A component of a gas foil bearing, having: a plurality of material layers forming a composition gradient that defines a first coefficient of thermal expansion (CTE) and a second CTE that differs from the first CTE, wherein: the plurality of material layers include at least two dissimilar metals, plastics, or fiber filled metals or plastics, that are layered on top of each other; when the component is subject to heating, the component changes from a first shape to a second shape; and the component is a top foil.

A system that reduces the amount of contaminants that enters a process chamber or air bearing via a movable shaft is disclosed. The movable shaft includes an outer shell made from a material having a low coefficient of thermal expansion. This allows the outer shell to be heated to sufficiently high temperatures to avoid condensation of contaminants on the shaft, while minimizing any change in the diameter of the shaft, which passes through an air bearing. The shaft may also have a temperature modification device disposed adjacent to the interior surface of the outer shell. In some embodiment, the shaft may include an inner liner. An insulative layer may be provided between the inner liner and the outer shell, such that the temperature of the outer shell does not cause the inner liner to thermally expand.

A system that reduces the amount of contaminants that enters a process chamber or air bearing via a movable shaft is disclosed. The movable shaft includes an outer shell made from a material having a low coefficient of thermal expansion. This allows the outer shell to be heated to sufficiently high temperatures to avoid condensation of contaminants on the shaft, while minimizing any change in the diameter of the shaft, which passes through an air bearing. The shaft may also have a temperature modification device disposed adjacent to the interior surface of the outer shell. In some embodiment, the shaft may include an inner liner. An insulative layer may be provided between the inner liner and the outer shell, such that the temperature of the outer shell does not cause the inner liner to thermally expand.

Bearing assemblies, apparatuses, systems, and methods include bearing assemblies with bearing elements configured to accommodate axial movement.

Bearing assemblies, apparatuses, systems, and methods include bearing assemblies with bearing elements configured to accommodate axial movement.

A compressor includes a tilting pad bearing supporting a rotating shaft in a casing. The tilting pad bearing includes a bearing pad being in sliding contact with an outer circumferential surface of the rotating shaft and a pivot supporting the bearing pad in a swingable manner. The casing includes a groove portion having an annular shape recessed in the axial direction and extending in the circumferential direction, and a connection portion configured to connect an inner circumferential region of an inner side in the radial direction with respect to the groove portion to an outer circumferential region of the outer side in the radial direction with respect to the groove portion. The connection portion overlaps with the pivot as viewed from the axial direction.