F16K1/52

Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.

Noise reducing diffuser trim

A fluid valve includes a valve body having a fluid inlet and a fluid outlet connected by a fluid passageway. A valve seat is disposed within the fluid passageway. A fluid control member is movably disposed within the fluid passageway, the fluid control member cooperating with a trim assembly to control fluid flow through the fluid passageway. The trim assembly includes a cage having a plurality of openings that characterize fluid flowing through the cage and a plurality of vents that suppress noise generated by the plurality of openings.

Noise reducing diffuser trim

A fluid valve includes a valve body having a fluid inlet and a fluid outlet connected by a fluid passageway. A valve seat is disposed within the fluid passageway. A fluid control member is movably disposed within the fluid passageway, the fluid control member cooperating with a trim assembly to control fluid flow through the fluid passageway. The trim assembly includes a cage having a plurality of openings that characterize fluid flowing through the cage and a plurality of vents that suppress noise generated by the plurality of openings.

Pressure Control Characteristic - Diaphragm
20220307611 · 2022-09-29 ·

Gas flow control valve 3, wherein the gas flow control valve 3 comprises a housing 11 with a gas inlet 10, a valve seat 6 arranged in the housing 11, a valve body 5 assigned to the valve seat 6, wherein the valve body 5 is held by an upper spring and a lower spring and is centered by means of a diaphragm 26, and a gas outlet 12 which is positioned downstream of the valve body 5 and which is provided in the housing 11, wherein the valve body 5 is arranged in the valve seat 6 so as to be movable in a first movement direction 17 in order to form a controllable cross section of a passage opening 25 for the passage of gas, wherein an inversion of the diaphragm 26 is prevented by means of a support element 27.

Pressure Control Characteristic - Diaphragm
20220307611 · 2022-09-29 ·

Gas flow control valve 3, wherein the gas flow control valve 3 comprises a housing 11 with a gas inlet 10, a valve seat 6 arranged in the housing 11, a valve body 5 assigned to the valve seat 6, wherein the valve body 5 is held by an upper spring and a lower spring and is centered by means of a diaphragm 26, and a gas outlet 12 which is positioned downstream of the valve body 5 and which is provided in the housing 11, wherein the valve body 5 is arranged in the valve seat 6 so as to be movable in a first movement direction 17 in order to form a controllable cross section of a passage opening 25 for the passage of gas, wherein an inversion of the diaphragm 26 is prevented by means of a support element 27.

Pressure Control Characteristic - Inlet Path
20220307610 · 2022-09-29 ·

Gas flow control valve 3, wherein the gas flow control valve 3 comprises a housing 11 with a gas inlet 10, a valve seat 6 arranged in the housing 11, a valve body 5 assigned to the valve seat 6, wherein the valve body 5 is held by an upper spring and a lower spring and is centered by means of a diaphragm 26, and a gas outlet 12 which is positioned downstream of the valve body 5 and which is provided in the housing 11, wherein the valve body 5 is arranged in the valve seat 6 so as to be movable in a first movement direction 17 in order to form a controllable cross section of a passage opening 25 for the passage of gas, wherein an inlet path 19, such as an inlet path 19 that is uniform in a flow direction, in particular a hollow cylindrical inlet path 19, is formed on the valve seat 6 upstream of the passage opening 25.

Pressure Control Characteristic - Inlet Path
20220307610 · 2022-09-29 ·

Gas flow control valve 3, wherein the gas flow control valve 3 comprises a housing 11 with a gas inlet 10, a valve seat 6 arranged in the housing 11, a valve body 5 assigned to the valve seat 6, wherein the valve body 5 is held by an upper spring and a lower spring and is centered by means of a diaphragm 26, and a gas outlet 12 which is positioned downstream of the valve body 5 and which is provided in the housing 11, wherein the valve body 5 is arranged in the valve seat 6 so as to be movable in a first movement direction 17 in order to form a controllable cross section of a passage opening 25 for the passage of gas, wherein an inlet path 19, such as an inlet path 19 that is uniform in a flow direction, in particular a hollow cylindrical inlet path 19, is formed on the valve seat 6 upstream of the passage opening 25.

PRESSURE CONTROL CHARACTERISTIC - BYPASS
20220307609 · 2022-09-29 ·

Gas flow control valve 3, wherein the gas flow control valve 3 comprises a housing 11 with a gas inlet 10, a valve seat 6 arranged in the housing 11, a valve body 5 assigned to the valve seat 6, wherein the valve body 5 is held by an upper spring and a lower spring and is centered by means of a diaphragm 26, and a gas outlet 12 which is positioned downstream of the valve body 5 and which is provided in the housing 11, wherein the valve body 5 is arranged in the valve seat 6 so as to be movable in a first movement direction 17 in order to form a controllable cross section of a passage opening 25 for the passage of gas, wherein at least one bypass geometry 28, such as multiple bypass geometries at uniform intervals around a circumference, is/are formed on the valve seat 21 at the boundary region with respect to the passage opening.

PRESSURE CONTROL CHARACTERISTIC - BYPASS
20220307609 · 2022-09-29 ·

Gas flow control valve 3, wherein the gas flow control valve 3 comprises a housing 11 with a gas inlet 10, a valve seat 6 arranged in the housing 11, a valve body 5 assigned to the valve seat 6, wherein the valve body 5 is held by an upper spring and a lower spring and is centered by means of a diaphragm 26, and a gas outlet 12 which is positioned downstream of the valve body 5 and which is provided in the housing 11, wherein the valve body 5 is arranged in the valve seat 6 so as to be movable in a first movement direction 17 in order to form a controllable cross section of a passage opening 25 for the passage of gas, wherein at least one bypass geometry 28, such as multiple bypass geometries at uniform intervals around a circumference, is/are formed on the valve seat 21 at the boundary region with respect to the passage opening.

VACUUM VALVE
20170268680 · 2017-09-21 ·

A vacuum valve improving product performance of a packing ring to extend a replacement period of the packing ring is disclosed. As an opening and closing driving guide groove including a protruding groove section and first and second inclined groove sections is defined in each of both side surfaces of a driving block, and an L-motion roller inserted into and moving along the opening and closing driving guide groove is provided on an L-motion block, when the L-motion roller is disposed at an end of the first inclined groove section, one side surface of a valve blade closes an inlet, and when the L-motion roller is disposed at an end of the second inclined groove section, one side surface of the valve blade closely contacts an inner surface of the housing. The packing ring provided on a closing surface of the valve blade is blocked from contacting air or fluid.