In order to provide a fluid control valve less likely to cause contamination, and a fluid control apparatus using the fluid control valve, at least any one of a valve seat member and a valve body member is one including a base body made of metal; and a resin layer that covers the surface of the base body to form a valve seat surface or a seating surface, in which the resin layer is directly chemically bonded to the base body.

In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.

A servo valve including a piezo-electric actuator, a flexible linkage, and control valves. The piezo-electric actuator is actuatable along a piezo stack axis. The flexible linkage is coupled to the piezo-electric actuator at opposite axial ends of the actuator. Control valves are disposed at laterally opposite sides of the piezo stack axis and include respective valve stems coupled to the flexible linkage. The flexible linkage may be configured to transfer motion of the piezo-electric actuator along the piezo stack axis to a motion of the valve stems along an amplification axis that is transverse to the piezo stack axis to open and close the control valves. A symmetric actuation element incorporating the piezo-electric actuator, or a different actuator, may have first and second chambers at laterally opposite sides thereof, and be electrically actuatable along an actuation axis to open and close supply and return ports to control fluid communication with respective first and second work ports of respective first and second chambers.

A diaphragm valve includes a body 3 having a flow path 2 formed therein, a sheet 4 formed in the flow path 2, a metal diaphragm 5 for opening and closing the flow path 2 by abutting on or separating from the sheet 4, a pair of clamping parts 6 and 7 for claiming peripheral edge portions of both side surfaces of the metal diaphragm 5 respectively to fix the metal diaphragm 5 to the body 3, and an actuator 8 for abutting the metal diaphragm 5 on the sheet 4 or separating the metal diaphragm from the sheet 4, wherein a fluorine resin coating is formed on a sheet side surface 5a of the metal diaphragm 5 in a region excluding a clamping region D-C between the sheet side surface 5a and the clamping part 7, and at least in a contact region B-A with the sheet 4 in a region C surrounded by the clamping region D-C.

A piezoelectric element-driven valve includes a body provided with a fluid channel and a valve seat, a valve element which opens and closes the fluid channel by being in contact with and separated from the valve seat of the body, and piezoelectric actuators which drive the valve element to open and close by means of the extension of the piezoelectric element. In the piezoelectric element-driven valve, at least two piezoelectric actuators are arranged on a straight line via a spacer which allows pulling out of wiring.

A back-pressure control valve includes a main body having an inner space, a valve element that is arranged in the inner space of the main body and has an opposing surface opposite to one surface of the inner space, a driver that moves the valve element such that a distance between the opposing surface of the valve element and the one surface in the inner space changes; and a resin coating formed on one of the one surface in the inner space and the opposing surface of the valve element, wherein the main body has a first flow path that guides a fluid to a pressure control space formed between another surface out of the one surface and the opposing surface of the valve element, and the resin coating, and a second flow path that discharges a fluid from the pressure control space.

To avoid formation of surface sag formed when an internal flow path of a valve element is processed and to ensure a maximum flow rate in a fluid control valve where a seating surface of the valve element is formed of a resin layer, in a fluid control valve that includes a valve seat, and a valve element including resin layers provided in concave grooves formed on a facing surface facing the valve seat, the valve element further includes internal flow paths whose inflow ports are opened in a back surface facing away from the facing surface and whose outflow ports are opened in portions around the concave grooves on the facing surface, and counterbored portions are formed on sides of the inflow ports of the internal flow paths.

A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.

A valve linear drive provided for connection to a valve body having a valve seat includes a drive housing, a valve closure member, an actuator, and a spring device. The valve closure member is adjustable along an adjustment axis (V) between an open position and a closed position by means of the actuator and an actuating means. The spring device urges the actuating means into the open position or into the closed position. Further, the spring device includes a plurality of springs and a receiving unit for the springs. Here, each spring has its own spring chamber formed in the receiving unit, in which the associated spring is inserted. Furthermore, a valve having such a valve linear drive is provided.