Provided is a pump backstream prevention structure for semiconductor fabrication equipment, including a sensor, an isolation air supply pipe, and a control unit. A time delay from a point in time at which the dry pump starts to malfunction to a point in time at which the isolation valve is closed is reduced, compared to a method of closing the isolation valve by a controller of the semiconductor fabrication equipment. Accordingly, a backstream in which particles move from the pumping pipe to the process chamber before the closing of the isolation valve is prevented.

A vacuum pump comprises an inlet flange for connecting to a vacuum chamber, where the inlet flange comprises a plurality of apertures for receiving a plurality of protruding fixing elements extending from the vacuum chamber. The protruding fixing elements comprise an enlarged retaining portion at an end remote from the vacuum chamber and a fastener receiving portion having at least one radial dimension that is smaller than a corresponding dimension of the enlarged retaining portion. A fastening mechanism is provided that comprises a plurality of slots each extending from a same side of a plurality of apertures. The fastening mechanism is configured to be rotatable between a mounting position in which the apertures are aligned with the protruding fixing elements and a sealing position in which the slots are aligned with the protruding fixing elements.

Provided are a vacuum pump and an adapter used in the vacuum pump that are capable of responding to various changes in specifications at low cost. A turbo-molecular pump includes a base, a stator blade that is provided above the base in an axial direction of a rotor, a rotor blade that is integrally attached to the rotor, a housing that is formed in a cylindrical shape, and accommodates the stator blade and is integrally attached to the base, and an adapter that is replaceable depending on a type of the stator blade, the rotor blade, or the housing, and that is detachably mounted on the base and is configured to support the stator blade in the axial direction.

A vacuum pump and a vacuum pump component are provided that achieve the efficient heat dissipation of the rotor without changing the material or structure of stator blades or rotor blades. The vacuum pump includes a casing having a gas inlet port and a gas outlet port and a rotor configured to rotate in the casing. The vacuum pump is configured to exhaust gas from the gas inlet port to the gas outlet port by rotation of the rotor. The rotor substantially has the shape of a cylinder. A purge gas flows between the inner circumference surface of the rotor and the stator column that faces at least a part of the inner circumference surface of the rotor. A projection or a groove that disturbs the flow of the purge gas is provided in the flow passage of the purge gas.

A vacuum pump and a vacuum pump component are provided that achieve the efficient heat dissipation of the rotor without changing the material or structure of stator blades or rotor blades. The vacuum pump includes a casing having a gas inlet port and a gas outlet port and a rotor configured to rotate in the casing. The vacuum pump is configured to exhaust gas from the gas inlet port to the gas outlet port by rotation of the rotor. The rotor substantially has the shape of a cylinder. A purge gas flows between the inner circumference surface of the rotor and the stator column that faces at least a part of the inner circumference surface of the rotor. A projection or a groove that disturbs the flow of the purge gas is provided in the flow passage of the purge gas.

To provide a vacuum pump suited for removal of a product deposited in a flow path of the vacuum pump, and a stator component, a discharge port, and control means that are used in the vacuum pump. A vacuum pump includes a flow path through which a gas is transferred from an inlet port toward an outlet port and removing means that removes a product deposited on an inner wall surface of the flow path. The removing means has injection holes with one ends opened at the inner wall surface of the flow path and injects the removing gas into the flow path through the injection holes.

To provide a vacuum pump suited for removal of a product deposited in a flow path of the vacuum pump, and a stator component, a discharge port, and control means that are used in the vacuum pump. A vacuum pump includes a flow path through which a gas is transferred from an inlet port toward an outlet port and removing means that removes a product deposited on an inner wall surface of the flow path. The removing means has injection holes with one ends opened at the inner wall surface of the flow path and injects the removing gas into the flow path through the injection holes.

A vacuum pump capable of removing side reaction products without overhaul is provided. The vacuum pump includes A motor for rotating a rotor, a heater capable of raising a temperature, a base spacer for holding the heater, a controller capable of controlling the heater by switching an operation mode between a normal operation mode and a cleaning operation mode, and a storage portion storing information on a set temperature relating to the heater, the storage portion stores at least first temperature information for the normal operation mode, or more specifically, set temperature information capable of using the pump without nonconformity, second temperature information for the cleaning operation mode, or more specifically, set temperature information capable of re-gasifying side reaction products generated during the normal operation mode, and the temperature represented by the second temperature information is higher than the temperature represented by the first temperature information.

A vacuum pump capable of removing side reaction products without overhaul is provided. The vacuum pump includes A motor for rotating a rotor, a heater capable of raising a temperature, a base spacer for holding the heater, a controller capable of controlling the heater by switching an operation mode between a normal operation mode and a cleaning operation mode, and a storage portion storing information on a set temperature relating to the heater, the storage portion stores at least first temperature information for the normal operation mode, or more specifically, set temperature information capable of using the pump without nonconformity, second temperature information for the cleaning operation mode, or more specifically, set temperature information capable of re-gasifying side reaction products generated during the normal operation mode, and the temperature represented by the second temperature information is higher than the temperature represented by the first temperature information.

A vacuum pump and an accessory unit of the vacuum pump for which there is no need of adjustment with respect to an operation schedule on an apparatus side, and for which version upgrade of built-in software and a change in setting data can be performed easily, are provided. In a built-in software and the like storage-portion of an optional device, new-version software and modules for updating software currently stored in a magnetic-bearing control portion, a motor driving/control portion, and a protection-function processing portion are stored. Moreover, new parameters for updating parameters currently stored in setting parameter are also stored. An application program or a parameter read out of the built-in software and the like storage-portion is sent by a user-interface processing portion to a built-in software update processing portion, and various programs and data are updated by this built-in software update processing portion.