Patent classifications
F16K11/04
Safety Valve Device
A safety valve which has two fluidically interconnected safety valves, each of which has a 4/2-way valve function. Each safety valve has a first connecting port and a second connecting port, which are connected to each other in such a way that a fluid flow through the two safety valves, controlled by means of a control valve, to a fluid-actuated drive is prevented if the two safety valves simultaneously adopt a first switching position and such a fluid flow is possible if both valves simultaneously have a second switching state. One safety aspect results from the fact that the above-mentioned fluid flow is also prevented if the two safety valves adopt different switching states.
Safety Valve Device
A safety valve which has two fluidically interconnected safety valves, each of which has a 4/2-way valve function. Each safety valve has a first connecting port and a second connecting port, which are connected to each other in such a way that a fluid flow through the two safety valves, controlled by means of a control valve, to a fluid-actuated drive is prevented if the two safety valves simultaneously adopt a first switching position and such a fluid flow is possible if both valves simultaneously have a second switching state. One safety aspect results from the fact that the above-mentioned fluid flow is also prevented if the two safety valves adopt different switching states.
Valve device
A recess 22 provided in a passage block 20; a diaphragm covering the recess 22 to form a valve chest 21 in which a fluid flows; an inflow port 23 opened at the recess 22 and allowing the fluid to flow into the valve chest 21; an NC outflow port 24 and an NO outflow port 25 opened at the recess 22 and allowing the fluid to flow out from the valve chest 21; by oscillating the diaphragm, the diaphragm is closely fitted to any one of a first valve seat 24b formed by an opening 24a of the NC outflow port 24 and a second valve seat 25b formed by an opening 25a of the second outflow port 25, to allow the fluid in the valve chest 21 to flow out from the other outflow port. The recess 22 has a first inclined portion 81 and a second inclined portion 82 having a depth gradually increasing from the first valve seat 24b and the second valve seat 25b toward the inflow opening 23.
Valve device
A recess 22 provided in a passage block 20; a diaphragm covering the recess 22 to form a valve chest 21 in which a fluid flows; an inflow port 23 opened at the recess 22 and allowing the fluid to flow into the valve chest 21; an NC outflow port 24 and an NO outflow port 25 opened at the recess 22 and allowing the fluid to flow out from the valve chest 21; by oscillating the diaphragm, the diaphragm is closely fitted to any one of a first valve seat 24b formed by an opening 24a of the NC outflow port 24 and a second valve seat 25b formed by an opening 25a of the second outflow port 25, to allow the fluid in the valve chest 21 to flow out from the other outflow port. The recess 22 has a first inclined portion 81 and a second inclined portion 82 having a depth gradually increasing from the first valve seat 24b and the second valve seat 25b toward the inflow opening 23.
Fluid control device
A fluid control device includes: a valve body accommodating chamber having an inner space divided into a first chamber and a second chamber by a first valve body; a receiving port, which opens to the first chamber and through which a fluid from an accumulator is received in the first chamber, and a discharge port, which opens to the first chamber and through which the fluid is discharged from the first chamber; a guide path guiding the fluid from the accumulator to the second chamber such that the first valve body moves to a valve-closed position to close the discharge port; a second valve body switchable between a state of maintaining pressure of the fluid guided to the second chamber and a state of releasing the pressure; and a bias member biasing the first valve body to the valve-closed position.
Fluid control device
A fluid control device includes: a valve body accommodating chamber having an inner space divided into a first chamber and a second chamber by a first valve body; a receiving port, which opens to the first chamber and through which a fluid from an accumulator is received in the first chamber, and a discharge port, which opens to the first chamber and through which the fluid is discharged from the first chamber; a guide path guiding the fluid from the accumulator to the second chamber such that the first valve body moves to a valve-closed position to close the discharge port; a second valve body switchable between a state of maintaining pressure of the fluid guided to the second chamber and a state of releasing the pressure; and a bias member biasing the first valve body to the valve-closed position.
Fluid distribution valve
The invention relates to a fluid distribution valve (1, 25, 29, 37, 43), comprising at least a first fluid port (2), a second fluid port (3) and a third fluid port (4). These ports are connecting to a fluid distribution chamber (5). The second fluid port (3) can be selectively connected to the first fluid port (2) and/or the third fluid port (4) through said distribution chamber (5). The second fluid port (3) is arranged between the first fluid port (2) and the third fluid port (4).
Fluid distribution valve
The invention relates to a fluid distribution valve (1, 25, 29, 37, 43), comprising at least a first fluid port (2), a second fluid port (3) and a third fluid port (4). These ports are connecting to a fluid distribution chamber (5). The second fluid port (3) can be selectively connected to the first fluid port (2) and/or the third fluid port (4) through said distribution chamber (5). The second fluid port (3) is arranged between the first fluid port (2) and the third fluid port (4).
Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.
Valve unit and a fluid working machine comprising a valve unit
A valve unit for regulating the flow of working fluid between a working chamber of a fluid working machine and both a first working fluid line and second working fluid line, the valve unit comprising: a first valve comprising a first valve member and one or more cooperating first valve seats, a second valve comprising a second valve member and one or more cooperating second valve seats, an actuator coupled to both the first and second valve members through which a force may be applied to urge the first valve member open or closed and to urge the second valve member open or closed, a coupling between the actuator and the first valve member, wherein the coupling between the actuator and the first valve member comprises a connector which extends at least partially through the second valve member.