A vacuum pumping arrangement comprises a first pump which has a first inlet and a first outlet. The first inlet is fluidly connected to a first common pumping line. The first common pumping line includes a plurality of first pumping line inlets each of which is fluidly connectable to a least one process chamber within a group of process chambers that form a semiconductor fabrication tool. The vacuum pumping arrangement also includes a reserve pump which has a reserve inlet and a reserve outlet. The reserve inlet is selectively fluidly connectable to each process chamber within the group of process chambers that form the semiconductor fabrication tool. The vacuum pumping arrangement additionally includes a controller which is configured to selectively fluidly isolate the pump from one or more given process chambers and selectively fluidly connect the reserve pump with the said one or more given process chambers.

An automatic oil level retention system for a compressor and a method for controlling a same, including: a normal oil return mode and an auxiliary oil return mode. When a lubricating oil liquid level monitored by a liquid level detection unit in real time is above a required liquid level height, the system initiates only the normal oil return mode; and when the lubricating oil liquid level monitored by the liquid level detection unit in real time is below the required liquid level height, the system initiates the auxiliary oil return mode, and the auxiliary oil return mode is closed and the normal oil return mode is initiated after the lubricating oil liquid level monitored in real time is lifted above the required liquid level height.

The multi-compressor system (7) has a plurality of parallelly coupled compressors (8); inlet connection lines (15) each connected to a refrigerant suction fitting of a respective compressor (8); outlet connection lines (17) each connected to a refrigerant discharge fitting of a respective compressor (8); a common oil balancing line (18) and balancing connection lines (19) each connecting the common oil balancing line (18) to an oil balancing connection (21) of a respective compressor (8); and spring-loaded normally-open valves (25) each being arranged within a respective balancing connection line (19) or within an oil balancing connection (21) of a respective compressor (8) and each being configured to close when a pressure difference between a pressure prevailing in the low pressure volume of the respective compressor (8) and a pressure prevailing in the common oil balancing line (18) reaches a predetermined value.

A compressor includes a shell, first and second scroll members, a fitting assembly and a valve assembly. The first scroll member includes a first end plate having a first spiral wrap extending therefrom. The second scroll member includes a second end plate having a second spiral wrap extending therefrom and an injection passage formed in the second end plate. The second spiral wrap is meshingly engaged with the first spiral wrap to form compression pockets. The injection passage is in fluid communication with the compression pockets. The fitting assembly is in fluid communication with the injection passage. The valve assembly coupled to one of the second scroll member and the fitting assembly and movable between a closed position in which fluid communication between the compression pockets and the suction chamber is prevented and an open position in which fluid communication between the compression pockets and the suction chamber is allowed.

This scroll compressor comprises: a shaft that is capable of rotating about an axis; a motor that rotatably drives the shaft; a compressor body that is driven by the rotation of the shaft; a housing that covers the motor and the compressor body and that has a bottom surface facing the motor from the axial direction; an intake port that guides a refrigerant into the housing; and heat-dissipating fins that are formed on the bottom surface, that extend in the direction in which the refrigerant flows, and that are divided in the flow direction.

A fluid filter includes a body portion and a filter membrane portion. The body portion includes at least one aperture formed therein, wherein the filter membrane portion is disposed in the at least one aperture to filter contaminants from a fluid (e.g., a lubricant). The fluid filter is installed in a fluid passage of scroll compressor, wherein an axial movement of the fluid filter is restrained.

A system for noise and vibration management of a smoke evacuation system includes a pump that compresses air and produces a pressure differential within an airflow path. The pump may be a sealed, positive displacement pump. The system includes vibration absorption mechanisms disposed between inner and outer housings, as well as on the outside surface of the outer housing. Methods of controlling and regulating a motor of the system to preserve the lifespan of the motor and maintain consistent airflow rates throughout the smoke evacuation system include varying a supply of electrical current to the motor so that it can operate at variable performance levels. Orifices are opened and closed in order to relieve resistance pressures within the airflow path due to clogging and blockages.

There is provided an electric compressor in which the connection strength between an inverter circuit section and an electrical circuit section connected thereto by a connection terminal is improved. An inverter circuit section (3) includes an inverter control board (17) and a resin-molded sleeve assembly (18). In the sleeve assembly, a sleeve (32) and a terminal connection portion (23) are integrally resin-molded in a state in which a screw groove portion is protruded. The inverter control board (17) and a filter side connection terminal (71) of a filter circuit section (4) are fastened together to the terminal connection portion with a nut (92) screwed into the screw groove portion, whereby the inverter control board 17 and the filter circuit section 4 are electrically connected.

The invention relates to a displacement machine according to the spiral principle, in particular a scroll compressor or scroll expander, with a high-pressure chamber, a low-pressure chamber and an orbiting displacement spiral, which engages in a counter-spiral such that chambers are formed between the displacement spiral and the counter-spiral for receiving a working medium, wherein a counter-pressure chamber is formed between the low-pressure chamber and the displacement spiral. According to the invention a pressure regulating device which is fluidically connected to the counter-pressure chamber sets a pressure difference between the counter-pressure chamber and the low-pressure chamber by means of a set value specified by the computing unit.

The disclosed invention provides an unmodified scroll compressor with enhanced oil management system that enables the compressor system to compress helium. The compressor system includes a standard scroll compressor, oil separator, and an adsorber. The compressor includes a housing containing an orbiting scroll and a stationary scroll, a motor, and an oil sump in a bottom of the housing. The stationary scroll has one or more injection ports, and the housing contains a single discharge port, a return port, and a single injection port connected to the injection ports of the stationary scroll. The oil separator receives a mixture of helium and oil from the discharge port. The compressor system further includes a line bringing a first fraction of oil from the oil separator to the injection port, one or more lines bringing a second fraction of oil to the return port along with helium. The adsorber retains a third fraction of oil.