A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.

A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.

A pump mechanism for vacuum sealing an airtight cavity formed by a container and a lid, including a bore having a first one-way seal allowing air from the airtight cavity to enter the bore and blocking air inside the bore from returning to the airtight cavity and a second one-way seal allowing air inside the bore to leave the bore without returning to the airtight cavity and blocking air outside of the bore from entering the bore, a piston disposed inside the bore, and a chamber of air enclosed by the bore, the first and second one-way seals, and the piston, wherein actuation of the piston in a first direction causes air to evacuate the airtight cavity and enter the chamber through the first one-way seal, and wherein actuation of the piston in a second direction causes air to exit the chamber through the second one-way seal.

A system and method for vacuum generation is disclosed. A saturated steam of higher than ambient pressure is inserted into a condensation cylinder with two chambers, separated by a movable piston, and wall-imbedded heat exchangers. The steam moves the piston to fill one chamber while expel gaseous content and condensate out of the other chamber. The steam is then condensed to a rough vacuum state by cooling. By repeated operations of inserting and condensing steam in each chamber alternatively, a sustained vacuum generation is achieved. A system and method for constructing a multi-level vacuum storage is also disclosed, with a high vacuum chamber placed inside a rough vacuum chamber to reduce the leakage as well as mechanical stresses. Furthermore the vacuum generation system and method is extended for creating a prime mover or actuator to drive vacuum pumps, maximizing the thermal energy usage for increased vacuuming capacity.

A system and method for vacuum generation is disclosed. A saturated steam of higher than ambient pressure is inserted into a condensation cylinder with two chambers, separated by a movable piston, and wall-imbedded heat exchangers. The steam moves the piston to fill one chamber while expel gaseous content and condensate out of the other chamber. The steam is then condensed to a rough vacuum state by cooling. By repeated operations of inserting and condensing steam in each chamber alternatively, a sustained vacuum generation is achieved. A system and method for constructing a multi-level vacuum storage is also disclosed, with a high vacuum chamber placed inside a rough vacuum chamber to reduce the leakage as well as mechanical stresses. Furthermore the vacuum generation system and method is extended for creating a prime mover or actuator to drive vacuum pumps, maximizing the thermal energy usage for increased vacuuming capacity.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.

A vacuum device, in particular to a vacuum pump, includes a reservoir for an operating medium; an outlet connector arranged at or in the reservoir; and a selection device that selectively closes or opens the outlet connector or an outlet line, which is connected via the outlet connector to the reservoir, in dependence on whether the operating medium or water is present at the outlet connector.