There is provided a technique that includes: a controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate. The controller acquires device data, which includes at least one of a current value, a rotational speed, and a back pressure of a pump, in a specific step among the plurality of steps and compares an acquired value of the device data with a previously acquired value of the device data. The controller generates a notification if at least one of the following conditions is met: the acquired value for the current value is larger than the previously acquired value for the current value, the acquired value for the back pressure is larger than the previously acquired value for the back pressure, and the acquired value for the rotational speed is smaller than the previously acquired value for the rotational speed.

A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

The present invention provides wireless sensor technology seamlessly integrated into a pump system having a pump, a motor and a drive, has diagnostic and prognostic intelligence that utilizes sensor data, allows real-time condition monitoring; enables easy access to data and analytics via smart devices (i.e., smart phones and tablets); allows for easy remote monitoring (i.e., web portal) of the pump system; allows self-learning artificial intelligence (AI) built-in that adapts to changing conditions; and allows for smart pump system remote control. In operation, the present invention monitors the health and performance of the pump system that allows the user to get real-time data and intelligence virtually anywhere and anytime, as well as real-time diagnostics and prognostics, and also allows for smart control of the pump system remotely via smart device, and reduces downtime of equipment.

A dual pump smart control system. The operating time and the number of simultaneous operations are analyzed and compared with a reference time and a reference number, so that a controller determines whether or not the operation is normal. Afterwards, the driving of a first pump and the driving of a second pump are differentially controlled depending on whether or not the operation is determined to be normal by the controller. Thus, a malfunction caused by the concentration of load at a specific pump is prevented. Accordingly, the dual pump smart control system precisely controls the driving of the dual pumps and enables the pumps to operate efficiently.

A system, method, and computer-readable medium for determining the flow rate and fluid density in an electrical submersible pump (ESP) and controlling the ESP based on the flow rate and density. In one implementation, an ESP system includes an ESP, drive circuitry, a current sensor, a voltage sensor, and a processor. The ESP includes an electric motor. The drive circuitry is electrically coupled to the ESP and is configured to provide an electrical signal to power the ESP. The current sensor is configured to measure a current of the electrical signal. The voltage sensor is configured to measure a voltage of the electrical signal. The processor is configured to calculate speed of a shaft of the electric motor based on a frequency induced by rotation of the motor detected in the current. The processor is also configured to calculate a density of fluid in the ESP based on the speed.

A marine hydraulic system and method of use for reducing cyclic loading of the pump(s) and motor(s) and an amount of accumulator storage required in a hydraulic system. A closed loop logic controller comprising at least one control algorithm for each pump/motor pair utilized in a single hydraulic system is utilized to reduce load fluctuations on the motors, allow the use of common pressure compensated, variable displacement (VDH) pumps, reduce the number and/or volume of system accumulators and equalize wear throughout the system.

A digital pressure switch is configured to be connected to a fluid pump. The digital pressure switch includes a pressure sensor configured to measure pressure inside a closed system, one or more relays configured to be connected to the fluid pump for activation and deactivation of the fluid pump, an amperage sensor configured to measure an amperage draw of an electric motor of the fluid pump, and a controller configured to process data from the pressure sensor and/or data from the amperage sensor and to activate or deactivate the motor of the fluid pump based on the data from the pressure sensor and/or the data from the amperage sensor, using the relays.

Disclosed are a variable capacity compressor operation mode determination method and device, a variable capacity compressor and an air conditioner. The variable capacity compressor operation mode determination method includes: detecting a current value of a compressor at present as A1 before switching an operation mode of the compressor; detecting the current value of the compressor at present as A2 after switching the operation mode of the compressor and reaching a preset time; comparing A1 and A2, determining that the switching of the operation mode of the compressor is successful when a ratio relationship between A1 and A2 satisfies a preset condition, and determining that switching of the operation mode of the compressor is failed when the ratio relationship between A1 and A2 dissatisfies a preset condition.

A control method of an intelligent sterility test pump, a sterilization method and its application. The control method includes monitoring the real-time current of a DC drive motor through a current detection module, to adjust the rotating linear velocity of a peristaltic pump head in real time; when the peristaltic pump head is in a state of pushing a liquid to be tested, reducing the rotating linear velocity of the peristaltic pump head; and when the peristaltic pump head is in an idling state, increasing the rotating linear velocity of the peristaltic pump head. A sterilization method includes the control method of the intelligent sterility test pump. Application of the sterilization method in preparation or detection of foods and medicines.

The present invention relates to a speed control system for hermetic compressors of the variable speed type, which uses a PMSM motor, containing a strategy for optimization, or minimization, of the electric current. Once the minimum current has been defined to meet a given demand for torque, it is applied to the hermetic compressor motor, which will operate at the maximum efficiency point for each load point.