The motion system for a CMM includes a measuring axis with an air bearing, a control unit for determining a position of the measuring probe in a reference frame and outputting the position as a measuring result. The first air bearing includes a guideway, slide having a slide surface and a gas outlet within the slide surface. The gas outlet is for providing a gas cushion in a gap between the slide surface and the guideway. A cover is arranged around the slide so a gap is provided between the cover and the guideway and a hollow space is provided between the cover and the slide. A wiper is arranged on the cover. A nozzle unit is supplied by a second gas supply line and for providing a high-pressure gas flow directed onto the guideway.

An aerostatic bearing includes a slider that is guidable on a guide surface. The slider has an inner, conical sliding surface of an inner air bearing facing the guide surface with a central compressed air supply. The conical sliding surface is attached by first joints to the central compressed air supply and by second joints to a base of the slider arranged on a side of the slider facing away from the guide surface, such that a cone angle of the conical sliding surface is variable. The conical sliding surface is surrounded by an annular sliding surface of an outer air bearing having an annular compressed air supply.

The present invention relates to improving precision in a gate-type moving device. The gate-type moving device includes: a base, a gate-type moving body that is placed on the base via an air layer and moves on the base in a non-contact state, and an air bearing that forms the air layer, wherein the gate-type moving body is comprised of two leg parts that stand on an upper surface of the base, a beam portion that connects the leg parts, and a beam-direction moving body that moves along the beam portion, the air bearing is provided at a rear surface of at least one of the leg parts, and comprises an air blowout port that opens toward an upper surface of the base and an air suction port that opens toward the upper surface of the base, and the air suction port sucks air around the air suction port.

A bearing assembly including a body defining an outer surface, an inner surface, and an aft surface is generally provided. A first inlet opening is defined through the outer surface in fluid communication with a first internal passage defined by a first internal wall. The first internal passage is in fluid communication with a first outlet opening defined through the inner surface. A second inlet opening is defined through the inner surface in fluid communication with a second internal passage defined by a second internal wall. The second internal passage is in fluid communication with a second outlet opening defined through the aft surface.

An apparatus for holding a thin substrate includes a plurality of positive pressure regions including a porous material having an upper surface and a gas flowing outward from the upper surface, the gas producing a positive pressure above the upper surface in the positive pressure regions. The apparatus includes a plurality of negative pressure regions interspersed with the plurality of positive pressure regions, the negative pressure regions exerting a holding force on a bottom surface of the thin substrate. The negative pressure regions and the positive pressure regions operate to maintain the bottom surface of the thin substrate a distance from the upper surface of the porous material in the positive pressure regions. Methods of holding a thin substrate with the apparatus are also disclosed.

An active aerostatic bearing comprises a first plate and a force actuator. The first plate has a central recess area including an orifice forming an inlet restrictor for pressurized air from a central nozzle. The pressurized air forms an air gap between a guiding surface and the first plate. The force actuator is configured to act to deform the first plate so as to change a shape of the air gap, wherein the actuator is configured to cause a conical deformation of the first plate.

A hydrostatic linear guideway includes a rail, a slider coupled to the rail, and two load blocks disposed between the rail and the slider. A load portion of each load block is spaced from the groove wall of an outer groove of the rail and has an oil chamber facing toward the groove wall of one respective outer groove of the rail, such that an oil film is formed between the rail and each load block. A bearing portion of each load block is abutted against the groove wall of an inner groove of the slider so that the two load blocks are moved synchronously with the slider. Thus, the hydrostatic linear guideway of the present invention has the oil chamber defined in each load block and does not require additional processing of the slider, achieving the purpose of reducing the difficulty of the manufacturing process.

An aerostatic bearing includes a slider that is guidable on a guide surface. The slider has an inner, conical sliding surface of an inner air bearing facing the guide surface with a central compressed air supply. The conical sliding surface is attached by first joints to the central compressed air supply and by second joints to a base of the slider arranged on a side of the slider facing away from the guide surface, such that a cone angle of the conical sliding surface is variable. The conical sliding surface is surrounded by an annular sliding surface of an outer air bearing having an annular compressed air supply.

A can bodymaker includes a housing assembly, a drive mechanism, a ram assembly, a domer assembly, and a ram body dampening assembly. The ram assembly includes an elongated ram body. The drive mechanism is operatively coupled to the ram assembly so that the drive mechanism imparts a reciprocating motion to the ram body. The ram body dampening assembly is disposed adjacent the ram body path of travel. The ram body dampening assembly includes a housing and a dampening member. The dampening member is disposed immediately adjacent the ram body path of travel.

A linear motion mechanism includes: a shaft; a base member having a through hole through which the shaft can be inserted; a static pressure bearing provided between the shaft disposed in the through hole and the base member to slidably support the shaft relative to the base member by introducing a pressurized fluid to the shaft; and an annular member provided between the static pressure bearing and the base member to elastically support the static pressure bearing.