A vacuum exhaust apparatus capable of accurately and rapidly adjusting the pressure in an exhaust chamber and a vacuum pump used therein are provided. A vacuum pump includes a rotor that rotates to exhaust an exhaust chamber and a casing having an inlet port. A valve is located between the inlet port of the vacuum pump and an outlet port of the exhaust chamber. A controller performs control such that the pressure in the exhaust chamber matches a target value. The controller adjusts the opening degree of the valve when the absolute value of the difference between the pressure in the exhaust chamber and the target value is greater than a predetermined value, and adjusts the rotational speed of the rotor of the vacuum pump when the absolute value of the difference between the pressure in the exhaust chamber and the target value is less than the predetermined value.

A flow rate adjustment valve includes: a flow path portion which has one end at which an opening is formed, and in which a fluid flows; a lifting valve which is configured to close the opening by covering an entire region of the opening, open the opening by being separated from the opening in an opening direction of the opening, and change a distance from the opening in the opening direction to change a flow area with respect to the opening; and a servo actuator as a driver which moves the lifting valve in the opening direction based on a predetermined detection value.

A vacuum pump comprises: a rotor rotatable in a predetermined rotation direction; and a case housing the rotor; and a fixed component arranged facing an inner wall of the case. A clearance is formed between the inner wall of the case and the fixed component, and a groove allowing communication between the clearance and an exhaust path in the case is formed at either the inner wall of the case or the fixed component.

A vacuum pump comprises: a rotor rotatable in a predetermined rotation direction; and a case housing the rotor; and a fixed component arranged facing an inner wall of the case. A clearance is formed between the inner wall of the case and the fixed component, and a groove allowing communication between the clearance and an exhaust path in the case is formed at either the inner wall of the case or the fixed component.

Vacuum pump comprising a housing, a rotor shaft disposed in the housing, at least one bearing rotatably supporting the rotor shaft against the housing including an inner race in contact with the rotor shaft and an outer race in contact with the housing, and an axial spring applying an axial force onto the outer race, wherein a bearing ring is disposed between the axial spring and the outer race, the bearing ring applying a clamping force to the housing.

The present disclosure provides a vacuum pump with which size and weight reduction, improvement of workability, and cost reduction can be realized. Electrical connection between a pump main body that has a rotor supported by a magnetic bearing and a control unit that controls the drive of the pump main body is established by a flexible printed wiring board configured by printing an electric circuit on a surface of a sheet-like insulating substrate.

A silencer assembly especially designed for attachment to the exhaust port of vacuum pumps and which adapts to the pumps pressure changes to regulate the outlet flow. The silencer features a perforated housing having an inner channel which connects to the discharge port of the vacuum pump and a valve assembly having a spring-loaded ball for dynamically regulating the fluid flow through the perforated housing. Once the pressure of the flow from the pump is high enough to compress a spring by pushing on a rubber ball which acts as a valve, a channel opens inside the silencer and the air can be vented through the radially distributed perforations on the housing. As the air escapes, the noise caused by the flow is reduced.

An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

The present invention provides bearing cage retainer for a rolling element rotor bearing in a vacuum pump. The bearing cage retainer being configured to have an operational arrangement in which, at the maximum longitudinal axial displacement limit of the outer race in the direction of the retainer, the bearing cage retainer is disengaged from the bearing cage, and a failure configuration characterised by the dislocation of the bearing cage by a longitudinal axial displacement of the bearing cage relative to the outer race in the direction of the retainer and in which the bearing cage retainer engages said bearing cage and the bearing cage maintains the separation of the rolling elements within the bearing.