A guide element for hydraulic fluid includes a first end surface, a second end surface, and an exterior surface connecting the first end surface to the second end surface. The first end surface includes a first chamfered opening. The second end surface includes a second opening that fluidly communicates with the first opening to define a longitudinal bore that includes a tapered section. The first chamfered opening and the tapered section are configured to guide the hydraulic fluid to facilitate transformation of a turbulent flow of the hydraulic fluid into a laminar flow of the hydraulic fluid.

The invention relates to a Coanda effect flow booster (10) for inducing a boosted flow of gas, comprising: —a main air circulation pipeline (14), —at least one injection opening that opens into the main pipeline (14), —a plurality of openings for supplying compressed motive gas, each opening configured to be connected to a source of compressed motive gas in order to supply the at least one injection opening with compressed motive gas, —at least one distribution pipeline connecting the plurality of supply openings to the at least one injection opening, —a booster profile (48) at least partially defining the at least one injection opening and forming a convex surface configured to create a Coanda effect in a flow of compressed motive gas injected through the at least one injection opening.

The invention relates to a Coanda effect flow booster (10) for inducing a boosted flow of gas, comprising: —a main air circulation pipeline (14), —at least one injection opening that opens into the main pipeline (14), —a plurality of openings for supplying compressed motive gas, each opening configured to be connected to a source of compressed motive gas in order to supply the at least one injection opening with compressed motive gas, —at least one distribution pipeline connecting the plurality of supply openings to the at least one injection opening, —a booster profile (48) at least partially defining the at least one injection opening and forming a convex surface configured to create a Coanda effect in a flow of compressed motive gas injected through the at least one injection opening.

According to the present disclosure there is provided an arrangement for influencing liquid flow, the arrangement comprising: a first section selectively configurable to provide a vortex generator surface to induce vortices in the liquid flow. The arrangement further comprises a second section, wherein the first section and second section are movable relative to one another to provide the vortex generator surface.

A conduit system for transporting gas from a gas containing chamber for processing a substrate from which semiconductor devices are formed includes a liner with a spiral vent. The conduit system utilizes a curtain of gas to prevent or reduce deposition of material onto an inner surface of the conduit transporting the gas from the gas containing chamber.

A conduit system for transporting gas from a gas containing chamber for processing a substrate from which semiconductor devices are formed includes a liner with a spiral vent. The conduit system utilizes a curtain of gas to prevent or reduce deposition of material onto an inner surface of the conduit transporting the gas from the gas containing chamber.

According to the present disclosure there is provided an arrangement for influencing fluid flow, the arrangement comprising: a first section selectively configurable to provide a vortex generator surface, the vortex generator surface comprising a series of laterally aligned projections, to induce vortices in the liquid flow.

According to the present disclosure there is provided an arrangement for influencing fluid flow, the arrangement comprising: a first section selectively configurable to provide a vortex generator surface, the vortex generator surface comprising a series of laterally aligned projections, to induce vortices in the liquid flow.

A cylinder porous cylinder, a gas flow control valve, and a mounting method for the gas flow control valve. The porous cylinder (1) includes a plurality of pipe bundles filled inside the pipe. A single flow passage is formed in each of the pipe bundles, such that a seepage passage is formed inside the pipe. The inner diameter, length and permeability of the pipe bundle are determined in advance based on a Reynolds number smaller than 2300. The porous cylinder (1) is capable of implementing a stable gas flow in a gas injection channel. The valve body (21) of the gas flow control valve (2) is provided therein with a plurality of tubular passages arranged in sequence along the horizontal direction of the valve body. The tubular passages include a pipe flow passage (24) and a plurality of seepage passages (25). The porous cylinder (1) is mounted in each of the seepage passages (25). A plurality of connection channels (221) are provided in the valve cap. One end of each of the connection channels (221) communicates with the interior of each of the tubular passages, and the other end of each of the connection channels (221) is provided respectively with a valve stem. The opening and closing of the plurality of tubular passages are controlled by the valve stem, thus regulating the output ratio of the injected gas. In addition, a mounting method for the gas flow control valve is further provided.

A cylinder porous cylinder, a gas flow control valve, and a mounting method for the gas flow control valve. The porous cylinder (1) includes a plurality of pipe bundles filled inside the pipe. A single flow passage is formed in each of the pipe bundles, such that a seepage passage is formed inside the pipe. The inner diameter, length and permeability of the pipe bundle are determined in advance based on a Reynolds number smaller than 2300. The porous cylinder (1) is capable of implementing a stable gas flow in a gas injection channel. The valve body (21) of the gas flow control valve (2) is provided therein with a plurality of tubular passages arranged in sequence along the horizontal direction of the valve body. The tubular passages include a pipe flow passage (24) and a plurality of seepage passages (25). The porous cylinder (1) is mounted in each of the seepage passages (25). A plurality of connection channels (221) are provided in the valve cap. One end of each of the connection channels (221) communicates with the interior of each of the tubular passages, and the other end of each of the connection channels (221) is provided respectively with a valve stem. The opening and closing of the plurality of tubular passages are controlled by the valve stem, thus regulating the output ratio of the injected gas. In addition, a mounting method for the gas flow control valve is further provided.