A non-contact air bearing having electrostatic discharge properties may comprise: a porous media element having a bearing surface; a supply line configured supply an externally pressurize gas or fluid to the porous media; and an electrostatic dissipative porous bearing layer on the bearing surface of the porous media element; wherein the externally pressurized fluid flows through the porous media element and creates a thin film between the electrostatic dissipative layer and a substrate supported by the air bearing.

A high-precision air floating motion platform and method for wafer test, wherein the air floating motion platform includes: a base; a beam installed on the base; a sliding table configured to carry a wafer; a linear motor configured to drive the sliding table to slide along the beam; at least three sensors configured to detect a vertical straightness of the wafer; air bearings including a first air bearing, a second air bearing and a third air bearing; the air bearings being configured for suspension of the sliding table; and a compensation device configured to compensate the vertical straightness of the wafer based on a real-time data detected by the sensors.

A guide mechanism for a machine tool includes a movement member and a guide member in a form of first and second rails the movement member and the guide member relatively movable to each other. A hydrostatic pressure guide mechanism and a sliding guide mechanism are formed between the movement member and the first and second rails. The hydrostatic pressure guide mechanism includes a static pressure chamber, a seal portion sealing a periphery of the static pressure chamber, and a supply passage configured to supply a lubricating oil into the static pressure chamber.

The invention relates to a bearing device comprising a first surface and a second surface which are moveable relative to one another, wherein the first and second surfaces are separated by a bearing gap filled with a lubricant, which is a magnetorheological or electrorheological liquid, or a lubricant having a temperature dependent viscosity, or a lubricant having a controllable slip velocity. The bearing device further comprising one or more supply inlets in the first or second surface, and one or more activators embedded in the first surface or second surface and configured to locally increase a viscosity or decrease the slip velocity of the lubricant in at least one obstruction zone, thereby inhibiting a flow of the lubricant in the obstruction zone.

A hydrostatic pressure guide mechanism includes: a guide member having a smooth guide surface; a movement member having a slide surface facing the guide surface and an annular placement groove formed on the slide surface; an annular seal member (hermetically closing member) that is disposed in the placement groove and capable of hermetically contacting with the guide surface; an oil supply structure configured to supply an oil into a static pressure pocket on the slide surface surrounded by the seal member; and an oil recovery structure configured to recover the oil from the static pressure pocket, in which the oil recovery structure has a recovery hole that is formed in the static pressure pocket and is opened on the slide surface.

A support table, a method of loading a substrate, a lithographic apparatus and a method of manufacturing a device using a lithographic apparatus are disclosed. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a bottom surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localized build-up of pressure within the recess. The localized build-up of pressure provides a localized gas cushioning effect during the lowering of the substrate,

A throttle unit is equipped with a grooved block including at least one minute groove formed on a plane surface, and an opposite block having a plane surface which is opposite to the minute groove. The grooved block and the opposite block are detachably joined so as to be opposite to each other. A throttle fluid path is formed by the minute groove and the plane surface of the opposite block. At least one surface of each of the minute groove is constituted by a curved surface or an inclined surface that is inclined with respect to the plane surface of the grooved block.

The air bearing includes a main body part having a bearing surface opposed to a guide face, first and second flow path parts, which are provided in the main body part, for allowing compressed air supplied from outside to flow, an air supply hole, which is provided in the flow path part, for supplying compressed air to the guide face to form an air film between the bearing surface and the guide face, and a negative pressure generating part, which is provided in the second flow path part intersecting with the first flow path part, for generating a negative pressure for sucking air between the guide face and the main body part by increasing the flow velocity of the compressed air.

A linear compressor includes a cylinder that defines a compression space of a refrigerant and has a cylindrical shape, and a piston disposed in the cylinder and reciprocating along an axis of the cylinder. The cylinder includes a supply port radially passing through the cylinder, and a recess formed on an inner circumferential surface of the cylinder and communicating with the supply port. The supply port includes a first supply port and a second supply port disposed in a rear of the first supply port, and the recess includes a first recess and a second recess disposed in a rear of the first recess. The first recess and the second recess are formed in different shapes.

An aerostatic bearing includes a base having a foundation layer and a plurality of ventilation bodies protruding from the foundation layer, the ventilation bodies being made of a porous material; and a sealing layer covering the base and revealing at least one of the ventilation bodies.