A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

A fluid control apparatus includes a block elongated in a longitudinal direction and having a predetermined width, an internal flow channel formed inside the block so as to extend in the longitudinal direction, a first control valve mounted on the block, a second control valve mounted on the block at a position downstream of the first control valve. In the fluid control apparatus, the internal flow channel has a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof and also has a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto. In addition, the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.

The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the gas flow unit and to the adjusting unit and thereby seal the inner volume, and a position determination unit which is arranged on or in the adjusting device and is adapted to determine a position of a part of the adjusting unit which has a fixed local relation to the plate.

A fluid flow rate sensor, which may also be the basis of a valve for a fire suppression system, uses a sensing arm to convey motion of an obturation body or a valve closing member to a sensor system which evaluates the motion and generates a calibrated measure of the flow rate and/or an alarm signal in response if warranted. The obturation body and the valve closing member are capable of both rotation and translational motion, both of which are sensed using the sensing arm. The sensor system is isolated from the fluid within the valve.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.

An operation information collection system for a fluid control device configured as an operation information collection module includes a detected value acquisition unit acquiring a detected value of a state change or a device operation able to detect opening/closing operations from the fluid control device, a calculation processing unit calculating a rate of change of detected values separated by a predetermined time based on the detected value, and an operation information registration unit registering the rate of change of the detected values separated by the predetermined time to an operation information storage unit as an operation information of the fluid control device.

Embodiments of the present disclosure relate to an apparatus, a system, and a method for detecting and indicating the position of an actuator of wellsite equipment. The apparatus comprises a housing, the housing comprising a first housing portion operatively coupleable to the actuator and a second housing portion configured to receive at least one sensor therewithin. The at least one sensor provides an output signal indicative of the position of the actuator. The position of the actuator is indicative of a valve position.

An instruction duty computation unit computes an instruction duty ratio representing a ratio between an energization time and a non-energization time of a motor based on an actual rotation angle detected by a rotation angle sensor and a target rotation angle of a valve member. The rotation angle sensor detects an actual rotation angle of a valve member of a fluid control valve. A stress computation unit computes a valve member load torque of the valve member based on the actual rotation angle and an actual duty ratio of the motor. An actual duty computation unit computes a new value of the actual duty ratio based on an instruction duty ratio computed by using an instruction duty computation unit and a valve member load torque computed by using a stress computation unit.

Techniques for diagnosing failures in a digital solenoid I/P converter are provided herein. A controller of the I/P converter may apply a fixed voltage to an I/P coil of the I/P converter, causing an armature to move from an off-position to an on-position in a properly-functioning I/P converter. The controller may receive an indication of whether a digital logic line trip has occurred, indicating that a current for the I/P coil has reached a desired maximum current level. The controller may remove the fixed voltage applied to the I/P coil when the maximum current level is reached or when a threshold period of time has elapsed from the application of the fixed voltage to the I/P coil. The controller may diagnose, based on whether the digital logic line trip occurred prior to removing the fixed voltage, a failure in the I/P converter.