A vacuum pumping arrangement comprises a first pump which has a first inlet and a first outlet. The first inlet is fluidly connected to a first common pumping line. The first common pumping line includes a plurality of first pumping line inlets each of which is fluidly connectable to a least one process chamber within a group of process chambers that form a semiconductor fabrication tool. The vacuum pumping arrangement also includes a reserve pump which has a reserve inlet and a reserve outlet. The reserve inlet is selectively fluidly connectable to each process chamber within the group of process chambers that form the semiconductor fabrication tool. The vacuum pumping arrangement additionally includes a controller which is configured to selectively fluidly isolate the pump from one or more given process chambers and selectively fluidly connect the reserve pump with the said one or more given process chambers.

Systems and methods for compressor unloading detection are provided and include a compressor having a compression mechanism. A controller determines a predicted discharge temperature of the compressor, receives an actual discharge temperature of the compressor, and compares the predicted discharge temperature with the actual discharge temperature. The controller also compares a speed of the compressor with a speed threshold and detects unloading of the compression mechanism based on the comparison of the predicted discharge temperature with the actual discharge temperature and based on the comparison of the speed of the compressor with the speed threshold. The controller performs at least one of generating an alert and a remediating action in response to detecting the unloading of the compression mechanism.

An oil-gas balancing apparatus includes: a body, a gas balancing opening and at least one oil balancing hole. The body has a first end and a second end opposite to the first end, and the first end can be fixedly connected to a shell of a compressor and in communication with an oil sump of the compressor and a chamber of the oil sump. The gas balancing opening is disposed on a first portion of an end surface of the second end. The at least one oil balancing hole is disposed on a second portion of the end surface of the second end. The second portion and the first portion are oppositely disposed. A compressor system can include the oil-gas balancing apparatus.

A first injection port is open to a suction chamber of a plurality of chambers at some rotation phases, and is located within an angular range defined by a line connecting a winding-end contact point of an orbiting scroll at a compression start phase with a base circle center of a fixed scroll and one of two lines tangent to a winding-end point locus of a tip seal at a tooth tip of a spiral body of the orbiting scroll and passing through a base circle center of the orbiting scroll, the one being closer to the winding-end contact point. The first injection port does not interfere with the tip seal at the tooth tip of the spiral body of the orbiting scroll.

A scroll fluid machine includes a compressor body having a first scroll and a second scroll which form a compression chamber, a cover forming an air guiding space by covers at least a portion of the compressor body, and a blower fan supplying cooling air to at least one of the first scroll and the second scroll. A portion of the cooling air is supercharged into the intake port via the air guiding space whereby satisfactory compression efficiency is achieved with a simple configuration.

A single-stage compressor including one compressing unit, includes: a housing having a compressing chamber formed therein and including a suction port, which is located in one side of the compressing chamber and into which a working fluid enters, and an injection port, which is located on the compressing chamber to be spaced apart from the suction port by a predetermined distance and into which an intermediate-pressure working fluid is injected; and an intermediate-pressure valve installed on an intermediate-pressure fluid flow path on which the intermediate-pressure working fluid moves and configured to control supply of the intermediate-pressure working fluid so that the intermediate-pressure working fluid is supplied to the injection port in response to an intermediate pressure of the compressing chamber. In the injection-type compressor having a single chamber, a working fluid is injected at an intermediate pressure (not in the proximity of a suction pressure) so that efficiency and capability of the injection-type compressor having a single chamber can be improved. The injection-type compressor having a single chamber has a simple structure and is easily manufactured so that a pressure of an injection port and a corresponding intermediate pressure can be selectively set in various ways.

A fluid machine for a vehicle includes a rotary shaft, an electric motor having a coil, a drive circuit, and a housing having therein a motor chamber and a circuit chamber. The housing includes a partitioning wall partitioning between the motor chamber and the circuit chamber and a peripheral wall extending from the partitioning wall. The partitioning wall and the peripheral wall form the circuit chamber. The drive circuit includes a circuit board having a surface and an electronic component mounted on the surface of the circuit board. A connecting terminal is disposed extending through the partitioning wall and electrically connecting the coil with the drive circuit. A mounting lug is formed extending from the peripheral wall so as to mount the housing to the vehicle. The electronic component, the connecting terminals and the mounting lug are disposed in this order in the radial direction of the rotary shaft.

Embodiments of the present disclosure provide a flow control valve, an oil pump assembly having the flow control valve, and a scroll compressor. The flow control valve includes: a valve body having an inlet configured for a fluid to flow into the valve body and an outlet configured for the fluid to flow out of the valve body; a passage provided between the inlet and the outlet and extending in a predetermined direction, an area of a cross section of the passage perpendicular to the predetermined direction being negatively correlated with a distance from the cross section to the inlet; a valve element slidably provided in the passage, a flow area between the valve element and an inner wall of the passage is negatively correlated with the distance from the valve element to the inlet; and an elastic member provided in the valve body to apply an elastic force on the valve element so as to move the valve element in a direction toward the inlet. Thereby, for example, lubrication of the scroll compressor is improved.

A compressor operable in a heat pump mode of a refrigerant circuit includes a compression space in which a refrigerant is compressed. The compression space includes a discharge port and an injection port. A discharge chamber is fluidly coupled to the compression space by the discharge port. An injection chamber is fluidly coupled to the compression space by the injection port. A discharge recirculation pathway selectively provides fluid communication between the discharge chamber and the injection chamber. An injection of the recirculated refrigerant into the compression space through the injection port results in an increase in pressure, and hence temperature, of the refrigerant when discharged to the discharge chamber. The increased temperature of the discharged refrigerant increases a heating capacity of a condenser of the associated refrigerant circuit.

A stator includes a stator core having a plurality of slots in a circumferential direction about an axis and having an end surface in a direction of the axis, and a first coil and a second coil of different phases which are wound on the stator core in distributed winding. A winding factor is 1. Each of the first coil and the second coil has winding portions, the number of which corresponds to the number of poles. The winding portions include first and second winding portions adjacent to each other in the circumferential direction. The first and second winding portions are inserted into one slot of the plurality of slots and extend from the one slot to both sides in the circumferential direction on the end surface. The first and second coils are annularly disposed in different positions in a radial direction about the axis on the end surface.