump so that a sump insulation space is defined therebetween. A pump jacket surrounds the pump housing so that a pump insulation space is defined therebetween.

A pump for pumping a cryogenic liquid includes a pump housing defining an elongated cylinder. An elongated piston slides within the cylinder so that an intermediate fluid chamber, that is configured to receive an intermediate fluid, is defined within the cylinder adjacent to a first end of the piston and a fluid pumping chamber is defined within the cylinder adjacent to a second end of the piston. The fluid pumping chamber includes an inlet and an outlet. The pump housing is positioned within a sump. The sump is configured to receive and submerge a portion of the pump housing within the cryogenic liquid and to provide cryogenic liquid to the inlet of the pumping chamber for pumping. A sump jacket surrounds the sump so that a sump insulation space is defined therebetween. A pump jacket surrounds the pump housing so that a pump insulation space is defined therebetween.

An apparatus and process for cooling down a liquid hydrogen or other cryogenic fluid pump can be configured to allow for a quick startup that also helps minimize hydrogen losses. Some embodiments can utilize a blow-by circuit configured and arranged to support the cryogenic cooldown operation for the pump that can minimize hydrogen loss while allowing substantially improved pump startup times. Some embodiments can utilize at least one temperature sensor to monitor temperature and an adjustable control valve that can facilitate the flow of the fluid utilized to perform the cooldown of the pump.