Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on valves which can provide flows at different rates and in a minimally turbulent manner. In one embodiment, a valve assembly is disclosed, the valve assembly having a valve body, a closure member, a seat, and a radial flow guide. The radial flow guide has a plurality of flow passages. The closure member has a needle, the needle having a plurality of grooves therein. The resulting valve assembly enables improved control of fluid and reduces turbulence in the resultant flow.

A control valve body has a flow passage including an inlet, an outlet, a first portion, and a second portion, the first portion having a first axis centered through the inlet, a first bend, and a second axis, the second portion having a third axis centered through the outlet, a second bend, and a fourth axis, the fourth axis perpendicular to the second axis. The first portion is to an upstream side of a junction of the first portion and the second portion, and the second portion is to a downstream side of the junction. The second axis is centered through the junction. An opening to the second portion has a fifth axis aligned with the second axis.

A control valve body has a flow passage including an inlet, an outlet, a first portion, and a second portion, the first portion having a first axis centered through the inlet, a first bend, and a second axis, the second portion having a third axis centered through the outlet, a second bend, and a fourth axis, the fourth axis perpendicular to the second axis. The first portion is to an upstream side of a junction of the first portion and the second portion, and the second portion is to a downstream side of the junction. The second axis is centered through the junction. An opening to the second portion has a fifth axis aligned with the second axis.

This application provides a valve member that includes a diaphragm portion and a valve head attachable to the diaphragm portion. The valve head includes an engagement portion configured to engage with a valve seat defined in the valve. The engagement portion is formed of a melt processable material that contains at least one fluoropolymer. The diaphragm portion is formed of a material that is non-melt processable and contains at least one fluoropolymer. This application also provides a valve that includes the valve member and a passageway with the valve seat. The valve head is configured to be moveable relative to the valve seat.

This application provides a valve member that includes a diaphragm portion and a valve head attachable to the diaphragm portion. The valve head includes an engagement portion configured to engage with a valve seat defined in the valve. The engagement portion is formed of a melt processable material that contains at least one fluoropolymer. The diaphragm portion is formed of a material that is non-melt processable and contains at least one fluoropolymer. This application also provides a valve that includes the valve member and a passageway with the valve seat. The valve head is configured to be moveable relative to the valve seat.

A first diaphragm and a second diaphragm are disposed between a valve element and a body, a diaphragm chamber is formed between the first diaphragm and the second diaphragm, the first diaphragm separates a valve chamber from the diaphragm chamber, and the second diaphragm separates the diaphragm chamber from a back pressure chamber. The diaphragm chamber communicates with an output port, the valve chamber and the back pressure chamber communicate with an input port. A difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a passage area in a valve seat.

A first diaphragm and a second diaphragm are disposed between a valve element and a body, a diaphragm chamber is formed between the first diaphragm and the second diaphragm, the first diaphragm separates a valve chamber from the diaphragm chamber, and the second diaphragm separates the diaphragm chamber from a back pressure chamber. The diaphragm chamber communicates with an output port, the valve chamber and the back pressure chamber communicate with an input port. A difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a passage area in a valve seat.

A double-seat valve includes a first closing element associated with a first valve seat, a second closing element associated with a second valve seat, a hollow rod connected to the second closing element, a valve rod connected to the first closing element and extending through the hollow rod, a first diaphragm fastened to the hollow rod and to a housing of the valve, and a second diaphragm arranged to seal a channel between the valve rod and hollow rod. The second closing element includes an annular body connected to a supporting section, the annular body and the supporting section designed to clamp the second diaphragm and the connection region to a gap seal against an interior. To simplify the design and to ensure reliable functioning under hygienic conditions, the supporting section has a leakage channel that forms a section of a fluid connection between the connection region and the channel.

A double-seat valve includes a first closing element associated with a first valve seat, a second closing element associated with a second valve seat, a hollow rod connected to the second closing element, a valve rod connected to the first closing element and extending through the hollow rod, a first diaphragm fastened to the hollow rod and to a housing of the valve, and a second diaphragm arranged to seal a channel between the valve rod and hollow rod. The second closing element includes an annular body connected to a supporting section, the annular body and the supporting section designed to clamp the second diaphragm and the connection region to a gap seal against an interior. To simplify the design and to ensure reliable functioning under hygienic conditions, the supporting section has a leakage channel that forms a section of a fluid connection between the connection region and the channel.

A fluid control valve and manufacturing method thereof, wherein, when a pressing force acts on the engagement surface between a diaphragm member and a valve seat-contacting member, the valve seat-contacting member is not displaced and no gap is formed. The diaphragm member made of a first fluorine-based resin material is provided with a diaphragm membrane and a rod-shaped part in the center of the diaphragm membrane. The valve seat-contacting member made of an injection-moldable second fluorine-based resin material is provided with a ring-shaped sealing surface and a recess on the opposite side from the ring-shaped sealing surface. The rod-shaped part is partly fitted into the recess. A ring-shaped recessed is formed on outer circumference of a portion of the rod-shaped part. A small diameter recess is formed on the inner circumference of the recess. The ring-shaped recess section and the small diameter recess adhere closely to form the engagement surface.