A cryopump includes: a cryopump housing having a cryopump intake port; a radiation shield that is disposed inside the cryopump housing in a non-contact manner with the cryopump housing and is cooled to a shield cooling temperature; and a heat shielding dummy panel that is disposed at the cryopump intake port and mounted to the radiation shield through a thermal resistance member such that a dummy panel temperature becomes higher than the shield cooling temperature.

A cryopump includes: a cryopump housing having a cryopump intake port; a radiation shield that is disposed inside the cryopump housing in a non-contact manner with the cryopump housing and is cooled to a shield cooling temperature; and a heat shielding dummy panel that is disposed at the cryopump intake port and mounted to the radiation shield through a thermal resistance member such that a dummy panel temperature becomes higher than the shield cooling temperature.

A piston ring set of a cryogenic pump includes a first piston ring and a second piston ring which are dissimilarly shaped and cooperatively shaped to form a hollow cylindrical shape when in abutment to one another. The first piston ring is C-shaped and defines a middle portion disposed between a first end portion and a second end portion. A piston ring gap is disposed between a first distal end of the first end portion and a second distal end of the second end portion. When the first piston ring is in abutment with the second piston ring forming the hollow cylindrical shape, the second piston ring does not extend along the middle portion of the first piston ring while the second piston ring does extend along the first end portion and second end portion of the first piston ring.

A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.

A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.

A method of monitoring the performance of a cryopump, the circuitry for monitoring the performance and the cryopump are disclosed. The method comprises: following completion of a regeneration cycle controlling said cryopump to perform a predetermined test routine for testing a performance of said cryopump under predetermined conditions; monitoring said cryopump during said predetermined test routine to collect data indicative of said performance of said cryopump; storing data collected during said monitoring.

A method of monitoring the performance of a cryopump, the circuitry for monitoring the performance and the cryopump are disclosed. The method comprises: following completion of a regeneration cycle controlling said cryopump to perform a predetermined test routine for testing a performance of said cryopump under predetermined conditions; monitoring said cryopump during said predetermined test routine to collect data indicative of said performance of said cryopump; storing data collected during said monitoring.

Systems and methods are provided for evacuating a chamber 101. The evacuation system comprises a cooler 320 coupled with the chamber and a controller 350. The controller is configured to determine whether a property of the cooler or the chamber satisfies one or more conditions. Based on the determination that the property satisfies the one or more conditions, the controller is configured to isolate the cooler from the chamber or control the temperature of the cooler to increase at one or more rates. The controller is further configured to control one or more pumps 330,340 to pump the chamber to a base pressure value.

A cryopump includes a cryopanel, and an adsorption area provided on the cryopanel and capable of adsorbing a non-condensable gas, in which the adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof. The adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof.

A cryopump includes a cryopanel, and an adsorption area provided on the cryopanel and capable of adsorbing a non-condensable gas, in which the adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof. The adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof.