A synthetic vacuum generator has a case enclosing an interior cavity with an aperture through the case in communication with the cavity. A piston and a check valve are mounted in the case in fluid communication with the cavity and the aperture. The piston and check valve are configured with symbiotic resonant response to establish an outflow there through and inducing an inflow through the aperture upon reciprocation of the piston at a predetermined frequency.

A powered pump unit is adapted to operate with a vacuum cup device having a pump cylinder for a manually operated vacuum pump. The powered pump unit includes a pump unit housing, a power source receiver, a vacuum pump, a pump drive, and a sealing arrangement. The pump unit housing is adapted to be received in the pump cylinder in an operating position after the piston is removed from the pump cylinder. The power source receiver, vacuum pump, and pump drive are each mounted on the pump unit housing and at least one of them is at least partially located in the pump cylinder when the pump unit housing is in the operating position. The pump drive is operatively connected to drive the vacuum pump to produce a vacuum that is applied to the vacuum cup of the vacuum cup device.

A method of operating a vacuum pump system, the method including the steps of: operating a primary vacuum pump having a variable speed motor; connecting at least two secondary vacuum pumps in parallel with said primary vacuum pump; dividing the secondary vacuum pumps in groups, each group including at least one secondary vacuum pump; and assigning a priority for each of said groups. The method further includes the steps of measuring the inlet pressure p1, comparing the measured inlet pressure p1 with a predetermined pressure value p0, and if p1 is higher than p0, starting the secondary vacuum pump at a first predetermined startup load S.sub.startup,1 if it includes a fixed speed motor, and/or starting the secondary vacuum pump at a second predetermined startup load S.sub.startup,2, if it includes a variable speed motor.

A method of operating a vacuum pump system, the method including the steps of: operating a primary vacuum pump having a variable speed motor; connecting at least two secondary vacuum pumps in parallel with said primary vacuum pump; dividing the secondary vacuum pumps in groups, each group including at least one secondary vacuum pump; and assigning a priority for each of said groups. The method further includes the steps of measuring the inlet pressure p1, comparing the measured inlet pressure p1 with a predetermined pressure value p0, and if p1 is higher than p0, starting the secondary vacuum pump at a first predetermined startup load S.sub.startup,1 if it includes a fixed speed motor, and/or starting the secondary vacuum pump at a second predetermined startup load S.sub.startup,2, if it includes a variable speed motor.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.

A pumping installation includes at least one first positive-displacement machine and one second positive-displacement machine, as well as a control module, in which installation a gas is evacuated from an enclosed volume by means of the first positive-displacement machine and/or the second positive-displacement machine. The pumping installation includes at least one control valve controlled by the control module and a pressure sensor for sensing the value of the pressure at the outlet of the first positive-displacement machine and/or a temperature sensor for sensing the value of the temperature at the outlet of the first positive-displacement machine in order to control the flow of gas between the enclosed volume and the outlet of the pumping installation.

A pumping installation includes at least one first positive-displacement machine and one second positive-displacement machine, as well as a control module, in which installation a gas is evacuated from an enclosed volume by means of the first positive-displacement machine and/or the second positive-displacement machine. The pumping installation includes at least one control valve controlled by the control module and a pressure sensor for sensing the value of the pressure at the outlet of the first positive-displacement machine and/or a temperature sensor for sensing the value of the temperature at the outlet of the first positive-displacement machine in order to control the flow of gas between the enclosed volume and the outlet of the pumping installation.

A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.