The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a dry screw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading into a gas evacuation conduit (5) in the direction of a gas exhaust outlet (8) outside the pumping system. The pumping system comprises a non-return valve (6) positioned between the gas discharge outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) and to discharge these gases through its gas discharge outlet (4), simultaneously to which the auxiliary vacuum pump (7) is started up. Moreover the auxiliary vacuum pump (7) continues to pump all the while that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).

The present invention relates to rotary screw positive displacement machines used as a vacuum pump wherein additional intake air is provided allowing cooling to the invention which permits extended operation at extreme vacuum pressure. The rotary screw nature of the vacuum pump allows operation without additional lubrication with the additional intake air ensuring that thermal expansion will not disrupt the tight tolerances of the invention. The invention allows simultaneous operation as a vacuum pump and air compressor.

A vacuum system is disclosed. The vacuum system includes a first pump bay and a second pump bay enclosed by an enclosure. Each pump bay houses a motor and a vacuum pump driven by the motor. An inlet manifold and an exhaust manifold are in fluid communication with the first and second pump bays. The inlet manifold and the exhaust manifold are arranged to flow air through the pump bays to cool at least the vacuum pumps.

A vacuum exhaust system and method of evacuating a plurality of chambers is disclosed. The vacuum exhaust system is within a clean room and comprises: a plurality of branch process gas channels each configured to connect to a corresponding chamber and a shared process channel formed from a confluence of the branch channels and configured to provide a shared fluid communication path for process gas from each of the chambers to flow from the clean room to a process channel outside of the clean room. There is also a plurality of branch pumpdown channels each configured to connect to a corresponding chamber and a shared pumpdown channel formed from a confluence of the branch pumpdown channels and configured to provide a fluid communication path for fluid to flow from the clean room to a pumpdown channel outside of the clean room during pumpdown of at least one of the vacuum chambers.

A method is provided for controlling a temperature of a vacuum pump of a dry vacuum pump type subjected to variable pumping loads, the pump including a stator, a pumping stage, two shafts extending into the stage and respectively bearing a rotor to rotate synchronously in opposite directions in the stator and to drive a gas from a suction inlet to a delivery outlet, a cooling element coupled to the stator, a temperature sensor to measure a stator temperature, and a controller to control the stator temperature by the cooling element and the temperature sensor; and the method including controlling the pump temperature by the cooling element based on a temperature setpoint and a measurement of the stator temperature, and monitoring whether a value of a pumping load parameter is below a load threshold and, if so, increasing the setpoint. A vacuum pump and a system are also provided.

A pumping installation includes at least one first positive-displacement machine and one second positive-displacement machine, as well as a control module, in which installation a gas is evacuated from an enclosed volume by means of the first positive-displacement machine and/or the second positive-displacement machine. The pumping installation includes at least one control valve controlled by the control module and a pressure sensor for sensing the value of the pressure at the outlet of the first positive-displacement machine and/or a temperature sensor for sensing the value of the temperature at the outlet of the first positive-displacement machine in order to control the flow of gas between the enclosed volume and the outlet of the pumping installation.

A dry pump for gases comprises a first rotor (1) comprising a first lobe portion (1A) and a first screw (16), as well as a second rotor (2) comprising a second lobe portion (2A) and a second screw (2B). A casing delimits an internal volume in which are located together the first and second screws (1B, 2B) and the first and second lobe portions (1A, 2A). Each of the first and second screws (1B, 2B) comprises a threading invariable along its length. The first and second rotors (1, 2) turn in opposite directions and are located in successive configurations. In a first configuration of the rotors, the first and second lobe portions (1A, 2A), a portion of the first screw (16), a portion of the second screw (2B) and the casing together delimit a chamber (30) which is closed. In a second configuration of the rotors, the chamber (30) has a smaller capacity than in the first configuration. In a third configuration of the rotors, the chamber (30) is displaced entirely at the first and second screws (1B, 2B) and isolated from the lobe portions.

A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

A rough-vacuum pump of dry type includes a duct formed in the stator and of which an inlet orifice is intended to be connected to at least one source of purge gas and of which at least one outlet orifice communicates with the last pumping stage communicating with the delivery and a device for injecting a heated purge gas including a heating device to at least partly heat the purge gas injected into the duct to a temperature higher than 40° C.

A dry vacuum pump has a stator (2) and two rotors (5) that are accommodated in at least one compression chamber (3) of the stator (2), the rotors (5) being configured to rotate synchronously in opposite directions so as to drive a gas to be pumped between an intake and a delivery of the vacuum pump. The rotors (5) and the compression chamber (3) of the stator (2) are coated with a nickel-phosphorus coating (11) comprising between 9% and 14% phosphorus and having a thickness greater than 20 μm, the nickel-phosphorus coating (11) having undergone a hardening heat treatment comprising a step of heating to a treatment temperature greater than 250° C. for a treatment duration greater than one hour, so as to have a hardness greater than 700 HV.