A pump includes a housing, a first vibrating body, a second vibrating body, and a peripheral wall portion that define a pump chamber, and a driving body. The housing has a first wall portion opposed to the first vibrating body and a second wall portion. The first wall portion includes a first concave portion that opens toward the first vibrating body and opposed to a central portion of the first vibrating body and a first circumferential portion adjacent to the first concave portion. A first chamber includes a first wide portion defined by the first concave portion and the first vibrating body, and a first narrow portion defined by the first circumferential portion and the first vibrating body. The first narrow portion overlaps with at least part of the first vibrating body.

A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.

A pump includes a first diaphragm, a second diaphragm, and a circumferential wall, which define a pump chamber, and a driver. The driver vibrates the first diaphragm and the second diaphragm in a flexural mode to cause pressure fluctuation in the pump chamber. The first diaphragm has a first hole to which no check valve is attached. At least one of the first diaphragm and the second diaphragm has a second hole to which a check valve is attached. The first hole is located at a portion that coincides with an axis orthogonal to a center of the first diaphragm and a center of the second diaphragm. The second hole is located at a portion that does not coincide with the first hole when viewed in a direction in which the axis extends.

The invention relates to a microfluidic device comprising at least one element (1) of magnetic shape memory (MSM) material for handling of a fluid flow, the MSM element (1) being controlled by a magnetic field. The device comprises elastic material (2) between the handled fluid and the MSM element (1), and that the magnetic field is arranged to form a local shrinkage to the MSM element (1) which together with the elastic material (2) form a shrinkage cavity (3) in a location where the magnetic field is applied to the MSM element. Preferably, the microfluidic device is connected to a lab-on-a-chip, and it can act as one of the followings: a pump, vacuum pump, compressor, refrigerator, valve, manifold, dozer, mixer.

A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.

A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.

A method of producing a flow of a fluid through a passage (24) defined in a rigid frame (22) comprises selectively actuating a flexible membrane (38) disposed across a midpoint of the passage (24) with an actuating system in a manner which produces a wave-like motion in the membrane (38) thereby causing a peristaltic movement of the fluid through the passage (24).

An apparatus for creating a flow of gas comprises a frame having a passage defined therethrough. The passage extends a length along a central longitudinal axis from an inlet to an outlet and has a first side and a second side. A flexible pumping membrane is disposed within the passage. The membrane has a first edge coupled to the first side of the passage at a midline thereof and a second edge, disposed opposite the first edge, coupled to the second side of the passage at a midline thereof. The membrane segregates the frame into an upper portion and a lower portion. The apparatus also includes an actuating system which is structured to selectively move portions of the membrane toward either the upper portion or the lower portion of the frame in a manner which causes a wave-like movement in the pumping membrane and creates the flow of gas.

A system for thermal management of a heat sink via active surfaces. The heat sink includes a cavity within the heat sink, and a nozzle. The nozzle provides a pathway from the cavity to a surface of the heat sink. The heat sink also includes a membrane attached to the cavity and an actuator of the membrane, causing the membrane to oscillate. The oscillation of the membrane causes inflow and outflow of a medium through the nozzle.