A cryopump system includes: a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in the rough line, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves. The controller applies the delay time uniformly upon closing of each of the rough valves.

A drive system for a cryogenic pump is provided including a spool housing having a plurality of valves disposed therein about a pump axis and a tappet housing including a plurality of tappet bores, each tappet bore in communication with a respective one of the plurality of valves. A collection cavity collects hydraulic fluid from the tappet bores. A pump flange includes a fluid inlet and a fluid outlet. An inlet manifold directs hydraulic fluid received through the fluid inlet to each of the plurality of valves. An outlet manifold directs hydraulic fluid from each of the valves and the collection cavity to the fluid outlet.

Cryogenic cleaning devices comprise a body and an attachment element for attaching the body to a vacuum chamber to provide a fluid path between the body and the vacuum chamber. A surface is configured to accumulate gas molecules received into the body via the fluid path by condensing and/or adsorbing the gas molecules on the surface when cooled and a single-stage refrigeration system is configured to cool the surface. A pump is configured to pump out the accumulated gas molecules during baking of and a valve is moveable between a first position in which the fluid path is open to allow the gas molecules to be evacuated from the vacuum chamber into the body, and a second position in which the fluid path is closed to prevent the gas molecules from being received into the body.

Cryogenic cleaning devices comprise a body and an attachment element for attaching the body to a vacuum chamber to provide a fluid path between the body and the vacuum chamber. A surface is configured to accumulate gas molecules received into the body via the fluid path by condensing and/or adsorbing the gas molecules on the surface when cooled and a single-stage refrigeration system is configured to cool the surface. A pump is configured to pump out the accumulated gas molecules during baking of and a valve is moveable between a first position in which the fluid path is open to allow the gas molecules to be evacuated from the vacuum chamber into the body, and a second position in which the fluid path is closed to prevent the gas molecules from being received into the body.

A method for regenerating a cryopump that includes a cooler equipped with a first stage part and a second stage part which is cooled to a lower temperature than the first stage part; a cryopanel equipped with a first panel including a heat-shield body and a baffle which is cooled by the first stage part and a second panel which is cooled by the second stage part; a cryopump vessel configured to surround the cryopanel; a first heater provided in the first stage part; and a second heater provided in the second stage part, includes a temperature increasing process of increasing temperatures of the first stage part and the second stage part by supplying a purge gas into the cryopump vessel during an operation of the cooler, a roughing process of evacuating gases captured in the cryopump vessel until the cryopump vessel has a predetermined pressure and a cool-down process of lowering the temperatures of the first stage part and the second stage part to their operating temperatures, respectively.

A method for regenerating a cryopump that includes a cooler equipped with a first stage part and a second stage part which is cooled to a lower temperature than the first stage part; a cryopanel equipped with a first panel including a heat-shield body and a baffle which is cooled by the first stage part and a second panel which is cooled by the second stage part; a cryopump vessel configured to surround the cryopanel; a first heater provided in the first stage part; and a second heater provided in the second stage part, includes a temperature increasing process of increasing temperatures of the first stage part and the second stage part by supplying a purge gas into the cryopump vessel during an operation of the cooler, a roughing process of evacuating gases captured in the cryopump vessel until the cryopump vessel has a predetermined pressure and a cool-down process of lowering the temperatures of the first stage part and the second stage part to their operating temperatures, respectively.

A cryopump system includes a temperature measurement unit configured to measure temperatures of a first stage part and a second stage part of a cryopump, respectively, a monitoring unit configured to monitor whether the temperature of the second stage part reaches a predetermined second reference temperature and a controller configured to gradually increase a motor rotational speed of a cooler of the cryopump whenever the temperature of the second stage part reaches the predetermined second reference temperature.

A cryopump system includes a temperature measurement unit configured to measure temperatures of a first stage part and a second stage part of a cryopump, respectively, a monitoring unit configured to monitor whether the temperature of the second stage part reaches a predetermined second reference temperature and a controller configured to gradually increase a motor rotational speed of a cooler of the cryopump whenever the temperature of the second stage part reaches the predetermined second reference temperature.

A cryopump includes a gas flow regulation member which deflects a flow of gas, which flows in from a shield main opening, from a cryocooler structural portion. The gas flow regulation member is disposed to be adjacent to the cryocooler structural portion such that the gas flow regulation member is in contact with neither a second cooling stage nor a second cryopanel unit of a cryocooler. The gas flow regulation member may be thermally connected to a first cooling stage of the cryocooler.

A cryopump includes a gas flow regulation member which deflects a flow of gas, which flows in from a shield main opening, from a cryocooler structural portion. The gas flow regulation member is disposed to be adjacent to the cryocooler structural portion such that the gas flow regulation member is in contact with neither a second cooling stage nor a second cryopanel unit of a cryocooler. The gas flow regulation member may be thermally connected to a first cooling stage of the cryocooler.