The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

A valve includes a valve housing defining at least one first opening and at least one second opening, the valve housing enclosing a valve chamber. An actuator with a positioning element is configured for opening or closing the valve. Also provided are at least one air mass measuring device for measuring an air mass flowing through the valve or at least one measuring wire of an air mass measuring device for measuring an air mass flowing through the valve. A valve arrangement and a seat comfort system are also disclosed.

A process fluid-flow control device comprising: an inlet, an outlet, an actuation mechanism and a diaphragm; wherein: the diaphragm is in direct operational communication with the outlet and/or the inlet; the mechanism comprises a driving piezoelectric component, and the device is configured to allow: employing the driving piezoelectric component to adjust force exerted on the diaphragm and thereby regulating flow of the process fluid through the device within a first rate range.

A valve includes a valve housing defining at least one first opening and at least one second opening, the valve housing enclosing a valve chamber. An actuator with a positioning element is configured for opening or closing the valve. Also provided are at least one air mass measuring device for measuring an air mass flowing through the valve or at least one measuring wire of an air mass measuring device for measuring an air mass flowing through the valve. A valve arrangement and a seat comfort system are also disclosed.

A fluidic control valve configured to control a flow of fluid through a conduit includes a piezostack actuator, a seal plate having a sealing face, an orifice plate including a plurality of orifices, and a suspension connected to the seal plate. The piezostack actuator is configured to displace the seal plate along a longitudinal axis of the conduit between a closed position, in which the sealing face engages the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the orifice plate to open the valve. The suspension is configured to flex and adjust an orientation of the sealing face relative to the orifice plate during movement of the seal plate from the open position to the closed position.

A fluid bladder valve for a pneumatic vehicle seat adjustment device is disclosed. The valve comprises a first chamber configured to connect to a fluid source, a second chamber configured to connect to the fluid bladder, a third chamber configured to connect to an environment, a fourth chamber connected to the first chamber via a first fluid passage, connected to the second valve chamber via a second fluid passage, and connected to the third valve chamber via a third fluid passage; and an actuator comprising a blocking element disposed in the fourth chamber and an actuator element disposed in the third valve chamber and coupled to the blocking element and configured to move the blocking element between a first position wherein the first passage is opened and the third passage is closed, and a second position wherein the first passage is closed and the third passage is opened.

A control valve includes a casing, a valve body, and a seal cylindrical member. The casing includes an inlet and an outlet. The valve body is rotatably disposed inside the casing and includes a circumferential wall portion in which a valve hole that allows the inside and outside to communicate is formed. The seal cylindrical member includes one end portion which communicates with a downstream side of an outlet and the other end portion on which a valve sliding contact surface is provided. In the other end portion of the seal cylindrical member, a protrusion height changes continuously in a circumferential direction along a shape of an outer circumferential surface of the circumferential wall portion. A thick portion which is thicker compared to other portions is provided in a region of the other end portion of the seal cylindrical member at which the protrusion height is high.

A motor-less pump includes: (a) a housing having an inlet provided to allow fluid flow into the housing and an outlet provided to allow fluid flow out of the housing; (b) an elastic diaphragm positioned in the housing such that motion in the elastic diaphragm drives the fluid flows at the inlet and the outlet of the housing; and (c) one or more electromechanical polymer (EMP) actuators each being provided on a surface of the elastic diaphragm, wherein the mechanical responses to electrical stimuli applied on the EMP actuators cause the motion in the diaphragm. The EMP actuators may include one or more bimorphs.

A piezoelectric ring bender servo valve assembly reduces mechanical wear by removing mechanical components used in prior art servo valves. The assembly does not use torque motor, flapper, and feedback spring. In this manner, no moving parts are required, which reduces maintenance and costs. A pair of piezoelectric ring benders mount adjacently to a pair of nozzles. The piezoelectric ring benders independently regulate the flow of fluid through the nozzles by moving between an open position to enable flowage, and a closed position to restrict flowage. A linear position sensing device measures and provides feedback about the spool position to a valve controller. The valve controller allows the spool valve to move until valve position achieves command position and the force on the spool valve is in equilibrium with pressure difference across spool valve. An H-bridge operable to switch the polarity of a differential pressure applied across to a load.

A microfluidic valve formed in a body having a first and a second surface; an inlet channel extending in the body from the second surface; a first transverse channel extending in the body in a transverse direction with respect to the inlet channel; and an outlet channel extending in the body from the first surface. The inlet channel, the first transverse channel and the outlet channel form a fluidic path. The microfluidic valve further has an occluding portion, formed by the body and extending over the transverse channel; and a piezoelectric actuator coupled to the occluding portion and configured to move the occluding portion from an opening position of the valve, where the occluding portion does not interfere with the fluidic path, and a closing position of the valve, where the occluding portion interferes with and interrupts the fluidic path.