A piston pump suitable for pumping a fluid at very low temperature, for example hydrogen, is disclosed. The pump has a suction side and a compression side, the suction side comprising an inlet provided for the liquid and intended to connected a liquid supply reservoir external to the pump, a suction chamber for receiving the fluid and a first fluid degassing duct communicating with the suction chamber, the compression side comprising a pump cylinder carrying an assembly for compression and delivery of the liquid, said cylinder comprising a second chamber which communicates with the suction chamber and wherein the fluid at very low temperature circulates in order to cool the compression and delivery assembly.

A piston pump suitable for pumping a fluid at very low temperature, for example hydrogen, is disclosed. The pump has a suction side and a compression side, the suction side comprising an inlet provided for the liquid and intended to connected a liquid supply reservoir external to the pump, a suction chamber for receiving the fluid and a first fluid degassing duct communicating with the suction chamber, the compression side comprising a pump cylinder carrying an assembly for compression and delivery of the liquid, said cylinder comprising a second chamber which communicates with the suction chamber and wherein the fluid at very low temperature circulates in order to cool the compression and delivery assembly.

The invention relates to a fluid compression apparatus comprising a sealed enclosure intended to contain a bath of cryogenic fluid, a first and a second compression chambers, an intake system for admission into the first chamber, a system for transfer from the first to the second chamber, the apparatus further comprising a communicating discharge orifice for compressed fluid to leave the second chamber, the apparatus further comprising an overflow discharge orifice provided with a valve for discharge from the first compression chamber to the bath so as to let surplus liquid leave during compression of fluid in the first chamber, the overflow discharge orifice communicating with the enclosure via at least one flow retarder configured to attenuate the speed and/or intensity of the discharged liquid flow by limiting its pressure drop.

The invention relates to a fluid compression apparatus comprising a sealed enclosure intended to contain a bath of cryogenic fluid, a first and a second compression chambers, an intake system for admission into the first chamber, a system for transfer from the first to the second chamber, the apparatus further comprising a communicating discharge orifice for compressed fluid to leave the second chamber, the apparatus further comprising an overflow discharge orifice provided with a valve for discharge from the first compression chamber to the bath so as to let surplus liquid leave during compression of fluid in the first chamber, the overflow discharge orifice communicating with the enclosure via at least one flow retarder configured to attenuate the speed and/or intensity of the discharged liquid flow by limiting its pressure drop.

Embodiments of the present disclosure provide a method for semiconductor processing, including: loading, into a process chamber, a semiconductor substrate; operating a cryogenic pump coupled to the process chamber to cause a pressure in the process chamber to satisfy a first threshold pressure, the cryogenic pump including: a body having a flange, coupled to the process chamber, and an opening defined at a first end of the body, wherein a longitudinal axis of the body is defined from the first end of the body to a second end of the body, and wherein the body has a non-cylindrical shape with sides sloping radially outward, in relation to the longitudinal axis, in a direction away from the first end and towards the second end; and processing the semiconductor substrate enclosed in the process chamber.

Embodiments of the present disclosure provide a method for semiconductor processing, including: loading, into a process chamber, a semiconductor substrate; operating a cryogenic pump coupled to the process chamber to cause a pressure in the process chamber to satisfy a first threshold pressure, the cryogenic pump including: a body having a flange, coupled to the process chamber, and an opening defined at a first end of the body, wherein a longitudinal axis of the body is defined from the first end of the body to a second end of the body, and wherein the body has a non-cylindrical shape with sides sloping radially outward, in relation to the longitudinal axis, in a direction away from the first end and towards the second end; and processing the semiconductor substrate enclosed in the process chamber.

A cryopump includes: a cryopump container including a container body defining a cryopump intake port and extending axially and tubularly from the cryopump intake port, and a cryocooler accommodation cylinder connected to a side portion of the container body and extending transversely; a cryocooler fixed to the cryocooler accommodation cylinder and extending transversely within the cryopump container; a plurality of cryopanels thermally coupled to the second cooling stage of the cryocooler, capable of adsorbing a non-condensable gas, and axially arranged between the cryopump intake port and a bottom portion of the container body; and a purge gas inlet installed in the container body below the cryocooler accommodation cylinder to blow a purge gas to a distal portion of at least one of the cryopanels.

A cryopump includes: a cryopump container including a container body defining a cryopump intake port and extending axially and tubularly from the cryopump intake port, and a cryocooler accommodation cylinder connected to a side portion of the container body and extending transversely; a cryocooler fixed to the cryocooler accommodation cylinder and extending transversely within the cryopump container; a plurality of cryopanels thermally coupled to the second cooling stage of the cryocooler, capable of adsorbing a non-condensable gas, and axially arranged between the cryopump intake port and a bottom portion of the container body; and a purge gas inlet installed in the container body below the cryocooler accommodation cylinder to blow a purge gas to a distal portion of at least one of the cryopanels.

A method of setting up an electrical motor speed control in a fluidic system including a turbomachine, an electric motor having a number p of pole pairs rotating the turbomachine, a variable speed drive controlling the speed of the electric motor, a sensor measuring a parameter H, Q of the turbomachine, and a system controller receiving the sensor's measurements and controlling the operation of the fluidic system. The method includes driving the electric motor at a predetermined electrical frequency, Fe, such that the turbomachine rotates with a controlled rotational speed N, determining the point of intersection of the system curve of the fluidic system and of the performance curve of the turbomachine to obtain the turbomachine's nominal operating point, and thus the nominal value, Hn, Qn, of the turbomachine parameter, measuring, with the sensor, the current value, H, Q of the turbomachine parameter, calculating the controlled rotational speed N by inputting, into the Affinity Laws, the determined nominal value, Hn, Qn, the measured current value, H, Q, and the known nominal rotational speed, Nn, of the turbomachine, determining the number p of pole pairs of the electric motor based on the ratio of the electrical frequency Fe and the calculated controlled rotational speed N, and adapting the setup of the variable speed drive to match the determined number p of pole pairs.

A method of setting up an electrical motor speed control in a fluidic system including a turbomachine, an electric motor having a number p of pole pairs rotating the turbomachine, a variable speed drive controlling the speed of the electric motor, a sensor measuring a parameter H, Q of the turbomachine, and a system controller receiving the sensor's measurements and controlling the operation of the fluidic system. The method includes driving the electric motor at a predetermined electrical frequency, Fe, such that the turbomachine rotates with a controlled rotational speed N, determining the point of intersection of the system curve of the fluidic system and of the performance curve of the turbomachine to obtain the turbomachine's nominal operating point, and thus the nominal value, Hn, Qn, of the turbomachine parameter, measuring, with the sensor, the current value, H, Q of the turbomachine parameter, calculating the controlled rotational speed N by inputting, into the Affinity Laws, the determined nominal value, Hn, Qn, the measured current value, H, Q, and the known nominal rotational speed, Nn, of the turbomachine, determining the number p of pole pairs of the electric motor based on the ratio of the electrical frequency Fe and the calculated controlled rotational speed N, and adapting the setup of the variable speed drive to match the determined number p of pole pairs.