A method for constructing an active magnetic bearing controller based on a look-up table method includes: building finite element models of an active magnetic bearing to obtain two universal Kriging prediction models in X-axis and Y-axis directions about actual suspension forces being in association with actual displacement eccentricities and actual control currents in the X-axis and Y-axis directions of the active magnetic bearing based on a universal Kriging model; creating two model state tables in the X-axis and Y-axis directions about the actual suspension forces being in association with the actual displacement eccentricities and the actual control currents to construct two look-up table modules with the two built-in model state tables, respectively; and constructing an active magnetic bearing controller by using two fuzzy adaptive PID controllers, two amplifier modules in the X-axis and Y-axis directions, the two look-up table modules, and two measurement modules in the X-axis and Y-axis directions.

A rolling bearing includes an inner ring, an outer ring, and a plurality of balls interposed between the inner ring and the outer ring. The inner ring and the outer ring are made of stainless steel. A raceway surface with which the ball is in rolling-contact in each of the inner ring and the outer ring and is a superfinished surface and a coating layer made of a solid lubricating film is formed on the superfinished surface.

The present invention provides a bearing cage for a rotor bearing of a turbomolecular pump. The bearing cage comprises a plurality of bearing pockets each of which, in use, houses a bearing ball such that the bearing ball operably engages an inner race and an outer race of the rotor bearing. Each bearing pocket of the bearing cage has a primary chamber for housing the bearing ball and each bearing pocket further comprises a sump.

A turbomolecular pump has a housing, a rotor shaft supported by a plurality of bearings for rotation relative to the housing about an axis of rotation, a deflector, a lubricant supply system and a lubricant transfer device provided on the rotor shaft. The bearings include a rolling bearing that receives lubricant from the lubricant supply system to via the lubricant transfer device. The rolling bearing is disposed intermediate the lubricant transfer device and the deflector and the deflector is configured to deflect lubricant that passes through the rolling bearing outwardly with respect to the rotor shaft.

Apparatuses, systems and methods are described for a flywheel system incorporating a rotor made from a high-strength material in an open-core flywheel architecture with a high-temperature superconductive (HTS) bearing technology to achieve the desired high energy density in the flywheel energy storage devices, to obtain superior results and performance, and that eliminates the material growth-matching problem and obviates radial growth and bending mode issues that otherwise occur at various high frequencies and speeds.

The present invention relates to a vacuum pump, in particular to a turbomolecular pump, having at least one pump stage and having a pressure determination unit for determining a pressure present at a suction side of the vacuum pump, said pump comprising a measurement device, with a measurement tap of the measurement device being provided in the region of the pump stage or downstream of the pump stage.

A pump bearing holder has a carrier portion configured to carry a static set of magnets of a pump magnetic bearing and a support portion extending outwardly of the carrier portion to connect with a pump casing such that the pump bearing holder spans an inlet provided in the pump housing. The support portion defines a plurality of internal through-passages that, in use, allow a gas flowing through the inlet to flow through the support portion.

A vacuum pump and a temperature control device are capable of preventing, with a simple configuration, overheating and overcooling of a pump that are caused due to abnormality in a temperature sensor used to control a heater or a water-cooling solenoid valve that is provided to prevent the deposition of products. Problems such as overheating and overcooling of a heater can be avoided in a case where a temperature sensor system fails and consequently the measured temperature continues to be constant between the upper limit and the lower limit. TMS function controls the measured temperature of the temperature sensor to a target temperature. Thus, if an application such as a target to be heated or a heater capacity is identified, the same cycles of turning ON/OFF of the heater or the water-cooling solenoid valve are repeated, and the upper limit of the time in which the ON/OFF state is sustained continuously is determined. An allowed time considering a margin is provided for this upper limit, and the ON/OFF state is changed so that the ON state or the OFF state is not continuously sustained beyond the allowed time.

An electromagnet unit, a magnetic bearing device, and a vacuum pump with which displacement of a rotating body in a radial direction can be detected with precision. An upper electromagnet unit includes: radial electromagnets for supporting a rotor in a radial direction without contact; radial sensors for detecting displacement of the rotor in the radial direction; and a core around which coils are wound. Two radial electromagnets that are adjacent to each other in a circumferential direction of the core are disposed such that adjacent magnetic poles belonging respectively to the two radial electromagnets are homopolar, and a low magnetic flux interference region is formed between the two radial electromagnets. Each of the radial sensors is disposed in the low magnetic flux interference region.

A magnetic levitation control device comprises: a control signal generation section configured to generate a first excitation current control signal based on current deviation information on the excitation current detection signal with respect to the current setting signal and a second excitation current control signal based on the current setting signal; and a selection section including a first switching section configured to select either one of the first excitation current control signal or the second excitation current control signal or a second switching section configured to select either one of a third excitation current control signal obtained by summation of the first excitation current control signal and the second excitation current control signal or the second excitation current control signal. The excitation amplifier is PWM-controlled based on the excitation current control signal selected by the selection section.