A diaphragm valve and a flow rate control device for a semiconductor manufacturing apparatus are configured so as to allow an increase of a valve flow rate while avoiding an increase in size of the valve. The diaphragm valve includes a diaphragm with an outer periphery being pressed and a valve seat part in a valve chamber of a body having an inflow path and an outflow path, with the diaphragm being configured to open and close the valve chamber by an ascending/descending motion of a stem. The diaphragm has a substantially-flat cross sectional form having a substantially-planar center region and a boundary region. The boundary region is on an outer peripheral side of the center region and has a radius of curvature smaller than that of the center region, and the boundary region is positioned near an outer peripheral side of the valve seat part.

A diaphragm-type control valve having a diaphragm and a valve body is provided preferably for use in the separation of and fluid control between a fluid source and a pressurized gas volume. The diaphragm element and a port in the body together form an intermediate chamber that eliminates the need for a check-valve downstream of the valve. In one preferred embodiment, an inner surface of the valve body defines a chamber having an inlet and an outlet in communication with the chamber, and an elongated seat member defining a groove in communication with the port. A diaphragm member having upper and lower surfaces is disposed within the chamber. The lower surface preferably includes a pair of spaced apart elongated members defining a channel therebetween. The diaphragm member engages the seat member placing the channel in communication with the groove to define an air seat in communication with the port.

A diaphragm member includes a film-shaped diaphragm made of PFA and a valve body which is laser welded to a central hole portion of the diaphragm.

A valve is provided and includes a valve body defining a pathway, a diaphragm and a wire. The diaphragm is configured to assume first or second conditions in which the diaphragm blocks or permits fluid flow through the pathway, respectively. The diaphragm is biased toward assumption of the first condition. The wire is coupled to the diaphragm. The wire has an uncontracted length in an unheated state whereby the wire permits assumption of the first condition by the diaphragm due to the bias and a contracted length in a heated state whereby the wire pulls the diaphragm toward assumption of the second condition in opposition to the bias.

Fluid control valve assemblies for use in fire protection sprinkler systems to control the flow of firefighting fluid to the system sprinklers. The assemblies include a pressure-operated fluid control valve having an internal fluid chamber in which fluid contained therein acts on an internal diaphragm to control the flow of fluid from an inlet to an outlet of the valve. An environment-responsive control device in fluid communication with the internal fluid chamber along a first fluid communication line controls the flow of fluid out of the fluid chamber to initiate actuation of the valve. A fluid-flow latch in fluid communication with the outlet of the valve along a second fluid communication line subsequently controls the simultaneous flow of fluid out of the fluid chamber and the actuation of the valve.

A method of preventing drippage in a fluid dispensing system. The fluid dispensing system includes a first automatic control valve (ACV), an input of the first ACV connected to fluid-source of fluid, the first ACV having positions ranging from fully closed to fully open, and a second ACV, an input of the second ACV being connected to an output of the first ACV, and an output of the second ACV being connected to a nozzle, the second ACV having positions ranging from fully closed to fully open. The method includes generating a first proxy signal representing at least a first indirect measure of a position of the first ACV. The method includes recognizing, based on at least the first proxy signal that a failure state exists in which the first ACV has failed to close. The method includes causing the second ACV to close when the failure state exists.

In a flow path forming structure, axial runout of a shaft relative to a central axis generated when the shaft is inserted into the flow path is suppressed. This structure includes a flow path along which a fluid passes, and a shaft body that is inserted into the flow path. An upstream side of the shaft body and an inner circumferential surface of the flow path have a plurality of contact positions at different phases, and a downstream side of the shaft body and an inner circumferential surface of the flow path have a plurality of contact positions at different phases. The fluid flows through gaps between the shaft body and the inner circumferential surface. The contact positions on one of the upstream and downstream sides are at different phases from all of the contact positions on the other one of the upstream and downstream sides.

A fluid distributor comprising: a fluid inlet, a first outlet connected to the inlet by a first fluid communication channel, a second outlet connected to the inlet by a second fluid communication channel, an actuator comprising a movable piston capable of moving between an initial position and a switched position; a first deformable diaphragm, in contact with the first end of the piston, and configured to close the first channel when the piston is in its switched position; a second deformable diaphragm, in contact with the second end of the piston, and configured to close the second channel when the piston is in its initial position.

Automatic fluid control assemblies and methods for fire protection include an arrangement of electrically operated control points, a valve body and a controller to operate the fluid control assembly. The automatic fluid control assembly has an inlet, an outlet and a valve body to control flow between the inlet and the outlet. An electric latch includes a first electrically operated control point and a second electrically operated control point in fluid communication with a control line to control the flow of fluid from the inlet to the valve body and outlet. The methods of fluid control include controlling a plurality of electrically operated control points to perform any one of: a leak test, a trip test, a flow test, a water delivery test, and a validation test of a non-trip condition and a trip condition.

A hydraulic servo-actuated valve having a valve body, an actuator and a lid is provided. The valve body has a main opening and a clamping flange arranged around the main opening. The actuator has a central actuation region and a peripheral sealing band. The lid has a central portion and a counter-clamping flange. The valve has a composite actuating duct longitudinally extending between the clamping flange and the counter-clamping flange and the composite actuating duct is obtained by joining a first element and a second element.