A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other.

A compression apparatus includes an electrolyte membrane, an anode provided on a first principal surface of the electrolyte membrane, a cathode provided on a second principal surface of the electrolyte membrane, an anode separator provided on the anode, a cathode separator provided on the cathode, and a voltage applier that applies a voltage between the anode and the cathode. The compression apparatus causes, by using the voltage applier to apply a voltage, protons taken out from a hydrogen-containing gas that is supplied to the anode to move to the cathode via the electrolyte membrane and produces compressed hydrogen. The anode separator has a first flow channel, provided in a principal surface thereof facing away from the anode, through which a cooling fluid flows.

A compression apparatus includes an electrolyte membrane, an anode provided on a first principal surface of the electrolyte membrane, a cathode provided on a second principal surface of the electrolyte membrane, an anode separator provided on the anode, a cathode separator provided on the cathode, and a voltage applier that applies a voltage between the anode and the cathode. The compression apparatus causes, by using the voltage applier to apply a voltage, protons taken out from a hydrogen-containing gas that is supplied to the anode to move to the cathode via the electrolyte membrane and produces compressed hydrogen. The anode separator has a first flow channel, provided in a principal surface thereof facing away from the anode, through which a cooling fluid flows.

A fluid driving system includes a vibration unit, a piezoelectric element, a signal transmission layer, a plane unit, and a protrusion. The piezoelectric element includes a first electrode and a second electrode electrically isolated from each other. The signal transmission layer includes a first conductive zone and a second conductive zone. The first electrode of the piezoelectric element is electrically connected to the first conductive zone of the signal transmission layer, and the second electrode of the piezoelectric element is electrically connected to the second conductive zone of the signal transmission layer. The plane unit has at least one hole. The piezoelectric element, the signal transmission layer, and the plane unit are located at one side of the vibration unit. The protrusion is located between the vibration unit and the plane unit, and the protrusion corresponds to and protrudes toward the at least one hole.

A system for precision liquid delivery includes a gas reservoir having a known volume. The system has a tightly load-coupled pneumatic driver (a “TLCP driver”) that is configured to receive input power to cause the TLCP driver to move gas into the gas reservoir to produce a gas drive pressure. A valve is configured to couple the gas reservoir with a fluid reservoir having an unknown volume. The valve is further configured to selectively isolate or pneumatically couple pressures in the gas reservoir and the fluid reservoir. A gas-fluid interface couples pressure in the fluid reservoir to pressure in a fluid path. The fluid path is configured so that the fluid drive pressure driving the liquid in the fluid path is substantially the same as the fluid reservoir pressure. The system also has a pressure sensor configured to detect pressure in the gas reservoir and/or the fluid reservoir.

A system for precision liquid delivery includes a gas reservoir having a known volume. The system has a tightly load-coupled pneumatic driver (a “TLCP driver”) that is configured to receive input power to cause the TLCP driver to move gas into the gas reservoir to produce a gas drive pressure. A valve is configured to couple the gas reservoir with a fluid reservoir having an unknown volume. The valve is further configured to selectively isolate or pneumatically couple pressures in the gas reservoir and the fluid reservoir. A gas-fluid interface couples pressure in the fluid reservoir to pressure in a fluid path. The fluid path is configured so that the fluid drive pressure driving the liquid in the fluid path is substantially the same as the fluid reservoir pressure. The system also has a pressure sensor configured to detect pressure in the gas reservoir and/or the fluid reservoir.

A monitoring method and dosing pump system monitor operation of a dosing pump including a dosing chamber (2), a displacement element (4) and an electric drive (12). A position (S) of the displacement element and a pressure (P) inside the dosing chamber are continuously recorded as a curve in a pressure-stroke diagram. The method includes monitoring at least one characteristic portion (36, 38, 40, 42, B, C) of the curve in the pressure-stroke diagram by detecting a possible shift (A) of the characteristic portion over several strokes. The method further includes one or both of: adjusting a control of the electric drive based on the detected shift; and determining a trend of the shift over several strokes of the displacement element and determining based on the trend whether and/or when the shift will reach a predefined limit. A dosing pump system with the dosing pump execute the method.

A monitoring method and dosing pump system monitor operation of a dosing pump including a dosing chamber (2), a displacement element (4) and an electric drive (12). A position (S) of the displacement element and a pressure (P) inside the dosing chamber are continuously recorded as a curve in a pressure-stroke diagram. The method includes monitoring at least one characteristic portion (36, 38, 40, 42, B, C) of the curve in the pressure-stroke diagram by detecting a possible shift (A) of the characteristic portion over several strokes. The method further includes one or both of: adjusting a control of the electric drive based on the detected shift; and determining a trend of the shift over several strokes of the displacement element and determining based on the trend whether and/or when the shift will reach a predefined limit. A dosing pump system with the dosing pump execute the method.

A liquid material ejection device in which a plunger is efficiently accelerated. The device includes a liquid chamber communicating with an ejection port and being supplied with a liquid material, a plunger including a tip portion having a smaller diameter than the liquid chamber and is moved in the liquid chamber, an elastic member urging the plunger upward, an arm disposed in a state extending in a substantially horizontal direction, an arm driver serving as a driving source to operate the arm, and a base member on which the arm driver is disposed. The device further includes a rocking mechanism unit connected to the arm driver and rockingly supporting the arm, the arm driver includes a plurality of actuators, the arm includes a pressing portion pressing the plunger downward, the plunger is pressed by the pressing portion, and the plunger is linearly reciprocated with rocking motion of the arm.

A modular block for an electric pump for a fluid product, including a main body defining a housing extending along a main axis, the main body having a general shape having a discrete rotational symmetry relative to a reversion axis, the main axis of the housing within the housing extending on a first side of a central plane outside the central plane, the reversion axis being included in the central plane, and a pumping device extending at least partially in the housing of the main body.