Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.

A vacuum pump system includes a secondary pumping mechanism incorporated into a stationary portion of a scroll pump. The stationary portion includes the stationary plate scroll of the scroll pump and defines a gas passageway in which the secondary pumping mechanism is disposed. The gas passageway is connected to a gas flow path through the scroll pump at a location upstream of an exhaust check valve of the scroll pump. The secondary pumping mechanism is displaceable within the gas passageway to draw residual gas in the compression stage upstream of the check valve into the gas passageway, and may pump the residual gas back out through the exhaust check valve, to evacuate residual gas from the compression stage.

A supercharged internal combustion engine has a supercharger operable to selectively supply a mass of air from below through above atmospheric air pressure according to the operating requirements of the engine. The supercharger has a shuttle combined with a throttle valve that controls the mass of air directed to an air mass bypass opening and supplied to the internal combustion engine. The shuttle has rollers that ride on rails that allow the shuttle to move to open and close the air mass bypass opening in communication with a casing that directs a mass of atmospheric air and a bypass mass of air interfused with the mass of atmospheric air to an air mass inlet of the supercharger.

A supercharged internal combustion engine has a supercharger operable to selectively supply a mass of air from below through above atmospheric air pressure according to the operating requirements of the engine. The supercharger has a shuttle combined with a throttle valve that controls the mass of air directed to an air mass bypass opening and supplied to the internal combustion engine. The shuttle has rollers that ride on rails that allow the shuttle to move to open and close the air mass bypass opening in communication with a casing that directs a mass of atmospheric air and a bypass mass of air interfused with the mass of atmospheric air to an air mass inlet of the supercharger.

A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

To improve the exhaust heat recovery efficiency, a compressor includes a heat exchanger for cooling a gas, coolant, water, or oil heated by the compressor during compressor operation by heat exchange with a working fluid, for circulating the working fluid of a Rankine cycle. The Rankine cycle is implemented by the heat exchanger, an expander, a condenser, and a circulating pump to circulate the working fluid through the cycle.

The disclosure describes a flow conditioning device for dampening pulses and improving performance of a compressor. In one approach, a diffuser device includes a housing member having a first end and a second end, the housing member coupled to an outlet of a compressor, and a diffuser member disposed within the housing member. The diffuser member is in fluid communication with a working fluid delivered from the compressor, and includes a core member extending along a longitudinal axis of the diffuser member, and a plurality of flutes extending radially from the core member. In some approaches, the plurality of flutes and an inner surface of the housing define a plurality of fluid channels for delivering the working fluid from the first end to the second end of the housing member. In some approaches, the diffuser member is rotatably coupled to the housing member.

The present invention relates to a redundant vacuum pumping system (300) and a pumping method using this system, comprising a primary roots pump (302), a first pumping sub-system (310) and a second pumping sub-system (320), wherein the first pumping sub-system (310) and the second pumping sub-system (320) are arranged to pump in parallel the gas evacuated by the primary roots pump (302), the first pumping sub-system (310) comprising a first secondary roots pump (311) and a first positive displacement pump (312) and a first valve (313) positioned between the gas discharge outlet (302b) of the primary roots pump (302) and the gas suction inlet (311a) of the first secondary roots pump (311), and the second pumping sub-system (320) comprising a second secondary roots pump (311) and a second positive displacement pump (312) and a second valve (323) positioned between the gas discharge outlet (302b) of the primary roots pump (302) and the gas suction inlet (321a) of the second secondary roots pump (321). According to the invention, the first pumping sub-system (310) and the second pumping sub-system (320) are configured to pump at a same flow rate, and the primary roots pump (302) is configured to be able to pump at a flow rate F equal to the pumping flow rate of the primary pumping sub-system (310) plus the pumping flow rate of the secondary pumping sub-system (320).

A supercharged internal combustion engine has a supercharger operable to selectively supply a mass of air from below through above atmospheric air pressure according to the operating requirements of the engine. The supercharger has a shuttle combined with a throttle valve that controls the mass of air directed to an air mass bypass opening and supplied to the internal combustion engine. The shuttle has rollers that ride on rails that allow the shuttle to move to open and close the air mass bypass opening in communication with a casing that directs a mass of atmospheric air and a bypass mass of air interfused with the mass of atmospheric air to an air mass inlet of the supercharger.

A supercharged internal combustion engine has a supercharger operable to selectively supply a mass of air from below through above atmospheric air pressure according to the operating requirements of the engine. The supercharger has a shuttle combined with a throttle valve that controls the mass of air directed to an air mass bypass opening and supplied to the internal combustion engine. The shuttle has rollers that ride on rails that allow the shuttle to move to open and close the air mass bypass opening in communication with a casing that directs a mass of atmospheric air and a bypass mass of air interfused with the mass of atmospheric air to an air mass inlet of the supercharger.