Patent classifications
F16K1/52
Method of manufacturing a fluid pressure reduction device
A method of custom manufacturing a fluid pressure reduction device for use in a process control valve. The method includes creating the fluid pressure reduction device using an additive manufacturing technique, which generally includes forming a body and forming a plurality of flow paths in the body. The body has an inner wall and an outer wall spaced radially outward of the inner wall. The flow paths are formed in the body between the inner wall and the outer wall of the body. Each of the flow paths includes an inlet aperture, an outlet aperture, and an intermediate section extending between the inlet and outlet apertures. At least a portion of the intermediate section extends in a substantially vertical direction that is substantially parallel to the longitudinal axis, such that the flow paths are able to utilize previously un-used space in the device.
Method of manufacturing a fluid pressure reduction device
A method of custom manufacturing a fluid pressure reduction device for use in a process control valve. The method includes creating the fluid pressure reduction device using an additive manufacturing technique, which generally includes forming a body and forming a plurality of flow paths in the body. The body has an inner wall and an outer wall spaced radially outward of the inner wall. The flow paths are formed in the body between the inner wall and the outer wall of the body. Each of the flow paths includes an inlet aperture, an outlet aperture, and an intermediate section extending between the inlet and outlet apertures. At least a portion of the intermediate section extends in a substantially vertical direction that is substantially parallel to the longitudinal axis, such that the flow paths are able to utilize previously un-used space in the device.
Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.
Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.
Heat exchanger valve
A heat exchanger valve includes a housing (2) having an inlet, an outlet a valve seat (5) on a valve seat member (24) between inlet and outlet, a valve element cooperating with the valve seat (5) and having a valve element axis, and presetting mechanism having a bushing (9) which is rotatable around the valve element axis and has an opening arrangement cooperating with a counter passage in the housing (2), wherein in the region of the opening arrangement the bushing (9) has a conical form cooperating with a conical counter face (13) and a distance is provided between the bushing (9) and the valve seat member (24). Such a heat exchanger valve should allow a precise pre-setting over a large range. To this end the bushing (9) has at least two notches (14) in an edge (10) facing the valve element member (24), each of the notches (14) forming an opening (25).
Seal for a flow restrictor
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on effectively sealed flow restrictors which can eliminate leakage of process gas around the flow restrictors. In one embodiment, a seal for a flow restrictor is disclosed, the seal comprising a plastic cylinder which is shrink fit onto a sealing portion of the flow restrictor. In another embodiment, a seal for a flow restrictor is disclosed, the seal having a first sealing ring with a flow aperture, a flow restrictor installed into the flow aperture.
Fuel supply valve
A fuel supply valve for supplying fuel from a fuel tank to a fuel cell stack includes: a plunger having a hollow therein, a core part disposed on the plunger, and a block part disposed within the hollow to maintain airtightness between the core part and the plunger, and a space in which the airtightness of the hollow has been maintained by the plunger, the core part, and the block part is defined as a pressure chamber.
Pressure actuated valve with shock absorber
A valve, with a valve housing, through which process medium can flow and in which a valve seat which surrounds a throughflow opening is arranged, to which valve seat a valve element which is arranged on a spindle is assigned in a manner such that the valve element by way of an actuation travel of the spindle is movable between a shut-off position, in which the valve element sealingly bears on the valve seat in a process-medium-tight manner, and an open position, in which the valve element is lifted from the valve seat, and with a fluid-actuated valve drive which includes a drive housing and a drive wall which together with the spindle forms a drive unit and which separates two working spaces from one another, of which working spaces at least one can be subjected to pressure, and with a travel limitation device which for limiting the opening travel of the spindle includes a stop element which is fastened to the drive housing and which with an end section which includes a stop surface projects into a travel limitation space, in which the drive unit can strike upon the stop surface for limiting the opening travel, the travel limitation space is constantly under atmospheric pressure and the stop element is formed by a shock absorber housing of a shock absorber.
FLOW CONTROL SMART VALVE AND FLOW CONTROL SYSTEM USING SAME
A flow control smart valve and a flow control system using the same, including an opening/closing unit disposed inside a flow path and selectively passing a fluid, and a drive unit coupled with the opening/closing unit to control a position of the opening/closing unit in the flow path.
VALVE WITH RE-MELTING EXPANSION PORT
A valve for controlling a molten liquid includes an expansion port in liquid communication with an internal volume of the valve that is filled with the molten liquid. An expansion valve can be opened during unfreezing of the valve, to allow melting process substance to expand out of the internal volume into an expansion line as it is melted. During initialization of the valve, an inert gas source, pressure regulator, and ultrasonic transition level sensor can be used to establish a liquid/gas interface at a desired height within the expansion line. The valve can include a multi-zone heater, wherein a first of the zones is adjacent the expansion port, so that during unfreezing, after the first zone has been melted, the remaining zones can be sequentially activated in an order that ensures that each zone is activated only after an adjacent zone has been melted.