A pump is disclosed which includes a pump body, a silencer connected to the pump body, and a condensation preventing device surrounding the silencer. A liquid supplying apparatus is also disclosed which includes the pump for providing a power to supply the liquid to outside, and a storage tank for storing a liquid.

A heat insulating vessel including an inner tank having a vertical axis to accommodate low temperature liquefied gas, an outer tank externally around the inner, and a low temperature liquefied gas pump disposed inside the inner tank. The outer tank having an upper part and an outer tank body. A lid structure having a heat-insulated structure detachably fitted into an upper part of the inner. The heat insulating vessel includes a first fastener to fasten with bolts, a first flange to upper ends of the inner and outer tanks upper part to a second flange to an outer circumferential part of the lid structure, and a second fastener to fasten with bolts, a third flange to an upper end of the outer tank body to a fourth flange to a lower end of the outer tank upper part. A vacuum insulating layer is formed between the inner and outer tanks.

A heat insulating vessel including an inner tank having a vertical axis to accommodate low temperature liquefied gas, an outer tank externally around the inner, and a low temperature liquefied gas pump disposed inside the inner tank. The outer tank having an upper part and an outer tank body. A lid structure having a heat-insulated structure detachably fitted into an upper part of the inner. The heat insulating vessel includes a first fastener to fasten with bolts, a first flange to upper ends of the inner and outer tanks upper part to a second flange to an outer circumferential part of the lid structure, and a second fastener to fasten with bolts, a third flange to an upper end of the outer tank body to a fourth flange to a lower end of the outer tank upper part. A vacuum insulating layer is formed between the inner and outer tanks.

A vacuum pump includes a hollow container that has a vacuum port and internal chamber walls. The vacuum port opens to an exterior of the container and the chamber walls define chambers that are in fluid communication with the vacuum port. There are flexible bladders disposed in the chambers. The flexible bladders include vents that open through the container to the exterior. A plunger in the container includes arms that extend into the chambers such that each of the flexible bladders is situated between one of the arms and one of the chamber walls. The plunger is moveable between a home position and an upstroke position to compress and deflate the flexible bladders via the vents and thereby change the volume of the flexible bladders. The change in the volume draws a vacuum through the vacuum port.

A vacuum pump includes a hollow container that has a vacuum port and internal chamber walls. The vacuum port opens to an exterior of the container and the chamber walls define chambers that are in fluid communication with the vacuum port. There are flexible bladders disposed in the chambers. The flexible bladders include vents that open through the container to the exterior. A plunger in the container includes arms that extend into the chambers such that each of the flexible bladders is situated between one of the arms and one of the chamber walls. The plunger is moveable between a home position and an upstroke position to compress and deflate the flexible bladders via the vents and thereby change the volume of the flexible bladders. The change in the volume draws a vacuum through the vacuum port.

A vacuum pump includes a hollow container that has a vacuum port and internal chamber walls. The vacuum port opens to an exterior of the container and the chamber walls define chambers that are in fluid communication with the vacuum port. There are flexible bladders disposed in the chambers. The flexible bladders include vents that open through the container to the exterior. A plunger in the container includes arms that extend into the chambers such that each of the flexible bladders is situated between one of the arms and one of the chamber walls. The plunger is moveable between a home position and an upstroke position to compress and deflate the flexible bladders via the vents and thereby change the volume of the flexible bladders. The change in the volume draws a vacuum through the vacuum port.

A vacuum pump includes a hollow container that has a vacuum port and internal chamber walls. The vacuum port opens to an exterior of the container and the chamber walls define chambers that are in fluid communication with the vacuum port. There are flexible bladders disposed in the chambers. The flexible bladders include vents that open through the container to the exterior. A plunger in the container includes arms that extend into the chambers such that each of the flexible bladders is situated between one of the arms and one of the chamber walls. The plunger is moveable between a home position and an upstroke position to compress and deflate the flexible bladders via the vents and thereby change the volume of the flexible bladders. The change in the volume draws a vacuum through the vacuum port.

Provided are a pump, an apparatus for supplying a chemical liquid and an apparatus for processing a substrate. The pump includes a tube having elasticity and having a flow path through which a chemical liquid flows in; and a case having an internal space partitioned into at least two chambers through which gas is supplied or discharged, where the at least two chambers cover an outer circumference of the tube. Using the pump, the apparatus for supplying a chemical liquid and the apparatus for processing a substrate, by an operation in which gas is supplied or discharged into each partitioned chamber in the case, by applying or releasing pressure to the outer circumference of each corresponding tube independently without interfering between the internal pressures between the chambers, efficient pumping operation of the pump may be obtained, and precise control of the discharge pressure of the liquid may be implemented.

Provided are a pump, an apparatus for supplying a chemical liquid and an apparatus for processing a substrate. The pump includes a tube having elasticity and having a flow path through which a chemical liquid flows in; and a case having an internal space partitioned into at least two chambers through which gas is supplied or discharged, where the at least two chambers cover an outer circumference of the tube. Using the pump, the apparatus for supplying a chemical liquid and the apparatus for processing a substrate, by an operation in which gas is supplied or discharged into each partitioned chamber in the case, by applying or releasing pressure to the outer circumference of each corresponding tube independently without interfering between the internal pressures between the chambers, efficient pumping operation of the pump may be obtained, and precise control of the discharge pressure of the liquid may be implemented.

A novel hose pump for viscous material includes a hose, a variator, a variator drive, a controller, a pressure-tight housing, and a negative pressure connection. The hose has an elastic circumferential wall and an inner cross-sectional area and is open at both ends. The hose includes a pressure-tight inlet opening and a pressure-tight outlet opening. A portion of the hose is enclosed within the pressure-tight housing. The negative pressure connection is coupled to the pressure-tight housing. The variator is adapted to compress the hose and thereby to reduce the inner cross-sectional area of the hose. The variator drive causes the variator to compress the hose at controlled locations along the hose. The controller controls the variator drive. The variator rotates and compresses the hose where the variator contacts the hose. Alternatively, multiple variators form pinch valves at fixed locations along the hose and compress the hose independently of one another.