A processing machine includes: a static pressure bearing configured to support a drive shaft; a fluid feeder configured to output a fluid to be supplied to the static pressure bearing, in accordance with rotation of a servomotor; a sensor configured to detect a physical quantity of the fluid output from the fluid feeder; and a control unit configured to control the rotation speed of the servomotor according to the physical quantity of the fluid.

The amount of consumption of gas is reduced when the gas is expanded to be cooled by using a plurality of expansion turbines. A high-pressure expansion turbine includes: a gas supply passage through which bearing gas is supplied to a bearing portion; and a gas discharge passage through which the bearing gas which has been supplied from the gas supply passage to the bearing portion is discharged from the bearing portion. A low-pressure expansion turbine includes: a gas supply passage through which the bearing gas is supplied to a bearing portion; and a gas discharge passage through which the bearing gas which has been supplied from the gas supply passage to the bearing portion is discharged from the bearing portion. The bearing gas discharged from the gas discharge passage of the high-pressure expansion turbine is supplied to the gas supply passage of the low-pressure expansion turbine.

An apparatus for holding a thin substrate includes a plurality of positive pressure regions including a porous material having an upper surface and a gas flowing outward from the upper surface, the gas producing a positive pressure above the upper surface in the positive pressure regions. The apparatus includes a plurality of negative pressure regions interspersed with the plurality of positive pressure regions, the negative pressure regions exerting a holding force on a bottom surface of the thin substrate. The negative pressure regions and the positive pressure regions operate to maintain the bottom surface of the thin substrate a distance from the upper surface of the porous material in the positive pressure regions. Methods of holding a thin substrate with the apparatus are also disclosed.

An airfoil journal bearing includes a bearing housing having a hollow portion in which a rotor is disposed, and formed such that width-wise both sides are opened; a bump foil provided at an inner side of the bearing housing and formed in the circumferential direction thereof, and coupled and fixed to the bearing housing; and a top foil provided at an inner side of the bump foil and formed along the circumferential direction thereof, and of which one side is coupled and fixed to the bearing housing. The top foil comprises: an outer top foil, an inner top foil and an intermediate top foil interposed between the outer top foil and the inner top foil.

A gantry-type positioning device includes a planar base parallel to first and second directions. Two first linear axes are arranged in the first direction, each having a first linear drive. A frame held by the first linear axes is movable in the first direction, and comprises two transverse and two longitudinal beams. The transverse beams carry second linear axes with second linear drives parallel to the second direction, so that a movable element arranged between the transverse beams is movably held by the second linear actuators. The frame is flexibly constructed such that the movable element is rotatable about a third direction which is perpendicular to the first and second directions. With respect to the third direction, the movable element is guidable by a guide surface of only one of the transverse beams serving as a guide beam for the movable element.

An air bearing includes: a main body part having a bearing surface facing a guide surface; a flow path part provided in the main body part; an air film forming part that supplies compressed air flowing through the flow path part to the guide surface to form an air film; a negative pressure generating part that sucks air between the bearing surface and the guide surface, the negative pressure generating part being provided in the flow path part; a discharge path in communication with the flow path part; and a flow rate adjusting part that adjusts a flow rate of air flowing from the flow path part to the discharge path in accordance with a compressed air pressure corresponding to a load applied to the main body part.

A compressor includes a shaft extending in axial directions thereof, an impeller secured to one end of the shaft, a first bearing action member provided at the one end of the shaft, a second bearing action member provided at an opposite end of the shaft that is opposite to the one end of the shaft, a first bearing that acts on the first bearing action member and supports the first bearing action member in one axial direction of the axial directions and in a radially inward direction of the shaft, and a second bearing that acts on the second bearing action member and supports the second bearing action member in another axial direction, which is opposite to the one axial direction, and in the radially inward direction of the shaft.

An actuator comprising a linear electrical machine (LEM) having a stator with a stator bore and a translator axially movable within the stator bore and defining a magnetic circuit airgap therebetween, at least one fluid bearing journal formed on the translator, at least one fluid bearing providing a bearing gap adjacent the translator to allow the translator to move axially within the stator bore, a preload chamber for applying a preload force to the translator, wherein the preload chamber is defined by a side wall, a first end wall and a second end wall at least part of which is movable with the translator, and wherein the bearing gap and the magnetic circuit airgap are coaxial.

The present disclosure is directed to a gas turbine engine defining a longitudinal direction, a radial direction extended from an axial centerline, and a circumferential direction. The gas turbine engine includes a compressor section, a combustion section, and a turbine section in serial flow arrangement along the longitudinal direction. The gas turbine engine includes a low speed turbine rotor including a hub extended along the longitudinal direction and radially within the combustion section; a high speed turbine rotor including a high pressure (HP) shaft coupling the high speed turbine rotor to a HP compressor in the compressor section; and a first turbine bearing disposed radially between the hub of the low speed turbine rotor and the HP shaft. The HP shaft extends along the longitudinal direction and radially within the hub of the low speed turbine rotor. The high speed turbine rotor defines a turbine cooling conduit extended within the high speed turbine rotor. The first turbine bearing defines an outer air bearing along an outer diameter of the first turbine bearing and adjacent to the hub of the low speed turbine rotor. The first turbine bearing defines an inner air bearing along an inner diameter of the first turbine bearing and adjacent to the HP shaft. The first turbine bearing further defines a cooling orifice adjacent along the longitudinal direction to the turbine cooling conduit of the high speed turbine rotor. The cooling orifice and the turbine cooling conduit are in fluid communication.

In one an exemplary aspect of the present disclosure, an engine includes a drive shaft; an electric machine including a stator assembly and a rotor assembly, the rotor assembly rotatable relative to the stator assembly; and an electrical break, the drive shaft coupled to the rotor assembly through the electrical break.