An actuator includes a housing defining an inlet port, a piston and a return spring disposed within the housing, and an elastically deformable element. The return spring is configured to apply a biasing force to the piston to move the piston to a spring return position. A first fluid pressure applied to the inlet port moves the piston against the biasing force of the return spring to a first actuated position in which the piston indirectly engages a stop portion of the actuator housing. A second fluid pressure, greater than the first fluid pressure, applied to the inlet port moves the piston against the elastically deformable element to compress the elastically deformable element to move the piston to a second actuated position beyond the first actuated position.

A purging system for a multiple variety seed meter of a multi-variety planter. The purging system includes seed return valves that may be arranged for receiving seed that was removed from the seed meter. The seed return valves return the removed seed into corresponding appropriate seed storage compartments to allow a new seed variety to be delivered to the seed meter while reducing seed variety mixing in the seed meter. A pipe with a purge passage may extend from the seed meter to a purging hose that delivers the removed seed to the seed return valve(s). Each seed return valve may be a vacuum-actuated piston airlock valve assembly with a valve plunger that reciprocates to define seed collecting and releasing states of the valve.

A purging system for a multiple variety seed meter of a multi-variety planter. The purging system includes seed return valves that may be arranged for receiving seed that was removed from the seed meter. The seed return valves return the removed seed into corresponding appropriate seed storage compartments to allow a new seed variety to be delivered to the seed meter while reducing seed variety mixing in the seed meter. A pipe with a purge passage may extend from the seed meter to a purging hose that delivers the removed seed to the seed return valve(s). Each seed return valve may be a vacuum-actuated piston airlock valve assembly with a valve plunger that reciprocates to define seed collecting and releasing states of the valve.

A relief valve includes: a housing; a plunger movable to each of a closed position and an open position; a differential pressure chamber; a spring member; a piston; and a damping chamber. The plunger includes a first damping passage penetrating the plunger and bringing an area outside the plunger and a through passage into communication. The piston includes a second damping passage penetrating the piston and bringing an area inside the piston and the damping chamber into communication. A communication space connected to each of the first damping passage and the second damping passage is formed between the plunger and the piston.

An actuator assembly includes, a main body, a perimeter compressor, an actuator shaft, an actuator, and a sealing member. The perimeter compressor is slidable between a retracted position and an extended position. The actuator shaft extends through the main body and the perimeter compressor and is operably coupled with a proximal end of the actuator shaft to facilitate movement of the actuator shaft between the extended position and the retracted position. The sealing member includes an inner and outer portion. The inner portion is releasably coupled with the distal end of the actuator shaft and is configured to interface with the valve body. Sliding the perimeter compressor into the extended position facilitates sandwiching of the sealing member between the perimeter compressor and the valve body. Sliding the perimeter compressor into the retracted position facilitates releasement of the sealing member therefrom.

The present invention provides a switching valve comprising: a housing including a first port, a second port, and a third port; a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port; and a pressing member configured to press the valve element toward a side of the first port.

Systems and methods for dispensing a liquid onto a substrate are disclosed. A dispensing assembly includes a housing, a valve stem, and a control valve. The housing receives the liquid to be dispensed. The valve stem is disposed in the housing and has a first configuration, in which the liquid is allowed to exit the housing, and a second configuration, in which the liquid is prevented from exiting the housing. The control valve receives pressurized air from a pressurized air source. The control valve has a first position, in which the pressurized air acts on the valve stem to move the valve stem to the first configuration or to the second configuration, and a second position, in which the pressurized air is moved out of the dispensing assembly through an exhaust passage defined therein.

The present disclosure provides a valve apparatus that prevents defects in the valve apparatus and prevents damage to the heat insulating material due to a cryogenic liquid fluid, and a semiconductor processing device including the same and a manufacturing method thereof.

A valve assembly includes a body, a spring, a spacer, an interfacing member, a connecting rod, and a plunger. The body includes a first section defining a first opening, a second section defining a chamber, a second opening, and a pressure port, and a third section defining a third opening and a release port. The second section is between the first section and the third section. The spring is positioned within the third opening. The spacer is positioned within the third opening and coupled with the spring. The interfacing member is positioned partially within the third opening and coupled with the spacer. The connecting rod is positioned partially within the second opening and the chamber and coupled with the interfacing member. The plunger is positioned within the chamber and coupled with the connecting rod.

The present disclosure relates to a valve assembly for controlling flow. The valve body has an inlet end and an outlet end. A piston is positioned within the valve body and is movable between an open position to open the valve body and a closed position to close the valve body. A spring is mounted between the piston and a spring adjustment member. A portion of the spring adjustment member is accessible through the inlet end of the valve body so as to be engageable by a tool to facilitate rotation of the spring adjustment member to vary compression of the spring to set a spring pressure rating.