The present disclosure provides a gas flow regulating device and a mass flow controller. The gas flow regulating device includes: a valve port component, in which a first inlet channel is provided; a push rod component, in which a first through hole is provided, a push rod being provided in the first through hole, a first end surface of the push rod facing a gas outlet end of the first inlet channel, and the push rod being elastically connected with the push rod component through an elastic diaphragm; and a driving assembly configured to drive the push rod to move along a direction of approaching or leaving the first inlet channel to cause the first end surface of the push rod to be in contact with and seal or separate from the gas outlet end of the first inlet channel. In the gas flow regulating device, the structure can be simplified, the number of parts in contact with gas can be reduced, and the fault caused by the failure of a spring piece can be avoided.

A fluid control apparatus includes a block elongated in a longitudinal direction and having a predetermined width, an internal flow channel formed inside the block so as to extend in the longitudinal direction, a first control valve mounted on the block, a second control valve mounted on the block at a position downstream of the first control valve. In the fluid control apparatus, the internal flow channel has a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof and also has a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto. In addition, the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.

A metering valve has a closing member and a valve seat. The closing member is movable between a closed position on the valve seat sealing a material outlet, and an open position raised above the valve seat leaving the outlet clear. An actuating element rigidly connected to the closing member is arranged between first and second piezo-actuators at a distance from the first piezo-actuator in the closed position less than the maximum length change of the first piezo-actuator, or lies loosely thereon and at a distance from the second piezo-actuator longer than the maximum length change of the first piezo-actuator. The actuating element in the open position is arranged at a distance from the second piezo-actuator less than the maximum length change of the second piezo-actuator, or lies loosely thereon and at a distance from the first piezo-actuator greater than the maximum length change of the second piezo-actuator.

A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.

A fluidic control valve configured to control a flow of fluid through a conduit includes a piezostack actuator, a seal plate having a sealing face, an orifice plate including a plurality of orifices, and a suspension connected to the seal plate. The piezostack actuator is configured to displace the seal plate along a longitudinal axis of the conduit between a closed position, in which the sealing face engages the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the orifice plate to open the valve. The suspension is configured to flex and adjust an orientation of the sealing face relative to the orifice plate during movement of the seal plate from the open position to the closed position.

A valve arrangement for controlling gas flow. A gas block includes a gas inlet, a gas outlet, and a gas cavity fluidly connecting the gas inlet to the gas outlet. A diaphragm is configured for controlling gas flow between the gas inlet and the gas outlet. An actuator is configured to vary the position of the diaphragm so as to control the gas flow. The actuator comprises a tubular housing; a plunger positioned inside the housing and having an actuating extension extending outside of the housing and coupled to the diaphragm, the plunger configured to be slidable inside the housing; a piezoelectric body positioned inside the plunger; and a pre-loader applying force to the plunger so as to press the plunger against the piezoelectric body.

A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

Provided is a flow rate controller. The flow rate controller calculates a resistor flow rate that is a flow rate of a fluid flowing through a fluid resistor, on the basis of a first measured pressure measured by a first pressure sensor and a second measured pressure measured by a second pressure sensor; controls a second valve on the basis of a deviation of the resistor flow rate from the set flow rate; outputs a first set pressure that is a target of a pressure upstream of the fluid resistor, on the basis of the set flow rate and a second set pressure which is a target of a pressure downstream of the fluid resistor and to which a constant value is set; and controls the first valve on the basis of a deviation of the first measured pressure from the first set pressure.

A hydraulic valve (3) includes an actuation device (1, 1 a, 1 b) for a control piston (2). The valve (3) is simple, robust, and insensitive to dirt. The is an actuation device (1, 1 a, 1 b) has a flexurally rigid metal plate (5), with an outer region fixed to the housing (4) in a stationary manner. A piezoelectric actuator (6) can bend a central region of the metal plate (5); and a pressure chamber (7) is filled with a pressurized liquid during operation. The pressure chamber (7) is delimited by the housing (4), the metal plate (5), and the control piston (2). The metal plate (5) seals the pressure chamber (7), and the pressure chamber (7) acts on the control piston (2). A surface area AP of the metal plate (5) over the pressure chamber (7) is larger than the cross-sectional area A.sub.K of the control piston (2).

A first lever portion includes a first point-of-effort portion, a first fulcrum portion, and a first point-of-load portion. A second lever portion has a second point-of-effort portion, a second fulcrum portion, and a second point-of-load portion. A first point-of-effort portion is located between a first fulcrum portion and a first point-of-load portion in a direction orthogonal to an axis of a stem. A second fulcrum portion is located between a second point-of-effort portion and a second point-of-load portion in the direction orthogonal to the axis. A distance between the second fulcrum portion and the second point-of-load portion is configured longer than a distance between the second fulcrum portion and the second point-of-effort portion. The second point-of-load portion of the second lever portion is displaced toward the stem and moves the stem toward the piezoelectric element by means of displacement of the intermediate member to the second lever portion side.