Various embodiments of the present technology generally relate to precise rotary motion control systems. More specifically, some embodiments relate to systems, methods, and means for providing pressure to a non-contact rotary system. In some embodiments, the rotary system comprises a rotary shaft that can rotate three hundred and sixty degrees continuously. In order for the rotary system to be entirely non-contact with any surfaces of surrounding components or housing, pressure must be supplied to a rotary air bearing that floats the rotary unit above a surface. In some examples, the bottom air bearing is a vacuum preloaded (VPL) air bearing. As such, the VPL air bearing requires a supply of positive pressure and a supply of negative pressure to stabilize the rotary unit. The present technology provides a mechanism for providing pneumatic air to the air bearing without a physical connection to the rotary shaft or air bearing.

A support table, a method of loading a substrate, a lithographic apparatus and a method of manufacturing a device using a lithographic apparatus are disclosed. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a bottom surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localized build-up of pressure within the recess. The localized build-up of pressure provides a localized gas cushioning effect during the lowering of the substrate.

The invention provides a machine tool capable of expanding the slidable range of the moving unit without making the oil feeding system complicated. A machine tool in which a moving unit slides against a supporting unit with a sliding surface of the supporting unit facing a sliding surface of the moving unit, comprises a first oil groove formed on an unexposed portion of the sliding surface of the supporting unit; a second oil groove formed on an unexposed portion of the sliding surface of the moving unit; and an oil inlet formed on one of the first oil groove and the second oil groove. Lubricant fed through the oil inlet is supplied to the other of the first oil groove and the second oil groove.

A support table for a lithographic apparatus, a method of loading a substrate, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localised build-up of pressure within the recess. The localized build-up of pressure provides a localised gas cushioning effect during the lowering of the substrate.

An ultra-low profile aerostatic bearing and the method of manufacturing the same is disclosed. The aerostatic bearing comprises a substrate as a bearing housing, a hypodermic tubing and a plurality of orifices on the tubing. The method of manufacturing the aerostatic bearing includes the steps of forming the bearing housing and the hypodermic tubing and bonding the hypodermic tubing and the substrate together, and applying an encapsulation substance that encases the hypodermic tubing network and covers the substrate surface to obtain geometric accuracy and surface finish of the bearing surface by replicating the geometry and surface finish of a molding master.

An integrated system for precision actuation and support for large mobile structures, such as large telescopes, wherein an actuation is integrated on the basis of linear motors located in each of the frames that support the mobile structure on another fixed structure, the support of said frames on the fixed structure being carried out by means of hydrostatic feet. The connection between this frame and the driving structure is made via a flexible kinematic connection that permits relative movements between both (frame and structure), such that the mechanism is only affected in its operation through the small-scale deformations of the track via which it circulates, and not through the large-scale deformations of the structure.

An air-floating guide rail device includes a guide rail unit, a slider unit, and a linear motor unit. The guide rail unit includes a guide rail body and two air-floating block sets made of a material different from that of the guide rail body and each including top and side air-floating blocks. The slider unit includes a main sliding seat and two lateral sliding seats connected integrally to the main sliding seat and each having first and second guiding surfaces transverse to each other and disposed respectively adjacent to corresponding top and side air-floating blocks, and first and second air guiding passages connecting the first and second guiding surfaces to the external environment. The linear motor unit includes a stator and a mover mounted fixedly to the main sliding seat and movable relative to the stator for driving linear movement of the slider unit relative to the guide rail unit.

A T-film bearing for a vibration fixture including a bottom plate, two spaced apart middle plates positioned on the bottom plate, two spaced apart top plates positioned on the middle plates in which the middle plates and the top plates form a T-shaped linear channel for movement of a T-shaped guide member of a slip plate, and oil distribution grooves positioned on a top surface of each of the top plates and the bottom plate defining an independent pressure area, and each groove having a dedicated flow restrictor for supplying lubricating oil to the groove for lubricating reciprocating travel of the guide member within the linear channel and the slip plate on the top plates.

The disclosure relates to a machine tool. The machine tool includes machine base, guide rails, and movable main structure. The movable main structure is slidably disposed on the machine base via the guide rails, and each guide rail has bearing surfaces. The machine tool has X-axis, Y-axis, and Z-axis, the Z-axis is substantially parallel to an axis of a chuck of the machine tool, and the Y-axis is substantially parallel to a sliding direction of the movable main structure. The machine tool characterized in that: normal directions of the bearing surfaces of the guide rails are not parallel to the X-axis, the Y-axis, the Z-axis of the machine tool and a reference line that passes through the guide rails.

A magnetic gravity compensator comprises a stator (1), a rotor (2), a base (4) and an adjustment mechanism (6). The stator (1) is disposed on the base (4), and the rotor (2) is levitated with respect to the stator (1). The stator (1) comprises a central cylindrical magnet (11) that is fixed to the base (4) by the adjustment mechanism (6) and consists of at least two arc magnets (111). The adjustment mechanism (6) has a first end fixed to the base (4) and a second end securely connected to the at least two arc magnets (111). The adjustment mechanism (6) is configured to drive the at least two arc magnets (111) to synchronously move radially with respect to a central axis of the central cylindrical magnet (11) so as to change a magnetic circuit between the central cylindrical magnet (11) and the rotor (2), and thereby adjust a magnetic levitation force between the stator (1) and the rotor (2).