A cryopump has a cryogenic refrigerator with cold and colder stages that cool a radiation shield, a primary cryopumping array and a frontal array. The frontal array is coupled to the cold stage and is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array. The frontal array may be recessed from the frontal opening and closer to the primary cryopumping array than to the frontal opening.

A cryopump has a cryogenic refrigerator with cold and colder stages that cool a radiation shield, a primary cryopumping array and a frontal array. The frontal array is coupled to the cold stage and is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array. The frontal array may be recessed from the frontal opening and closer to the primary cryopumping array than to the frontal opening.

A cryopump includes a cryopump housing and a water absorbing layer mounted on an outer side of the cryopump housing.

A cryopump includes a cryopump housing and a water absorbing layer mounted on an outer side of the cryopump housing.

An anti-vibration arrangement for a condensate pump comprising a housing having a first opening; a pump motor contained within the housing having a pump motor inlet in fluid communication with a pump motor outlet; and a resiliently deformable collar secured within the first opening having an aperture through which the pump motor inlet projects. The resiliently deformable collar comprises an outer portion secured to the housing, an inner portion to support the pump motor inlet and a connecting portion located between the outer portion and the inner portion, such that oscillations of the pump motor cause the connecting portion to deform and allow the inner portion to move in reciprocating manner.

A cryopump system includes at least one cryopump including a refrigerator including a low temperature cooling stage and a high temperature cooling stage, a low temperature cryopanel cooled by the low temperature cooling stage, and a high temperature cryopanel cooled by the high temperature cooling stage. A compressor unit includes a compressor main body that compresses a working gas supplied to the refrigerator, an operating frequency of the compressor main body being variable. The compressor unit is operated such that a pressure ratio between high pressure and low pressure of the compressor main body is in a range between 1.6 and 2.5.

A cryopump system includes at least one cryopump including a refrigerator including a low temperature cooling stage and a high temperature cooling stage, a low temperature cryopanel cooled by the low temperature cooling stage, and a high temperature cryopanel cooled by the high temperature cooling stage. A compressor unit includes a compressor main body that compresses a working gas supplied to the refrigerator, an operating frequency of the compressor main body being variable. The compressor unit is operated such that a pressure ratio between high pressure and low pressure of the compressor main body is in a range between 1.6 and 2.5.

A method for generating an insulating vacuum in a container is provided. The method includes evacuating air from a space between double walls of the container for a first predetermined time period. The method also includes after the first predetermined time period, if a vacuum level within the space has not reached a first predetermined vacuum level, purging the space by supplying a gas into the space and subsequently evacuating the air from the space for a period of time equal to the first predetermined time period. The method also includes repeating the evacuating and purging until the vacuum level within the space reaches the first predetermined vacuum level. The method also includes when the vacuum level within the space reaches the first predetermined vacuum level, evacuating the air from the space for a second predetermined time period.

In a cryopump, a primary cryopumping array having adsorbent and cooled by a second refrigerator stage extends along radiation shield sides. That array is shielded by a condensing cryopumping array that extends along the primary cryopumping array. The primary cryopumping array may be a cylinder with adsorbent on an inwardly facing surface, and the condensing cryopumping array may comprise an array of baffles having surfaces facing the frontal opening. A raised surface such as a conical surface at the base of the radiation shield redirects molecules received from the frontal opening toward the primary cryopumping array. The refrigerator cold finger may extend tangentially relative to the radiation shield or connect to the base of the radiation shield.

In a cryopump, a primary cryopumping array having adsorbent and cooled by a second refrigerator stage extends along radiation shield sides. That array is shielded by a condensing cryopumping array that extends along the primary cryopumping array. The primary cryopumping array may be a cylinder with adsorbent on an inwardly facing surface, and the condensing cryopumping array may comprise an array of baffles having surfaces facing the frontal opening. A raised surface such as a conical surface at the base of the radiation shield redirects molecules received from the frontal opening toward the primary cryopumping array. The refrigerator cold finger may extend tangentially relative to the radiation shield or connect to the base of the radiation shield.