A cryopump includes a cryopanel, a cryocooler which is configured to cool the cryopanel, and includes a cryocooler motor configured to drive the cryocooler and a cryocooler inverter configured to control an operating frequency of the cryocooler motor, and a control unit configured to control the cryocooler to perform a cool-down operation by which a temperature of the cryopanel is decreased from room temperature to a standard operating temperature. The control unit includes an operating frequency determination unit configured to determine an operating frequency of the cryocooler motor within an operating frequency range having an upper limit operating frequency and outputs the operating frequency to the cryocooler inverter, and an upper limit adjustment unit configured to decrease the upper limit operating frequency based on a decrease in a temperature of the cryopanel during the cool-down operation.

An apparatus including a movable cryopump that may be disposed in a first operational position and a second regeneration position is disclosed. In the first operational position, the front surface of the cryopump may be disposed in the same plane as the wall of the processing chamber, effectively serving as a part of a chamber wall. In certain embodiments, the front surface of the cryopump may extend into the processing chamber. In the second regeneration position, the cryopump is retracted into a cavity, which is isolated from the processing chamber by a movable gate. The first operational position serves to enhance the pumping speed of the cryopump, while the second regeneration position ensures that previously trapped molecules are not released back into the processing chamber.

An apparatus including a movable cryopump that may be disposed in a first operational position and a second regeneration position is disclosed. In the first operational position, the front surface of the cryopump may be disposed in the same plane as the wall of the processing chamber, effectively serving as a part of a chamber wall. In certain embodiments, the front surface of the cryopump may extend into the processing chamber. In the second regeneration position, the cryopump is retracted into a cavity, which is isolated from the processing chamber by a movable gate. The first operational position serves to enhance the pumping speed of the cryopump, while the second regeneration position ensures that previously trapped molecules are not released back into the processing chamber.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A cryopump includes an adsorption cryopanel including a front surface configured to receive incidence of a non-condensable gas and a back surface having an adsorption region of the non-condensable gas, and a reflection cryopanel including a reflection surface of the non-condensable gas facing the back surface. The adsorption cryopanel may have a multitude of through holes penetrating from the front surface to the back surface. The adsorption cryopanel has a passage probability of the non-condensable gas selected from a range of 10% to 70%.

A cryopump includes an adsorption cryopanel including a front surface configured to receive incidence of a non-condensable gas and a back surface having an adsorption region of the non-condensable gas, and a reflection cryopanel including a reflection surface of the non-condensable gas facing the back surface. The adsorption cryopanel may have a multitude of through holes penetrating from the front surface to the back surface. The adsorption cryopanel has a passage probability of the non-condensable gas selected from a range of 10% to 70%.

A cold trap includes a cold panel, a cryocooler which cools the cold panel, a stage temperature control unit which determines a control input to the cryocooler to cool a cooling stage of the cryocooler to a target temperature, an input heat estimation unit which estimates an increase of input heat into the cold panel based on the control input to the cryocooler determined by the stage temperature control unit, and a target temperature adjustment unit which adjusts a target temperature based on the increase of the input heat estimated by the input heat estimation unit.

A cold trap includes a cold panel, a cryocooler which cools the cold panel, a stage temperature control unit which determines a control input to the cryocooler to cool a cooling stage of the cryocooler to a target temperature, an input heat estimation unit which estimates an increase of input heat into the cold panel based on the control input to the cryocooler determined by the stage temperature control unit, and a target temperature adjustment unit which adjusts a target temperature based on the increase of the input heat estimated by the input heat estimation unit.

A cryopump includes a cryocooler; a cryopanel cooled by the cryocooler; a cryopump container supporting the cryocooler and accommodating the cryopanel; a temperature sensor that measures a temperature of the cryopanel and outputs a measured temperature signal indicating the temperature; a pressure sensor that measures an internal pressure of the cryopump container and outputs a measured pressure signal indicating the internal pressure; a pressure rise rate comparator that compares a pressure rise rate of the cryopump container with a first pressure rise rate threshold; and a cryocooler controller that controls the cryocooler to lower the temperature of the cryopanel. The pressure rise rate comparator compares the pressure rise rate of the cryopump container with a second pressure rise rate threshold. The second pressure region is lower than the first pressure region. The second pressure rise rate threshold is smaller than the first pressure rise rate threshold.