Disclosed is a system for treating exhaust fluid from semiconductor manufacturing equipment in which cleaning gases decomposed by a plastic apparatus alternately flow towards a front rotor region (a main rotor unit) and a rear rotor region (a subsidiary rotor unit) of a booster pump and then flow towards a dry pump, and thus uniformly react with process byproducts present throughout the whole area in a vacuum pump including the booster pump and the dry pump so as to improve removal efficiency of the process byproducts. Further, the retention time of the cleaning gases decomposed by the plasma apparatus in the vacuum pump is increased by adjusting the pressure in the pump with the rotational speed of a motor, and thus the reaction time of the cleaning gases with the process byproducts is increased, so as to further improve removal efficiency of the process byproducts, such as SiO.sub.2 powder.

Even when abnormal heat generation occurs during operation in a state where the temperature of a compressor is not increased, abnormality cannot be detected. A fluid machine includes a fluid machine body; a motor that drives the fluid machine body; a temperature sensor that measures a temperature of the fluid machine body; and a control unit that controls the fluid machine body. The control unit changes a temperature threshold value based on at least one of a pressure of a fluid discharged by the fluid machine body and a frequency of a voltage input into the motor, and issues a notification when the temperature of the compressor body measured by the temperature sensor exceeds the temperature threshold value.

A pump apparatus which can more accurately determine the occurrence of an abnormal vibration. The pump apparatus includes: a pump; an electric motor for driving the pump; an inverter as a speed changing means for the electric motor; a vibration detector for detecting at least one of a vibration of the pump, a vibration of the electric motor and a vibration of the inverter; and a controller for controlling the pump. The controller includes a storage unit for storing a measured vibration value measured by the vibration detector. The storage unit has a storage table which, when the rotational speed of the pump is increased stepwise to a predetermined rotational speed, stores the measured vibration value measured at each step.

The present invention provides an oil feed type air compressor that can reduce a power consumption of a compressor body during an unload operation. The oil feed type air compressor includes: a compressor body (1) compressing air while feeding an oil into a compression chamber; a separator (4) disposed on a discharge side of the compressor body; a compressed air-feeding system (5) feeding the compressed air separated by the separator to a use destination of the compressed air; an oil-feeding system (6) feeding the oil separated by the separator to the compression chamber of the compressor body; an oil cooler (11) and a temperature sensor (12) disposed in the oil-feeding system; and a controller enabling execution of a temperature control. The temperature control by the controller is performed by variably controlling a rotation speed of a cooling fan (13) such that, during the load operation, a temperature detected by the temperature sensor is a target value T1, and during the unload operation, the temperature detected by the temperature sensor is a target value T2 (with the proviso of T1>T2).

In order to reduce operation in a rotation-prohibited frequency range and to prevent resonance in a gas compressor wherein inverter control is performed, this gas compressor has: a compressor main body that compresses a gas; a motor that rotationally drives the compressor main body; an inverter that changes the rotational speed of the motor; a check valve arranged downstream from the compressor main body; a pressure detection means that detects load-side pressure downstream from the check valve; and a control device that, in accordance with the pressure detected by the pressure detection means, controls the frequency output by the inverter. The control device performs a control whereby compressed gas having a prescribed pressure is generated/maintained by increasing/decreasing the frequency, and when the frequency that generates the compressed gas having the prescribed pressure includes a specific frequency, the inverter's output frequency is increased or decreased when the pressure detected by the pressure detection means reaches a pressure corresponding to a frequency that has a more constant pressure width than the prescribed pressure and does not include the specific frequency.

A compressor includes a rotary shaft, a front rotor including a front rotor surface, an intermediate wall portion including a first wall surface opposed to the front rotor surface in an axial direction, and a vane that is inserted into a vane groove formed in the intermediate wall portion and is moved in the axial direction with rotation of the front rotor. The vane includes a first vane end that is an end in the axial direction and contacts the front rotor surface. The first vane end is curved so as to be convex toward the front rotor surface and extends in the direction perpendicular to the axial direction. The front rotor surface includes a front curving surface curved in the axial direction so as to be displaced in the axial direction in accordance with its angular position.

In order to improve a refrigerant compressor, including a compressor unit having a compressor housing and at least one compressor element that is arranged in the compressor housing, for compressing refrigerant, and further including a drive unit having a drive housing and an electric motor that is arranged in the drive housing and connector terminals that are arranged on the drive housing, for the electric motor, and further including an electronic functional unit, such that the connection between the refrigerant compressor and the electronic functional unit is achievable as simply as possible, it is proposed that the connector terminals should be provided in a housing that is arranged on the drive housing, and that an electronic functional unit which performs at least one compressor function should be provided in the housing.

An in-vehicle motor-driven compressor includes a temperature rise estimator configured to estimate a temperature rise of the diode based on an expected reverse current, an on-voltage of the diode, and a heat resistance of the diode. The in-vehicle motor-driven compressor further includes a rotation speed controller configured to set a rotation speed limit of the electric motor, based on the estimated temperature rise of the diode so that a temperature of the diode does not exceed a junction temperature of the diode even when the electric motor is stopped and the reverse current flows through the diode, and limit a rotation speed of the electric motor to lower than or equal to the rotation speed limit.

A system and method for a compressor includes a compressor connected to a condenser, a discharge line temperature sensor that outputs a discharge line temperature signal corresponding to a discharge line temperature of refrigerant leaving the compressor, and a control module connected to the discharge line temperature sensor. The control module determines a saturated condenser temperature, calculates a discharge superheat temperature based on the saturated condenser temperature and the discharge line temperature, and monitors a flood back condition of the compressor by comparing the discharge superheat temperature with a predetermined threshold. The control module increases a speed of the compressor when the discharge superheat temperature is less than or equal to the predetermined threshold.

In order to improve a refrigerant compressor, including a compressor unit having a compressor housing and at least one compressor element that is arranged in the compressor housing, for compressing refrigerant, and further including a drive unit having a drive housing and an electric motor that is arranged in the drive housing and connector terminals that are arranged on the drive housing, for the electric motor, and further including an electronic functional unit, such that the connection between the refrigerant compressor and the electronic functional unit is achievable as simply as possible, it is proposed that the connector terminals should be provided in a housing that is arranged on the drive housing, and that an electronic functional unit which performs at least one compressor function should be provided in the housing.