A cryogenic pump comprising a shaft disposed in a bearing. The shaft rotates with respect to the bearing housing, and the shaft includes an end with an angled face. The pump includes a drive at one end of the bearing housing. A tappet passage is formed through the drive housing. A pushrod housing connects to the drive housing. The pump includes a piston and a tappet sliding within the tappet passage. The tappet has a base end disposed within the tappet passage and a rod end extending below the tappet end of the drive housing. A fluid cavity is in the tappet passage between the piston and the tappet. The pump includes a pushrod connected to the tappet. The angled face of the shaft rotates and drives the piston toward the drive housing, pushing fluid within the fluid cavity against the tappet, driving the pushrod away from the drive housing.

Described herein are systems and methods for cryogenic fluid delivery to achieve the lowest reasonable saturation pressure while dispensing a cryogenic fluid such as liquefied natural gas to a holding tank on a use device. The systems and methods utilize a liquid nitrogen component and a liquefaction engine, very cold liquefied natural gas and a liquefaction engine, or a combination of both very cold liquefied natural gas and a liquid nitrogen component to deliver LNG to a holding tank on a use device.

Described herein are systems and methods for cryogenic fluid delivery to achieve the lowest reasonable saturation pressure while dispensing a cryogenic fluid such as liquefied natural gas to a holding tank on a use device. The systems and methods utilize a liquid nitrogen component and a liquefaction engine, very cold liquefied natural gas and a liquefaction engine, or a combination of both very cold liquefied natural gas and a liquid nitrogen component to deliver LNG to a holding tank on a use device.

A method for regenerating a cryopump, in which the cryopump includes a cryopanel and a cryopump container that accommodates the cryopanel, the method includes: raising a temperature of the cryopanel from a cryogenic temperature to a temperature rising completion temperature; and completing regeneration of the cryopump in a state where the temperature of the cryopanel is raised to the temperature rising completion temperature, in which the completion includes acquiring a history of a pressure rise rate in the cryopump container by repeating supply of a purge gas to the cryopump container, rough pumping of the cryopump container, and measurement of the pressure rise rate, and determining whether or not to complete the regeneration of the cryopump, based on the acquired history of the pressure rise rate.

A mechanical seal of the cartridge type for a cryogenic pump. A stationary subassembly attaches to a pump casing, the stationary subassembly running against the flat surface of a rotary subassembly to thereby provide a sealing face. The stationary subassembly defines an inner seal cavity and further comprises a gland and a packing plate attached to the gland, the packing plate having a front face and back face, wherein the back face is angled to be non-parallel with the front face such that ice and moisture from the cryogenic pump is directed away from the inner seal cavity. A shroud over the drive ring for sealing disposition against the shaft shields ice and moisture ingress into the inner seal cavity. Lock wire holes defined within the collar screw and drive collar allow a lock wire to prevent loosening of the collar screw to prevent sparking.

A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.

A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.

A cryopump comprising: a vessel comprising a radiation shield having a frontal opening, said frontal opening forming an inlet to said vessel; a frontal array thermally coupled to said radiation shield and mounted across said frontal opening; a cryopanel structure mounted within said vessel; a two stage refrigerator extending into said vessel, a first stage of said refrigerator being thermally coupled to said radiation shield and a colder second stage of said refrigerator being thermally coupled to said cryopanel structure; wherein said vessel comprises an elongate vessel a distance between a surface of said cryopanel structure closest to said frontal opening and a surface of said frontal array closest to said cryopanel structure comprising between 0.6 and 1.2 times the diameter of said frontal opening.

A cryopump comprising: a vessel comprising a radiation shield having a frontal opening, said frontal opening forming an inlet to said vessel; a frontal array thermally coupled to said radiation shield and mounted across said frontal opening; a cryopanel structure mounted within said vessel; a two stage refrigerator extending into said vessel, a first stage of said refrigerator being thermally coupled to said radiation shield and a colder second stage of said refrigerator being thermally coupled to said cryopanel structure; wherein said vessel comprises an elongate vessel a distance between a surface of said cryopanel structure closest to said frontal opening and a surface of said frontal array closest to said cryopanel structure comprising between 0.6 and 1.2 times the diameter of said frontal opening.

In a cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, a cold panel is located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump. A cold panel chamber includes an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump. The exit is provided so as to be eccentric with respect to the entrance.