The disclosure relates to a device for improving a vacuum in the housing of a machine, in particular a centrifugal-mass energy store, comprising a rotor, for example a shaft having a centrifugal mass arranged thereon, which rotor is supported on at least one superconducting bearing in a contactless manner and is arranged in a vacuum container. In order to maintain the operating state of the superconducting bearing, the superconducting bearing is thermally connected to a cold source cooled by a cryogenic medium. According to the invention, the vacuum in the vacuum container is improved by means of an adsorber thermally connected to a cooling apparatus. The cooling of the adsorber occurs preferably by means of evaporated cooling medium from the superconducting bearing.

The disclosure relates to a device for improving a vacuum in the housing of a machine, in particular a centrifugal-mass energy store, comprising a rotor, for example a shaft having a centrifugal mass arranged thereon, which rotor is supported on at least one superconducting bearing in a contactless manner and is arranged in a vacuum container. In order to maintain the operating state of the superconducting bearing, the superconducting bearing is thermally connected to a cold source cooled by a cryogenic medium. According to the invention, the vacuum in the vacuum container is improved by means of an adsorber thermally connected to a cooling apparatus. The cooling of the adsorber occurs preferably by means of evaporated cooling medium from the superconducting bearing.

An object of the present invention is to improve, using a simple configuration, heat dissipation of a regenerative resistor that is disposed in a vacuum pump control device (controller) connected to a vacuum pump. The regenerative resistor disposed in the vacuum pump control device is stored in an aluminum die-cast casing. More concretely, a housing of the vacuum pump control device is prepared by aluminum die casting (metal mold casting). A regenerative resistor storing portion (aluminum die-cast casing) provided with a hollow portion is provided on a top panel of the aluminum die cast, the hollow portion being designed to have a size accommodating the entire regenerative resistor. The regenerative resistor is fitted into the hollow portion, and an opening section of the hollow portion is sealed with an aluminum sheet of the same material as that of the casing. In this manner, the regenerative resistor can removably be stored in the aluminum die-cast casing.

An object of the present invention is to improve, using a simple configuration, heat dissipation of a regenerative resistor that is disposed in a vacuum pump control device (controller) connected to a vacuum pump. The regenerative resistor disposed in the vacuum pump control device is stored in an aluminum die-cast casing. More concretely, a housing of the vacuum pump control device is prepared by aluminum die casting (metal mold casting). A regenerative resistor storing portion (aluminum die-cast casing) provided with a hollow portion is provided on a top panel of the aluminum die cast, the hollow portion being designed to have a size accommodating the entire regenerative resistor. The regenerative resistor is fitted into the hollow portion, and an opening section of the hollow portion is sealed with an aluminum sheet of the same material as that of the casing. In this manner, the regenerative resistor can removably be stored in the aluminum die-cast casing.

Disclosed is a vacuum roaster including a chamber, a door cap formed on one side of the chamber so as to be opened or closed, a vacuum cap formed on an opposite side of the chamber, a basket spaced apart from an inner circumferential surface of the chamber, and including a basket door that is opened or closed for introduction and discharge of an object to be processed, a vacuum adjustment device for adjusting a vacuum state inside the chamber, a drive motor connected to the basket via a shaft for rotating the basket, and a heater provided inside the chamber so as to be spaced apart from the basket.

A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange is arranged at a distance from the inlet flange in the extending direction of the duct. The inlet flange has an outer diameter larger than an outer diameter of the outlet flange.

A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange is arranged at a distance from the inlet flange in the extending direction of the duct. The inlet flange has an outer diameter larger than an outer diameter of the outlet flange.

A cryopump includes a cryocooler which includes a first cooling stage, a second cooling stage having a tip stage surface, and a cryocooler structure portion which extends in an axial direction from the first cooling stage to the second cooling stage, a radiation shield which is thermally coupled to the first cooling stage and includes a shield front end which defines a shield main opening and a shield bottom portion having a cryocooler insertion hole which receives the cryocooler structure portion such that the tip stage surface faces the shield main opening, a cap member which surrounds the tip stage surface in a non-contact manner and is thermally coupled to the first cooling stage, and a second stage cryopanel which is disposed between the cap member and the first cooling stage in the axial direction and is thermally coupled to the second cooling stage.

A cryopump includes a cryocooler which includes a first cooling stage, a second cooling stage having a tip stage surface, and a cryocooler structure portion which extends in an axial direction from the first cooling stage to the second cooling stage, a radiation shield which is thermally coupled to the first cooling stage and includes a shield front end which defines a shield main opening and a shield bottom portion having a cryocooler insertion hole which receives the cryocooler structure portion such that the tip stage surface faces the shield main opening, a cap member which surrounds the tip stage surface in a non-contact manner and is thermally coupled to the first cooling stage, and a second stage cryopanel which is disposed between the cap member and the first cooling stage in the axial direction and is thermally coupled to the second cooling stage.

The present invention provides a rare earth cold accumulating material particle comprising a rare earth oxide or a rare earth oxysulfide, wherein the rare earth cold accumulating material particle is composed of a sintered body; an average crystal grain size of the sintered body is 0.5 to 5 μm; a porosity of the sintered body is 10 to 50 vol. %; and an average pore size of the sintered body is 0.3 to 3 μm. Further, it is preferable that the porosity of the rare earth cold accumulating material particle is 20 to 45 vol. %, and a maximum pore size of the rare earth cold accumulating material particle is 4 μm or less. Due to this structure, there can be provided a rare earth cold accumulating material having a high refrigerating capacity and a high strength.