Disclosed is a hermetically sealed assembly for precompression of a martinsetic metal for use in negative pressure energy transfer systems, and method of making same. The assembly comprising a martinsetic metal disposed between and in contact with flanged sapphire windows, the flanges defining an open area therebetween to accommodate expansion and contraction of the martinsetic metal. Hermetic sealing means include a bellows element, which can comprise a convoluted cross section, at the periphery of the assembly to enable operation over temperature ranges from ambient to cryogenic without loss of integrity or leakage.

A flexible metal seal assembly for isolating one or more fluids in an operative region of a machine comprises a first flexible metal seal and a second flexible metal seal arranged in series, allowing the additional exertion of a spring bias. The inner surface of the first flexible metal seal is restrainably and hermetically attached to the outer surface of a metallic coupler, while the outer surface of the second flexible metal seal is restrainably and hermetically attached to the inner surface of the metallic coupler. Amongst other applications, the assembly may be used in a valve seal, or in an engine fuel pump, where it serves to isolate lubricating oil from fuel, or one fluid from a region, where one fluid may be present on an actuator that reciprocates within the second flexible metal seal or outside of the first flexible metal seal.

In a diaphragm bellows, diaphragms that follow one another are welded together alternately in region of their inner and outer edges. At least one guide part is provided for guiding on a surface of a rod passing through an inner through-opening in the diaphragm bellows or of a tube surrounding the diaphragm bellows. The at least one guide part is made of sheet metal and has a holding portion which, in the case of guiding on a rod, is located, in a region of an outer edge, between adjacent diaphragms and is welded to the adjacent diaphragms and, in the case of guiding on a tube, is located, in the region of an inner edge, between adjacent diaphragms and is welded to the adjacent diaphragms. The holding portion is connected to a guide portion for guiding on the surface of the rod or of the tube.

A vacuum chuck has at least one suction assembly that pulls a wafer surface toward a chucking surface. The suction assembly may be used with a wafer that is warped. A suction force engages a pad of a suction assembly with the wafer surface and retracts a bellows of the suction assembly. As the bellows retracts and draws the wafer surface closer to the chucking surface, the suction force provided by the vacuum chuck can pull the wafer flat.

A bellows system includes a first bellows segment having a first end and a second end, the first bellows segment configured to elastically compress and expand. A first plate is coupled to the second end of the first bellows segment and a first sleeve is concentric with the first bellows segment, the first bellows segment disposed within the first sleeve. A second bellows segment has a third end and a fourth end. The second bellows segment is configured to elastically compress and expand, and the third end of the second bellows segment is coupled to the first plate. A second sleeve is coupled to the first plate. The second sleeve is concentric with the second bellows segment and the first sleeve, and the second bellows segment is disposed within the second sleeve. The second sleeve is configured to travel within the first sleeve.

A bellows system includes a first bellows segment having a first end and a second end opposite the first end. The first bellows segment is configured to elastically compress and expand. A first plate is coupled to the second end of the first bellows segment. The bellows system includes a second bellows segment having a third end and a fourth end opposed the third end. The second bellows segment is configured to elastically compress and expand. The third end of the second bellows segment is coupled to the first plate opposite the first bellows segment. A second plate is coupled to the fourth end of the second bellows segment. A plurality of guide rods are coupled to the second plate and extend through the first plate. The first plate is free to slide along the plurality of guide rods.

The invention provides a metal bellows type accumulator having an outer shell provided in its one end with a pressure introducing passage in an opening manner, an axially expandable metal bellows including peak portions directed to an outer side in a radial direction and trough portions directed to an inner side alternately in an axial direction, having an axially fixed end to the outer shell and separating an inner chamber of the outer shell into a pressure introducing chamber and a gas chamber charged with cushion gas, and a support member arranged in an inner periphery of the metal bellows, fixed to the outer shell and constructed by a cushioning member. A clearance in a radial direction between the trough portions of the metal bellows and the support member is smaller than a clearance in a radial direction between the peak portions of the metal bellows and the outer shell.

The invention provides a metal bellows type accumulator having an outer shell provided in its one end with a pressure introducing passage in an opening manner, and a metal bellows repeatedly formed peak portions directed to an outer side in a radial direction and trough portions directed to an inner side, capable of expanding and contracting in an axial direction and separating an inner chamber of the outer shell into a pressure introducing chamber communicated with the pressure introducing passage and a gas chamber charged with cushion gas. A tubular portion is provided at a position where an amplitude of vibration in a radial direction becomes maximum in the metal bellows, has a greater diameter than a maximum diameter portion of each of the peak portions and is in contactable with an inner peripheral surface of the outer shell at a predetermined width in the axial direction.

A seal has: a metallic substrate; and a coating layer, The coating layer has in atomic percent of all metals in the coating layer: 6.5 to 22.0 Al; 14.0 to 23.0 Fe; 14.0 to 23.0 Co; 14.0 to 23.0 Cr; 14.0 to 23.0 Mn; and 14.0 to 23.0 Ni. The coating may be applied by high velocity oxy-fuel (HVOF) spray.

A metal bellows (110) for an accumulator (100) into which a hydraulic fluid is drawn in, has a bellows-shape in which ridge fold portions (110a) and valley fold portions (110b) are formed repeatedly with slope portions (110c) in between, wherein two of the slope portions (110c) that are adjacent to each other via a common ridge fold portion (110a) have: first slope portions (110c1) which extend from the common ridge fold portion (110a) and second slope portions (110c2) each of which extends from each of the first slope portions (110c1) such that a distance therebetween becomes much greater than the first slope portions (110c1) as the second slope portions (110c2) extend toward the adjacent valley fold portions (110b), wherein the first slope portion (110c1) and the second slope portion (110c2) are connected at an inflection point (P).