A diaphragm valve includes: a valve body having flow paths of fluids formed therein and having a diaphragm-arrangement portion on one surface; a diaphragm arranged in the diaphragm-arrangement portion and can open and close the flow path and adjust the opening degree of by elastic deformation; and a driving unit having a stem for pressing the diaphragm to elastically deform and an actuator for driving the stem, wherein the stem is axially movably held via a resin sleeve by a bonnet fixed to the valve body side.

A recess 22 provided in a passage block 20; a diaphragm covering the recess 22 to form a valve chest 21 in which a fluid flows; an inflow port 23 opened at the recess 22 and allowing the fluid to flow into the valve chest 21; an NC outflow port 24 and an NO outflow port 25 opened at the recess 22 and allowing the fluid to flow out from the valve chest 21; by oscillating the diaphragm, the diaphragm is closely fitted to any one of a first valve seat 24b formed by an opening 24a of the NC outflow port 24 and a second valve seat 25b formed by an opening 25a of the second outflow port 25, to allow the fluid in the valve chest 21 to flow out from the other outflow port. The recess 22 has a first inclined portion 81 and a second inclined portion 82 having a depth gradually increasing from the first valve seat 24b and the second valve seat 25b toward the inflow opening 23.

A recess 22 provided in a passage block 20; a diaphragm covering the recess 22 to form a valve chest 21 in which a fluid flows; an inflow port 23 opened at the recess 22 and allowing the fluid to flow into the valve chest 21; an NC outflow port 24 and an NO outflow port 25 opened at the recess 22 and allowing the fluid to flow out from the valve chest 21; by oscillating the diaphragm, the diaphragm is closely fitted to any one of a first valve seat 24b formed by an opening 24a of the NC outflow port 24 and a second valve seat 25b formed by an opening 25a of the second outflow port 25, to allow the fluid in the valve chest 21 to flow out from the other outflow port. The recess 22 has a first inclined portion 81 and a second inclined portion 82 having a depth gradually increasing from the first valve seat 24b and the second valve seat 25b toward the inflow opening 23.

A diaphragm valve includes: a valve body having formed therein a first valve chamber, a second valve chamber and a communication passage communicating between the two valve chambers; a valve seat formed in the communication passage; a valve mechanism including a diaphragm supporting a valve element that comes in contact with and separates from the valve seat and a second diaphragm; a pressurizing unit being configured to pressurize the first diaphragm so as to press the valve element against the valve seat; and a bonnet for holding an outer peripheral part of the second diaphragm between the bonnet and the valve body. The pressurizing unit is configured as a single integrated unit holding therein a movable body that moves in conjunction with the valve element via a stem.

A diaphragm valve includes: a valve body having formed therein a first valve chamber, a second valve chamber and a communication passage communicating between the two valve chambers; a valve seat formed in the communication passage; a valve mechanism including a diaphragm supporting a valve element that comes in contact with and separates from the valve seat and a second diaphragm; a pressurizing unit being configured to pressurize the first diaphragm so as to press the valve element against the valve seat; and a bonnet for holding an outer peripheral part of the second diaphragm between the bonnet and the valve body. The pressurizing unit is configured as a single integrated unit holding therein a movable body that moves in conjunction with the valve element via a stem.

The seal made between two surfaces is enhanced by forming a coating, such as a self-assembled monolayer of a functionalized fluorinated macromolecule, on one or both of the surfaces.

An implantable fluid operated device may include a fluid reservoir configured to hold fluid, an inflatable member, and a pump assembly configured to transfer fluid between the fluid reservoir and the inflatable member. The pump assembly may include one or more fluid pumps and one or more valves. The one or more valves may be normally open valves, normally closed valves, or a combination thereof. One or more sensing devices may be positioned within fluid passageways of the fluid operated device. The electronic control system may control operation of the pump assembly based on fluid pressure measurements and/or fluid flow measurements received from the one or more sensing devices. Variable voltage can be applied to the control of the pump and/or the valves based on varying atmospheric conditions and the fluid pressure and/or flow measurements processed by the electronic control system.

A diaphragm valve includes a body 3 having a flow path 2 formed therein, a sheet 4 formed in the flow path 2, a metal diaphragm 5 for opening and closing the flow path 2 by abutting on or separating from the sheet 4, a pair of clamping parts 6 and 7 for claiming peripheral edge portions of both side surfaces of the metal diaphragm 5 respectively to fix the metal diaphragm 5 to the body 3, and an actuator 8 for abutting the metal diaphragm 5 on the sheet 4 or separating the metal diaphragm from the sheet 4, wherein a fluorine resin coating is formed on a sheet side surface 5a of the metal diaphragm 5 in a region excluding a clamping region D-C between the sheet side surface 5a and the clamping part 7, and at least in a contact region B-A with the sheet 4 in a region C surrounded by the clamping region D-C.

As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.