A cryopump comprising: a vessel comprising a frontal open area, the frontal open area comprising an inlet to the vessel; a radiation shield; a two stage refrigerator extending into the vessel, a first stage of the refrigerator being thermally coupled to the radiation shield. A first stage array is arranged within the vessel and is also thermally coupled to the first stage of the refrigerator. A cryopanel structure is coupled to a second stage of the refrigerator. The first stage array comprises a plurality of elements arranged at increasing distances from the inlet, the element closest to the inlet being between the cryopanel structure and the inlet and elements further from the inlet having a passage through a central portion. The element closest to the inlet has a smaller outer perimeter than the elements further from the inlet.

A cryopump comprising: a vessel comprising a frontal open area, the frontal open area comprising an inlet to the vessel; a radiation shield; a two stage refrigerator extending into the vessel, a first stage of the refrigerator being thermally coupled to the radiation shield. A first stage array is arranged within the vessel and is also thermally coupled to the first stage of the refrigerator. A cryopanel structure is coupled to a second stage of the refrigerator. The first stage array comprises a plurality of elements arranged at increasing distances from the inlet, the element closest to the inlet being between the cryopanel structure and the inlet and elements further from the inlet having a passage through a central portion. The element closest to the inlet has a smaller outer perimeter than the elements further from the inlet.

A cryopump system includes a plurality of cryopumps each of which includes a cryopump container, an exhaust valve that exhausts an exhaust fluid from the cryopump container, and an exhaust purge valve that supplies a purge gas to the exhaust valve or downstream thereof and an exhaust line through which the exhaust fluid is exhausted from the plurality of cryopumps to a treatment device, the exhaust line including a plurality of branch lines and a merging line, the plurality of branch lines each connected to the exhaust valve and the exhaust purge valve of a corresponding cryopump, the merging line connecting the plurality of branch lines to the treatment device.

A cryopump system includes a plurality of cryopumps each of which includes a cryopump container, an exhaust valve that exhausts an exhaust fluid from the cryopump container, and an exhaust purge valve that supplies a purge gas to the exhaust valve or downstream thereof and an exhaust line through which the exhaust fluid is exhausted from the plurality of cryopumps to a treatment device, the exhaust line including a plurality of branch lines and a merging line, the plurality of branch lines each connected to the exhaust valve and the exhaust purge valve of a corresponding cryopump, the merging line connecting the plurality of branch lines to the treatment device.

A cryopump includes: a cryopump housing having a cryopump intake port; a radiation shield that is disposed inside the cryopump housing in a non-contact manner with the cryopump housing and is cooled to a shield cooling temperature; and a heat shielding dummy panel that is disposed at the cryopump intake port and mounted to the radiation shield through a thermal resistance member such that a dummy panel temperature becomes higher than the shield cooling temperature.

A cryopump includes: a cryopump housing having a cryopump intake port; a radiation shield that is disposed inside the cryopump housing in a non-contact manner with the cryopump housing and is cooled to a shield cooling temperature; and a heat shielding dummy panel that is disposed at the cryopump intake port and mounted to the radiation shield through a thermal resistance member such that a dummy panel temperature becomes higher than the shield cooling temperature.

Flange for a vacuum apparatus comprises a housing to be connected to the vacuum apparatus defining an opening wherein the opening has rectangular narrow shape. The flange further comprises a metal seal arranged around the opening to create a vacuum tight seal.

A cryopump comprising: a pump inlet, a two stage refrigerator; a first stage array thermally coupled to a first stage of said two stage refrigerator; and a cryopanel structure coupled to a second stage of said two stage refrigerator is disclosed. The cryopanel structure comprises at least three flat panels. The first stage array is mounted between the pump inlet and the cryopanel structure, and comprises a plurality of slats, the plurality of slats each being mounted such that a side of each of the plurality of slats closest to the cryopanel structure is substantially aligned and offset longitudinally with respect to a corresponding one of said at least three flat panels.

A cryopump comprising: a pump inlet, a two stage refrigerator; a first stage array thermally coupled to a first stage of said two stage refrigerator; and a cryopanel structure coupled to a second stage of said two stage refrigerator is disclosed. The cryopanel structure comprises at least three flat panels. The first stage array is mounted between the pump inlet and the cryopanel structure, and comprises a plurality of slats, the plurality of slats each being mounted such that a side of each of the plurality of slats closest to the cryopanel structure is substantially aligned and offset longitudinally with respect to a corresponding one of said at least three flat panels.

A cryopump includes: a cryopump container including a cryopump intake port; a radiation shield that is cooled to a first cooling temperature and extends from the cryopump intake port into the cryopump container; a cryopanel unit that is cooled to a second cooling temperature lower than the first cooling temperature and is disposed to be surrounded by the radiation shield in the cryopump container; and an intake port shield that is cooled to the first cooling temperature and is disposed at the cryopump intake port such that the cryopanel unit is not visible from an outside of the cryopump, in which the radiation shield includes a first gas inlet formed at a height between the intake port shield and the cryopanel unit.