A regulator performing fluid control includes an annular protruding portion having a valve seat on its leading end and an annular diameter-decreasing surface formed by decreasing an inner diameter of the annular protruding portion toward a valve hole. The regulator includes a valve element provided with a contact surface to be in contact with the valve seat and a columnar step portion provided on an inner peripheral side of the valve seat protruding from the contact surface toward the valve hole, the step portion having a diameter larger than an inner diameter of the valve hole and being coaxially formed with the valve hole. An annular ridge is formed by an outer peripheral surface of the step portion intersecting an end face of the step portion on the valve-hole side with the annular diameter-decreasing surface to constitute a passage narrowing portion.

This manufacturing method for a fluid control apparatus, in which the flow of a fluid is controlled by bringing a diaphragm valve element into contact with or separating the same from a valve seat, is characterized in that: the diaphragm valve element is a joint body of a seat member making contact with the valve seat and a body member; the joint body is formed by cutting a material joint body obtained by depositing a seat member material which is a material for the seat member and a body member material which is a material for the body member, and the deposition is performed over a wider range than a contact surface between the seat member and the body member of the joint body, on the contact surface between the seat member material and the body member material of the material joint body.

A diaphragm valve includes: a valve main body having formed therein a valve chamber, and an inflow passage and an outflow passage being in communication with the valve chamber; an annular valve seat formed in the valve chamber; a diaphragm contacting and separating from the valve seat; and a drive unit driving the diaphragm. The drive unit has a drive unit housing attached to the valve main body so that an outer peripheral edge portion of the diaphragm is sandwiched between the valve main body and the drive unit housing, and the drive unit housing is formed of an electroconductive fluorine resin material.

A valve includes a valve body with an inlet and an outlet coupled to a tubular conduit operable to circulate a flow of a process fluid, an actuator with an interior volume divided by a valve diaphragm into a first volume portion that encloses a working fluid and a second volume portion, and a plug coupled to the valve diaphragm and operable to move toward an open position or a closed position based on movement of the valve diaphragm relative to a pressure of the working fluid. A seal isolator is coupled to the tubular conduit and includes an isolator diaphragm having a first side exposed to the flow of the fluid and a second side fluidly coupled to the first volume portion through the working fluid. The isolator diaphragm is configured to transmit a pressure of the flow of the process fluid to the pressure of the working fluid.

A diaphragm valve includes: a valve main body having formed therein a valve chamber, and an inflow passage and an outflow passage being in communication with the valve chamber; an annular valve seat formed in the valve chamber; a diaphragm contacting and separating from the valve seat; and a drive unit driving the diaphragm. The drive unit has a drive unit housing attached to the valve main body so that an outer peripheral edge portion of the diaphragm is sandwiched between the valve main body and the drive unit housing, and the drive unit housing is formed of an electroconductive fluorine resin material.

An expansion valve includes: a main body portion having a valve chamber and a valve seat; a case fixed to the main body portion; and a screw shaft that is driven by driving force of rotation obtained by reducing a rotational movement of a rotor due to the excitation of an excitation portion by a speed reduction mechanism to move a valve body forward and backward. A bellows configured to seal a gap between the inside of the case and the valve chamber is arranged in the valve chamber to be externally fitted onto the valve body, and the rotation of the valve body relative to the main body portion is restricted by a rotation restrictor.

A valve includes a valve body with an inlet and an outlet coupled to a tubular conduit operable to circulate a flow of a process fluid, an actuator with an interior volume divided by a valve diaphragm into a first volume portion that encloses a working fluid and a second volume portion, and a plug coupled to the valve diaphragm and operable to move toward an open position or a closed position based on movement of the valve diaphragm relative to a pressure of the working fluid. A seal isolator is coupled to the tubular conduit and includes an isolator diaphragm having a first side exposed to the flow of the fluid and a second side fluidly coupled to the first volume portion through the working fluid. The isolator diaphragm is configured to transmit a pressure of the flow of the process fluid to the pressure of the working fluid.

This application provides a valve member that includes a diaphragm portion and a valve head attachable to the diaphragm portion. The valve head includes an engagement portion configured to engage with a valve seat defined in the valve. The engagement portion is formed of a melt processable material that contains at least one fluoropolymer. The diaphragm portion is formed of a material that is non-melt processable and contains at least one fluoropolymer. This application also provides a valve that includes the valve member and a passageway with the valve seat. The valve head is configured to be moveable relative to the valve seat.

Provided is a flow rate regulating device including a valve body section having a flat valve body surface; a main body section including a valve chamber, an inflow channel, an outflow channel, and a communication channel; a valve seat section having a flat valve seat surface provided around an inflow opening; a regulation mechanism that moves the valve body section along an axis to regulate a distance between the valve body surface and the valve seat surface; and a control unit that controls the regulation mechanism so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, wherein a channel cross-sectional area of the communication channel is smaller than each of a channel cross-sectional area of the inflow channel and a channel cross-sectional area of the outflow channel.

To prevent a defect in which particles such as impurities flow into a liquid that flows in from an inlet flow path and discharged from an outlet flow path. Provided is a suck-back valve including: a housing part; a valve element part; a diaphragm part; an open-close mechanism that brings the valve element part and a valve seat part into contact or separates the valve element part and the valve seat part from each other to switch between a closed state and an open state; and a suck-back mechanism that moves the diaphragm part in a direction in which the diaphragm part separates from the valve seat part to increase a volume of a valve chamber. The valve element part and the diaphragm part are molded integrally, the open-close mechanism is disposed in an adjacent space, and the valve element part and the open-close mechanism are coupled in the adjacent space.