A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, and a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes a plurality of cryopanels and a plurality of heat transfer bodies axially arranged in columnar shape, and in which the plurality of cryopanels and the plurality of heat transfer bodies are axially stacked.

A cryopump includes at least one cryopanel including a photocatalyst layer on a surface thereof, and an excitation light source that is disposed so as to irradiate the photocatalyst layer with excitation light that activates the photocatalyst layer.

A cryopump includes at least one cryopanel including a photocatalyst layer on a surface thereof, and an excitation light source that is disposed so as to irradiate the photocatalyst layer with excitation light that activates the photocatalyst layer.

A system and method for vacuum generation is disclosed. A saturated steam of higher than ambient pressure is inserted into a condensation cylinder with two chambers, separated by a movable piston, and wall-imbedded heat exchangers. The steam moves the piston to fill one chamber while expel gaseous content and condensate out of the other chamber. The steam is then condensed to a rough vacuum state by cooling. By repeated operations of inserting and condensing steam in each chamber alternatively, a sustained vacuum generation is achieved. A system and method for constructing a multi-level vacuum storage is also disclosed, with a high vacuum chamber placed inside a rough vacuum chamber to reduce the leakage as well as mechanical stresses. Furthermore the vacuum generation system and method is extended for creating a prime mover or actuator to drive vacuum pumps, maximizing the thermal energy usage for increased vacuuming capacity.

The cryogenic trapping system traps organic arsenicals within a centrally-positioned cryotrap body and allows inorganic arsenical to flow through the cryotrap body. As a hydride gas is directed into the central cryotrap body, the gas is cooled by a pair of Peltier units that sandwich the cryotrap body so that the cold side of each of the Peltier units abuts the cryotrap body. The hot side of each Peltier unit abuts a heat exchanger—which cools the Peltier unit. In the preferred embodiment, organic arsenicals are trapped in a sorbent bed within the cryotrap body.

The cryogenic trapping system traps organic arsenicals within a centrally-positioned cryotrap body and allows inorganic arsenical to flow through the cryotrap body. As a hydride gas is directed into the central cryotrap body, the gas is cooled by a pair of Peltier units that sandwich the cryotrap body so that the cold side of each of the Peltier units abuts the cryotrap body. The hot side of each Peltier unit abuts a heat exchanger—which cools the Peltier unit. In the preferred embodiment, organic arsenicals are trapped in a sorbent bed within the cryotrap body.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.

An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.

An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.