Provided is a diaphragm valve in which seat leak occurrence is drastically decreased. A depression 14 is provided at a radially middle part of a top of the seat 11. A first seal portion 17 is provided between a diaphragm 6 and a radially inward part 15 of the top of the seat 11. A second seal portion 18 is provided between a diaphragm 6 and a radially outward part 16 of the top of the seat 11. An outer circumferential surface 14b of the depression 14 has a cylindrical surface.

A diaphragm for a diaphragm valve comprises a base body made from an elastomer, the base body having a side facing towards the media and a side facing away from the media. A force transmission component is disposed at the base body on the side facing away from the media for the attachment of a spindle drive for a diaphragm valve. Furthermore, the base body has a reinforcement area, the reinforcement area being disposed on the outside of the base body on the side of the base body facing away from the media.

A diaphragm-type control valve having a diaphragm and a valve body is provided preferably for use in the separation of and fluid control between a fluid source and a pressurized gas volume. The diaphragm element and a port in the body together form an intermediate chamber that eliminates the need for a check-valve downstream of the valve. In one preferred embodiment, an inner surface of the valve body defines a chamber having an inlet and an outlet in communication with the chamber, and an elongated seat member defining a groove in communication with the port. A diaphragm member having upper and lower surfaces is disposed within the chamber. The lower surface preferably includes a pair of spaced apart elongated members defining a channel therebetween. The diaphragm member engages the seat member placing the channel in communication with the groove to define an air seat in communication with the port.

Provided are a diaphragm valve and a flow rate control device for a semiconductor manufacturing apparatus simply and optimally configured so as to allow a reliable increase of a valve flow rate while avoiding an increase in size of the valve due to an increase in diameter of a valve seat, an increase in stroke, or the like and also allow durability and the life of the valve to be maintained or improved. That is, a diaphragm valve includes a diaphragm with an outer periphery being pressed and a valve seat part in a valve chamber of a body having an inflow path and an outflow path, this diaphragm is provided so as to be able to open and close the valve chamber by an ascending/descending motion of a stem. This diaphragm has a substantially-flat cross sectional form having a substantially-plane center region and a boundary region, the boundary region being on an outer peripheral side of the center region and having a radius of curvature smaller than that of the center region, and the boundary region is positioned near an outer peripheral side of the valve seat part.

A hydraulic servo-actuated valve with a valve body having a first duct, a second duct, a main opening arranged on the valve body, an actuator arranged at the main opening and adapted to open and close the valve is provided. The valve has a lid arranged in an operative position on the valve body at the main opening, and the lid has a central zone concurring with the actuator to delimit an actuating chamber. The first duct has a first through-hole, and the lid has a second through-hole arranged in a position corresponding to the first through-hole, when the lid is arranged on the valve body in an operative position. The central zone of the lid also has a third through-hole. The lid has first connecting means adapted to allow a flanged and removable connection of a first operative member only to the lid, and the first connecting means is arranged near the second through-hole and the third through-hole.

A water control device includes a valve pipe section with an inlet, an outlet and a lower diaphragm valve housing with an internally disposed fluid aperture. An upper diaphragm valve housing includes an extension with an adjustment screw opening for a flow adjustment screw. A diaphragm valve assembly seals and unseals to the fluid aperture by an electric motor driven mechanical actuation fluid pressure diverter assembly. The flow adjustment screw includes a tamper proof surface that can be engaged by a flow adjustment tool. A base structure and cover protect sensitive components and are removable via a cover nut that also has a tamper proof surface. A flow turbine assembly is also removably disposed withing the valve pipe section. The entire water control device can be removed and replaced through the use of pipe stub fittings using connecting nuts to engage the inlet and outlet of the valve pipe section.

A water control device includes a valve pipe section with an inlet, an outlet and a lower diaphragm valve housing with an internally disposed fluid aperture. An upper diaphragm valve housing includes an extension with an adjustment screw opening for a flow adjustment screw. A diaphragm valve assembly seals and unseals to the fluid aperture by an electric motor driven mechanical actuation fluid pressure diverter assembly. The flow adjustment screw includes a tamper proof surface that can be engaged by a flow adjustment tool. A base structure and cover protect sensitive components and are removable via a cover nut that also has a tamper proof surface. A flow turbine assembly is also removably disposed within the valve pipe section. The entire water control device can be removed and replaced through the use of pipe stub fittings using connecting nuts to engage the inlet and outlet of the valve pipe section.

A method of preventing drippage in a fluid dispensing system. The fluid dispensing system includes a first automatic control valve (ACV), an input of the first ACV connected to fluid-source of fluid, the first ACV having positions ranging from fully closed to fully open, and a second ACV, an input of the second ACV being connected to an output of the first ACV, and an output of the second ACV being connected to a nozzle, the second ACV having positions ranging from fully closed to fully open. The method includes generating a first proxy signal representing at least a first indirect measure of a position of the first ACV. The method includes recognizing, based on at least the first proxy signal that a failure state exists in which the first ACV has failed to close. The method includes causing the second ACV to close when the failure state exists.

Automatic fluid control assemblies and methods for fire protection include an arrangement of electrically operated control points, a valve body and a controller to operate the fluid control assembly. The automatic fluid control assembly has an inlet, an outlet and a valve body to control flow between the inlet and the outlet. An electric latch includes a first electrically operated control point and a second electrically operated control point in fluid communication with a control line to control the flow of fluid from the inlet to the valve body and outlet. The methods of fluid control include controlling a plurality of electrically operated control points to perform any one of: a leak test, a trip test, a flow test, a water delivery test, and a validation test of a non-trip condition and a trip condition.

A hydraulic servo-actuated valve having a valve body, an actuator and a lid is provided. The valve body has a main opening and a clamping flange arranged around the main opening. The actuator has a central actuation region and a peripheral sealing band. The lid has a central portion and a counter-clamping flange. The valve has a composite actuating duct longitudinally extending between the clamping flange and the counter-clamping flange and the composite actuating duct is obtained by joining a first element and a second element.