A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.

A valve assembly includes a valve body defining a valve passage and a valve seat disposed within the valve body. The valve assembly also includes a valve actuator moveable between a closed position in which the valve actuator is sealed against the valve seat to close the valve passage and an open position in which the valve actuator is spaced apart from the valve seat to open the valve passage. The valve assembly includes a valve seat retainer disposed within the valve body in contact with the valve seat. The valve seat retainer is configured to impart both an axial support force and a lateral support force on the valve seat to prevent extrusion of the valve seat when the valve actuator is sealed against the valve seat in the closed position.

A valve for dispensing fluid as a bead or a dot having a housing with an internal cavity and a disposable insert positioned within the cavity of the housing having a fluid inlet, a fluid chamber, a fluid outlet and a diaphragm adjacent the fluid chamber between the fluid inlet and the fluid outlet. The replaceable insert further has a latching mechanism adjacent the diaphragm for receipt of a reciprocating actuator to actuate the diaphragm to dispense fluid from the fluid chamber.

A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.

A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.

A valve for dispensing fluid as a bead or a dot having a housing with an internal cavity and a disposable insert positioned within the cavity of the housing having a fluid inlet, a fluid chamber, a fluid outlet and a diaphragm adjacent the fluid chamber between the fluid inlet and the fluid outlet. The replaceable insert further has a latching mechanism adjacent the diaphragm for receipt of a reciprocating actuator to actuate the diaphragm to dispense fluid from the fluid chamber.

A device is disclosed comprising a diaphragm mechanism. A diaphragm mechanism comprises an enclosure defined by opposing flexible walls joined along a perimeter of the enclosure and one or more coiled springs contained entirely between the opposed flexible walls. A central, helical axis of the one or more coiled springs is disposed substantially parallel to the opposed flexible walls and arrayed in concentric spirals around a central hole or arrayed in parallel bands.

A flow rate control valve capable of eliminating an extra operation of a diaphragm spacer after a valve has become a closed state and shortening a response time is provided. It has an annular valve seat 115, a diaphragm 116 including a thin plate-shaped elastic body an outer peripheral part of which has been fixed, and a diaphragm spacer 117 located on the opposite side of the valve seat 115 with the diaphragm 116 interposed therebetween, and the annular valve seat 115, the diaphragm 116 and the diaphragm spacer 117 are coaxially disposed. And, it is structured that the annular valve seat 115 has, on its top, an inclined surface 123 inclined to the inner peripheral side, and the diaphragm 116 is displaced in a direction of the valve seat 115 and the inclined surface 123 on the top of the valve seat 115 and the diaphragm 116 abut against with no gap by pressing force of the diaphragm spacer 117.

A gas delivery system for a substrate processing system includes first and second valves, a first gas channel, and a cylinder. The first valve includes a first inlet and a first outlet. The first outlet is in fluid communication with a processing chamber of the substrate processing system. The second valve includes a second inlet and a second outlet. The cylinder defines a second gas channel having a first end and a second end. The cylinder is at least partially disposed within the first gas channel such that the cylinder and the first gas channel collectively define a flow channel. The flow channel is in fluid communication with the first end of the second gas channel and with the first inlet. A third gas channel is in fluid communication with the second end of the second gas channel and with the second inlet.

A gas supply system includes: a first flow channel connecting a first gas source and a chamber; a second flow channel connecting a second gas source and the first flow channel; a control valve, provided in the second flow channel, configured to control a flow rate of the second gas; an orifice provided downstream of the control valve and at a terminus of the second flow channel; a switching valve, provided at a connection point between the first flow channel and the terminus of the second flow channel, configured to control a supply timing of the second gas; an exhaust mechanism, connected to a flow channel between the control valve and the orifice in the second flow channel, configured to exhaust the second gas; and a controller configured to bring the control valve, the switching valve and the exhaust mechanism into operation.