A vacuum valve improving product performance of a packing ring to extend a replacement period of the packing ring is disclosed. As an opening and closing driving guide groove including a protruding groove section and first and second inclined groove sections is defined in each of both side surfaces of a driving block, and an L-motion roller inserted into and moving along the opening and closing driving guide groove is provided on an L-motion block, when the L-motion roller is disposed at an end of the first inclined groove section, one side surface of a valve blade closes an inlet, and when the L-motion roller is disposed at an end of the second inclined groove section, one side surface of the valve blade closely contacts an inner surface of the housing. The packing ring provided on a closing surface of the valve blade is blocked from contacting air or fluid.

The present invention is a flow-rate adjustable valve for adjusting a flow rate of liquid flowing through a flow path. The flow-rate adjustable valve includes: a rotatable member; a lifter linearly movable by a rotation of the rotatable member; a valve body linearly movable by a linear movement of the lifter; a stopper configured to restrict a movable range of the lifter in a fixed state of the stopper in which a position of the stopper is not able to be changed; and a stopper-holding member configured to hold the stopper selectively in the fixed state or in a provisional fixed state in which the position of the stopper is able to be changed.

The present invention is a flow-rate adjustable valve for adjusting a flow rate of liquid flowing through a flow path. The flow-rate adjustable valve includes: a main valve body movably supported in the flow path via a diaphragm membrane; a back pressure chamber; a plurality of inlet holes communicating the upstream side of the flow path with the back pressure chamber; an outlet hole communicating a downstream side of the flow path with the back pressure chamber; and a pilot valve body for opening and closing the outlet hole, wherein moments acting on the main valve body based on the liquid flowing into the back pressure chamber through the plurality of inlet holes are canceled by each other in total, under a condition in which the pilot valve body opens the outlet hole.

In some examples, a pressure reducing valve includes a valve body defining a defining a flow path and a restricting element within the flow path. A sensing element is configured to modify a position of the restricting element in the flow path. A pressure chamber is configured to transmit a force to the sensing element based on the pressure of a fluid within the pressure chamber. An energy accumulator is in fluid communication with the pressure chamber. The pressure reducing valve includes control circuitry configured to enable a fluid to flow into or discharge from the pressure chamber to alter the pressure in the pressure chamber.

In some examples, a pressure reducing valve includes a valve body defining a defining a flow path and a restricting element within the flow path. A sensing element is configured to modify a position of the restricting element in the flow path. A pressure chamber is configured to transmit a force to the sensing element based on the pressure of a fluid within the pressure chamber. An energy accumulator is in fluid communication with the pressure chamber. The pressure reducing valve includes control circuitry configured to enable a fluid to flow into or discharge from the pressure chamber to alter the pressure in the pressure chamber.

The invention provides a valve having an elongated main body and a substantially flat area defined within the valve between its first and second ends; wherein a stopping screw is received in said flat area so as to prevent extraction of the valve from a casing by applying a force against a portion of the valve once the valve is moved a predetermined number of turns. The invention also provides a method for inhibiting the turning of a valve having the steps of installing a threaded portion of a valve in a first threaded aperture through a casing, where the first threaded aperture receives the threads of the threaded portion of the valve; and threading a screw through a second threaded aperture in an exterior of the casing, where the screw, is disposed in a position to come into direct contact with the valve after a predetermined number of turns.

Embodiments of symmetric flow valves for use in a substrate processing chamber are provided herein. In some embodiments, a symmetric flow valve includes a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes one or more axisymmetrically disposed openings; a poppet disposed in the interior volume, wherein the poppet includes a central opening and a plurality of portions configured to selectively seal the one or more axisymmetrically disposed openings of the top plate when the symmetric flow valve is in a closed position; and a first actuator coupled to the poppet to position the poppet within the interior volume in at least an open position, where the poppet is spaced apart from the top plate to allow flow through the one or more axisymmetrically disposed openings of the top plate, and the closed position.

A valve device includes: a body in which an in-flow path and an out-flow path are formed; a valve element that is configured to open and close the in-flow path and the out-flow path; a stem that is configured to move closer to and away from the body in order to cause the valve element to allow and block communication between the in-flow path and the out-flow path; a stroke adjustment portion that is configured to adjust an amount of stroke of the stem; and a displacement sensor that is configured to detect displacement of the stem.

A valve device includes: a body in which an in-flow path and an out-flow path are formed; a valve element that is configured to open and close the in-flow path and the out-flow path; a stem that is configured to move closer to and away from the body in order to cause the valve element to allow and block communication between the in-flow path and the out-flow path; a stroke adjustment portion that is configured to adjust an amount of stroke of the stem; and a displacement sensor that is configured to detect displacement of the stem.

A damper adjusting arrangement configured for regulating the flow of a gaseous fluid within a channel (5) of an extractor tubing. The damper adjusting arrangement includes a damper member pivotably arranged in the channel and coupled to a rotary control means of the damper adjusting arrangement. A first member of the rotary control means includes a resilient element, which exhibits a plurality of radially protruding first bulges being configured for engagement with a second member of the rotary control means.