A vacuum pumping arrangement includes a first primary pump having an inlet and an outlet, and a first common pumping line fluidly connected to the inlet, the first common pumping line including a plurality of first common pumping line inlets each of which is fluidly connectable to at least one vacuum process chamber forming the semiconductor fabrication tool, the first primary pump and the first common pumping line handling deposition process flows. The pumping arrangement further including a second primary pump having an inlet and an outlet, and a second common pumping line fluidly connected to the inlet of the second primary pump, the second common pumping line including a plurality of second pumping line inlets each of which is fluidly connectable to at least one process chamber forming the semiconductor fabrication tool, the second primary pump and the second common pumping line handling cleaning process flows.

Disclosed herein is a rotary compressor capable of maintaining the overall dynamic balance and providing low vibration and low noise even at high speed operation and capable of improving efficiency by providing a communication passage to communicate operation chambers, which are provided inside each of the plurality of cylinders for compressing a refrigerant, to each other. The rotary-type compressor includes a housing, a drive motor provided inside the housing to generate power and having a stator and a rotor, and a compression unit that receives power from the drive motor and compresses the refrigerant. The compression unit includes a plurality of cylinders in which an operation chamber to compress the refrigerant is provided. The operation chambers provided in each of the plurality of cylinders are provided to have different volumes, and a balancer provided to maintain dynamic balance is provided only in the lower side of the rotor.

A refrigeration cycle device according to the present invention includes a compressor having a first compression chamber and a second compression chamber, a condenser, a decompressor, an evaporator, an injection path configured to introduce intermediate pressure refrigerant, a communication passage configured to introduce intermediate pressure refrigerant compressed in the first compression chamber to the second compression chamber, and a switch element configured to selectively make the second compression chamber communicate with the evaporator or make the second compression chamber communicate with the communication passage. The injection path introduces the intermediate pressure refrigerant to the second compression chamber. Single-stage compressing operation is performed when the second compression chamber is communicated with the evaporator, and two-stage compressing operation is performed when the second compression chamber is communicated with the communication passage.

A compressor includes two parallel arranged primary cylinders and a secondary cylinder arranged in the downstream of the two primary cylinders. The secondary cylinder includes a cylinder body and a sliding vane. The sliding vane is arranged inside the cylinder body. A locking part is used for locking and unlocking the sliding vane. The locking part is clamped with and separated from the sliding vane. When the sliding vane is in the locking position, the sliding vane is locked in a seal cavity inside the secondary cylinder, and the locking end of the locking part extends to the side at which the secondary cylinder is located. The compressor can be switched between a single-stage mode and a double-stage mode. In the condition of light load, energy efficiency can be improved and the waste of energy sources is avoided. An air conditioning system and compressor control method are also disclosed.

Scroll fluid machine (1) in which the dislodgement of a slide bush (56) and a spring (61), which are provided in an eccentric bush (36), is prevented. Provided in receiving hole (58) of eccentric bush (36) are slide bush (56), which is movable in the direction of eccentricity, and spring (61), which biases slide bush (56) in a moving direction. A spring holding section (56b) and engagement projections (56a) are formed on slide bush (56). After slide bush (56) is placed in the receiving hole (58), engagement projections (56a) engage with eccentric bush (36) in a state in which slide bush (56) has been moved by the biasing force of spring (61), thus preventing slide bush (56) from falling off the receiving hole (58), and the spring holding section (56b) prevents the spring (61) from falling off the receiving hole (58).

A compressor includes a shell assembly and a compression mechanism disposed within the shell assembly. The shell assembly includes first and second end caps. A suction chamber is disposed within the shell assembly between the first end cap and the second end cap. A discharge chamber and oil sump may be disposed within the shell assembly. The shell assembly includes at least one suction opening into the suction chamber. A distributor is in communication with one of the suction openings. Plugs may sealingly engage another one of the suction openings. The distributor includes an inlet path and first and second outlet paths. A suction line is coupled to the inlet path. The suction line includes at least first and second portions. A first plane bisecting the second portion along a length of the second portion is perpendicular to a second plane that bisects the first and second outlet paths.

A pumping system is provided, including a rough-vacuum pump; a Roots vacuum pump including a pumping stage having a stator inside which two Roots rotors are configured to rotate synchronously in opposite directions to drive a gas to be pumped between an inlet orifice and an outlet orifice; and a pipeline connecting the outlet orifice to an intake of the rough-vacuum pump, a shortest distance between an edge of the outlet orifice and each of the Roots rotors in the pumping stage being less than 3 cm, and the outlet orifice being situated at the end of an upstream tube of the pipeline that passes into the pumping stage.

The invention relates to a method for controlling a rotary screw compressor, having at least a first and a second air-end, wherein both air-ends are driven separately from one another and speed controlled. According to the invention, the following steps are carried out: detection of a volume flow taken at the outlet of the second air-end; adjustment of the rotational speed of both air-ends, when the removed volume flow fluctuates in a range between a maximum value and a minimum value; opening of a pressure-relief valve, if the volume flow falls below the minimum value; and reduction of the rotational speed of at least the first air-end to a predetermined idling speed (V1.sub.L) to reduce the volumetric flow delivered by the first to the second air-end.

A power saving vacuuming pump system is based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps includes an input valve at an input end of a vacuum space for receiving gas mixture of saturation water vapor and non-condensed air from a condenser of a power plant; a first root vacuum pump connected to the input valve for receiving gas mixture from the input valve and then compressing the gas mixture; a second root vacuum pump connected to the first root vacuum pump for receiving gas mixture from the first root vacuum pump and then compressing the gas mixture. Inner connection walls between the vacuum chamber and the two bearing rooms are installed respective bearings which are installed to be around the driving shaft, and thus all the vacuum chamber and the two bearing rooms are tightly sealed. The vacuum chamber is completely dried so as to prevent from internal emulsion.

A compressor is disclosed which can include a first stage and a second stage. In one form the compressor includes contact cooled compressor stages. The compressor can include a rod useful to inject a lubricant for purposes of cooling/lubricating/sealing the rotating components of the compressor. In one form the rod is an elongate rod with openings which permit a lubricant such as oil to be injected. The injected oil can be atomized via the openings. The rod can be positioned in the interstage space between the first and second stages, and can include a variety of openings.