A vacuum device comprising at least one component having a portion which, during operation of the vacuum device, is in contact with a vacuum and which is coated at least in part by a layer which absorbs gas particles, in particular with a layer of a no-evaporable getter (NEG) material.

The present invention relates to cathodes electrodes compositions suitable to provide a pumping mechanism which exhibits an extremely high pumping speed and capacity of noble gas suitable to be used in several vacuum devices as for example sputter ion vacuum pumping systems comprising them as active element.

Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.

An ion pump has an exterior magnet and a chamber wall defining an interior. The interior contains an anode having an exterior surface extending around an axis and defining an opening wherein the axis passes through the opening and a post made of ferrous material, aligned with the axis of the anode and positioned between the exterior magnet and the anode.

An ion pump has an exterior magnet and a chamber wall defining an interior. The interior contains an anode having an exterior surface extending around an axis and defining an opening wherein the axis passes through the opening and a post made of ferrous material, aligned with the axis of the anode and positioned between the exterior magnet and the anode.

The present invention is provided with: an umbrella part metallic sodium insertion device for inserting rod-shaped metallic sodium into a hollow part of a hollow valve; a melting device for melting the metallic sodium in the hollow part by inserting a push rod from an opening into the hollow part of the hollow valve, in which the metallic sodium has been inserted by the device, and, while pushing the rod-shaped metallic sodium in the hollow part, heating the umbrella part to a temperature at which the metallic sodium is melted; a stem part cooling device for cooling a stem part of the hollow valve, in which the metallic sodium has been melted by the melting device, to a temperature lower than the temperature at which the metallic sodium is melted; and a stem part metallic sodium insertion device for inserting rod-shaped metallic sodium into the hollow part which has been cooled by the device.

The present invention is provided with: an umbrella part metallic sodium insertion device for inserting rod-shaped metallic sodium into a hollow part of a hollow valve; a melting device for melting the metallic sodium in the hollow part by inserting a push rod from an opening into the hollow part of the hollow valve, in which the metallic sodium has been inserted by the device, and, while pushing the rod-shaped metallic sodium in the hollow part, heating the umbrella part to a temperature at which the metallic sodium is melted; a stem part cooling device for cooling a stem part of the hollow valve, in which the metallic sodium has been melted by the melting device, to a temperature lower than the temperature at which the metallic sodium is melted; and a stem part metallic sodium insertion device for inserting rod-shaped metallic sodium into the hollow part which has been cooled by the device.

A cold-atom cell is formed by machining a block of silicon to define sites for an atom source chamber, an atom manipulation chamber, and an ion-pump chamber. A polished silicon panel is frit-bonded to an unpolished (due to machining) chamber wall (which would be difficult and costly to polish). The polished panel can then serve as a reflector or a sight for anodic bonding. A solid-phase atom source provides for vapor phase atoms in the source chamber. The source chamber also includes carbon and gold to regulate the atom pressure by sorbing and desorbing thermal atoms. The atom manipulation chamber includes components for magneto-optical trap and an atom chip, e.g., for forming a Bose-Einstein condensate. The ion-pump chamber serves as the site for an ion pump. By integrating the ion pump into the body of the cold-atom cell, a more compact, reliable, and robust cold-atom cell is achieved. In addition to the embodiment just described, several variations and alternatives are presented and within the scope of the claims.

A cold-atom cell is formed by machining a block of silicon to define sites for an atom source chamber, an atom manipulation chamber, and an ion-pump chamber. A polished silicon panel is frit-bonded to an unpolished (due to machining) chamber wall (which would be difficult and costly to polish). The polished panel can then serve as a reflector or a sight for anodic bonding. A solid-phase atom source provides for vapor phase atoms in the source chamber. The source chamber also includes carbon and gold to regulate the atom pressure by sorbing and desorbing thermal atoms. The atom manipulation chamber includes components for magneto-optical trap and an atom chip, e.g., for forming a Bose-Einstein condensate. The ion-pump chamber serves as the site for an ion pump. By integrating the ion pump into the body of the cold-atom cell, a more compact, reliable, and robust cold-atom cell is achieved. In addition to the embodiment just described, several variations and alternatives are presented and within the scope of the claims.

Provided is a method for maintaining a preset air pressure of a low-pressure chamber. The method may comprise the steps of: measuring the inside air pressure of a low-pressure chamber; if the difference between the inside air pressure and a preset air pressure is the same or higher than a threshold value, adjusting the inside temperature of the low-pressure chamber by using a thermal conduction part disposed inside the low-pressure chamber; and by using a getter, making the difference to be below the threshold value by adsorbing or releasing molecules inside the low-pressure chamber according to the adjustment of the temperature