A valve device allows simple flow rate control when the bulb is opened. Valve device includes: a valve body having a first flow path and a second flow path formed therein; a valve body for closing an opening of the first flow path to shut off a gateway between the first flow path and the second flow path and for opening the first flow path to communicate the first flow path and the second flow path; an operating member for moving between a closed position for closing the opening in the valve body and an open position for opening the opening; and an adjusting actuator for defining an open position of the operating member and having an electrically driven material made of a compound that deforms in response to a change in an electric field, and for changing the defined open position by deformation of the electrically driven material.

A fluid control valve can suppress heat generation when discharging charges from a piezo actuator for contraction and reduce energy necessary to drive the piezo actuator. The fluid control valve includes a piezo actuator and a drive circuit connected to the piezo actuator is adapted so that the drive circuit includes: a flyback transformer including a primary side coil connected to a DC power supply DV and a secondary side coil connected to the piezo actuator; a charge switch that is connected to the primary side coil and switched from on to off when the piezo actuator charges; a discharge switch that is connected to the secondary side coil and switched from off to on when the piezo actuator discharges; and a regenerative capacitor that is connected to the primary side coil and into which electric energy due to the discharge of the piezo actuator is regenerated.

A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

In order to provide a piezoelectric actuator and a fluid control valve that can vaporize a liquid material more effectively than a conventional arrangement, the piezoelectric actuator comprises a piezoelectric stack wherein a piezoelectric ceramic layer and an electrode layer are alternately laminated, a DC voltage application circuit that displaces the piezoelectric stack by applying a DC voltage to at least a part or whole of the piezoelectric stack, and a vibration voltage application circuit that vibrates the piezoelectric stack by applying a voltage having a predetermined frequency or above to at least a part or whole of the piezoelectric stack.

The following invention relates to a subsea actuator (16; 16) for actuating a subsea rotating component (81; 181); comprising: a first biasing element (82; 182); a motor (85; 185); a holding element (83; 100, 183) configured to receive an input force; a rotatable stem (80, 80, 250, 84; 80; 200) operatively connectable to the component; a force transmitting arrangement (84, 80, 80; 83, 84; 183, 195, 201; 84, 99, 86, 101, 83) connectable to the first biasing clement (82; 182) and the holding element (83; 100, 183); a first connection which in a first mode is configured to lock the stem (80, 80, 250, 84; 80; 200) in a rotatable engagement with the motor (85; 185) and in a second mode is configured to unlock the stem (80, 80, 250, 84; 80; 200) from the rotatable engagement with the motor (85; 185) and allow the stem (80, 80, 250, 84; 80; 200) to be influenced by the first biasing element (82; 182); wherein the first biasing element (82; 182) and the stem (80, 80, 250, 84; 80; 200) are releasably connected via the force transmitting arrangement (84, 80, 80; 83, 84; 183, 195, 201; 84, 99, 86, 101, 83), such that when the first biasing element (82; 182) and the stem (80, 80, 250, 84; 80; 200) are released from each other, the first biasing element (82; 182) is configured to be pre-tensioned to a position representing a first pre-tensioned position of the actuator (16; 16) without operating the stem (80, 80, 250, 84; 80; 200); the holding element (83; 100, 183) is configured to exert a holding force on the force transmitting arrangement (84, 80, 80; 83, 84; 183, 195, 201) and the first biasing element (82; 182) in the first pre-tensioned position; and wherein, when the first biasing element (82; 182) and the stem (80, 80, 250, 84; 80; 200) are connected and the first biasing element (82; 182) is pre-tensioned, the first connection is in the first mode such that the motor (85; 185) is configured to operate the stem (80, 80, 250, 84; 80; 200) to a position representing a second pre-tensioned position of the actuator (16; 16); wherein, in the second pre-tensioned position, upon loss of input force to the holding element (83; 100, 183), the holding element (83; 100, 183) is configured to release its holding force on the force transmitting arrangement (84, 80, 80; 83, 84; 183, 195, 201; 84, 99, 86, 101, 83) and the first biasing element (82; 182), thereby the first connecti

A gas transportation device includes an inlet plate, a substrate, a resonance plate, an actuating plate, a piezoelectric component and an outlet plate stacked sequentially. The gas transportation device includes a valve disposed within at least one of the inlet of the inlet plate and the outlet of the outlet plate. A first chamber is formed between the resonance plate and the actuating plate, and a second chamber is formed between the actuating plate and the outlet plate. When the piezoelectric component drives the actuating plate, a pressure gradient is formed between the first and second chambers and the valve is opened. Accordingly, gas is inhaled into the convergence chamber via the inlet, transported into the first chamber through a central aperture of the resonance plate, transported into the second chamber through a vacant space of the actuating plate, and then discharged out from the outlet, so as to transport the gas.

A servo valve comprising first and second nozzles and first and second piezoelectric actuators arranged to control fluid flow through the first and second nozzles respectively. A first fluid flow path is defined between the first nozzle and the first piezoelectric actuator and a second fluid flow path is defined between the second nozzle and the second piezoelectric actuator. The first and second piezoelectric actuators are arranged such that applying a voltage to the first and second piezoelectric actuators causes a change in dimension thereof, which acts to open or restrict said first and second fluid flow paths respectively.

A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

A multi-way valve includes a control pressure channel, first and second control fluid channels, a valve body in the first and second control fluid channels, and an electrically controlled device having a drive member and an armature. The armature moves back and forth by the drive member between inactive and active positions. Movement of the armature from the inactive to the active position displaces the valve body arrangement to an active position, closing the first and opening the second control fluid channel is open. The electrically controlled device includes a drive body connected to the armature and a first spring member between the armature and the drive body. The valve body arrangement is biased towards the inactive position by a second spring member. The armature in the inactive position is biased towards the active position by a third spring member. Also disclosed is an actuator including the valve.